September 1999 p_bulk-e.doc
In relation to the fast grown
pressure sensor market the IMS
decided in 1996 to install a new
business field for development
and production of pressure sensor
systems.
The IMS experience in the pres-
sure sensor field started 8 year s
ago with the development of a
heart catheter pressure sensor
with a monolithic int e gr at ed
pressure sensor in surface
micromachining.
In the following years a lot of
different pr essur e sensor applica-
tions were developed at the IMS.
This includes new applicat ions for
the IMS surface micromachined
pressure sensor and the inst alla-
tion of customized technology f or
special applications like high t e m -
perature pressure measurement.
Goal of the business field is the
development, product ion and
support of pressure sensor t ech-
nology for customized applica-
tions.
The different f ields of t he business
can be summarized by the follo-
wing list:
• Development and production of
special pressure sensors.
• Development and production of
special sensor readout circuits on
one chip.
• Installation and production of
customized pressure sensor
technology.
• Analysis and calibration of
pressure sensors in the range of
2 to 2000 bars.
• Consultant for pr essur e
applications and technology.
Fig. 1: Photomicrograph of pressure se nsi ti v e
membrane
Fig. 2: Cut through a me mbrane
aluminium
n - area
+
membrane
p - area
passivation
+
aluminium membrane passivation
sensor capacitance
cavity (filled with vacuum)
Fig. 3: This dia gramm shows the pre ssure
cavity of our pressure sensors and
how it works.
Bulk / Surface
Micromachined
Pressure
Sensor Systems
Fraunhofer-Institut für
Mikroelektronisc h e
Schaltungen und Systeme
Finke nstraße 61
D - 47057 Duisburg
Phone: +49 (0) 2 03 / 37 83-0
Fax: +49 (0) 2 03 / 37 83-266
Internet: http://www.ims.fhg.de
Contact:
Michael Bollerott
Phone: +49 (0) 2 03 / 37 83-277
E-Mail: bollerot@ims.fhg.de
FhG-IMS reserve s the right to change
products and spec i fi cations without prior
notice. This informa ti on does not convey
any lic ense by a ny i m pl i c ation or other-
wise under patents or other right.
Application circuits shown, if any, are
typical examples illustrating the opera-
tion of the dev i ces. FhG-I MS cannot
assume responsibility for a ny proble m s
rising out of the use of these circ ui ts.
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