Bulk / Surface Micromachined Pressure Sensor Systems Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme Finkenstrae 61 D - 47057 Duisburg Phone: +49 (0) 2 03 / 37 83-0 Fax: +49 (0) 2 03 / 37 83-266 Internet: http://www.ims.fhg.de Contact: Michael Bollerott Phone: +49 (0) 2 03 / 37 83-277 E-Mail: bollerot@ims.fhg.de In relation to the fast grown pressure sensor market the IMS decided in 1996 to install a new business field for development and production of pressure sensor systems. The IMS experience in the pressure sensor field started 8 years ago with the development of a heart catheter pressure sensor with a monolithic integrated pressure sensor in surface micromachining. Fig. 1: Photomicrograph of pressure sensitive membrane In the following years a lot of different pressure sensor applications were developed at the IMS. This includes new applications for the IMS surface micromachined pressure sensor and the installation of customized technology for special applications like high temperature pressure measurement. Goal of the business field is the development, production and support of pressure sensor technology for customized applications. Fig. 2: Cut through a membrane The different fields of the business can be summarized by the following list: * Development and production of membrane passivation aluminium special pressure sensors. * Development and production of n+- area special sensor readout circuits on one chip. 5263 FhG-IMS reserves the right to change products and specifications without prior notice. This information does not convey any license by any implication or otherwise under patents or other right. Application circuits shown, if any, are typical examples illustrating the operation of the devices. FhG-IMS cannot assume responsibility for any problems rising out of the use of these circuits. p+ - area cavity (filled with vacuum) * Installation and production of customized pressure sensor technology. membrane passivation aluminium * Analysis and calibration of pressure sensors in the range of 2 to 2000 bars. * Consultant for pressure applications and technology. sensor capacitance Fig. 3: This diagramm shows the pressure cavity of our pressure sensors and how it works. September 1999 p_bulk-e.doc