KXTC9 Series
Accelerometers and Inclinometers
Ultra-small Package - 3x3x0.9mm LGA
Analog Output
Low Power Consumption
Factory-programmable Internal Low Pass Filter
Low Noise
Lead-free Solderability
Excellent Temperature Performance
High Shock Survivability
User–definable Bandwidth
Factory-programmable Offset and Sensitivity
Self-test Function
FEATURES
“Kionix” is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided
in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution.
No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product
specifications or discontinue this product at any time without prior notice.
© Kionix 2010 All Rights Reserved
November 3, 2010 Rev. 0
Page 1 of 2
The KXTC9 series is designed to provide a high signal-to-noise ratio with
excellent performance over temperature. These sensors can accept supply
voltages between 1.8V and 3.6V. Sensitivity is factory programmable allow-
ing customization for applications requiring from ±1.5g to ±6g ranges. Sev-
eral pre-set internal low pass filters can eliminate the need for external filter
capacitors. If the pre-set values are not optimal for an application, the sen-
sor bandwidth is user-definable with the use of external capacitors.
These high-performance silicon micromachined linear accelerometers and
inclinometers consist of a sensor element and an ASIC packaged in a
3x3x0.9mm Land Grid Array Dual (LGA). The sensor element is fabricated
from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE)
processes, and is protected from the environment by a hermetically-sealed
silicon cap at the wafer level.
The sensor element functions on the principle of differential capacitance.
Acceleration causes displacement of a silicon structure resulting in a change
in capacitance. An ASIC, fabricated using a standard CMOS manufacturing
process, detects and transforms changes in capacitance into an analog out-
put voltage, which is proportional to acceleration. The sense element design
utilizes common mode cancellation to decrease errors from process variation
and environmental stress.
PROPRIETARY TECHNOLOGY
36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info@kionix.com
MARKETS
APPLICATIONS
\\
Gesture Recognition
Free-fall Detection
Inclination and Tilt Sensing
Image Stabilization
Static or Dynamic Acceleration
Game Controllers & Computer Peripherals
Cell Phones and Handheld PDAs
Ultra-mobile PCs/Laptops/Hard Disk Drives
Sports Diagnostic Equipment/Pedometers
Cameras and Video Equipment