2182A-US - KEITHLEY - Datasheet.Directory

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Low noise measurements for research, metrology, and other low voltage testing applications

The two-channel Model 2182A Nanovoltmeter

is optimized for making stable, low noise

voltage measurements and for characterizing

low resistance materials and devices reliably

and repeatably. It provides higher measurement

speed and significantly better noise performance

than alternative low voltage measurement

solutions.

The Model 2182A represents the next step

forward in Keithley nanovoltmeter technology,

replacing the original Model 2182 and offering

enhanced capabilities including pulse capability,

lower measurement noise, faster current rever-

sals, and a simplified delta mode for making

resistance measurements in combination with a

reversing current source, such as the Model 6220

or 6221.

•Make low noise measurements at

high speeds, typically just 15nV

p-p noise at 1s response time,

40–50nV p-p noise at 60ms

•Delta mode coordinates

measurements with a reversing

current source at up to 24Hz

with 30nV p-p noise (typical) for

one reading. Averages multiple

readings for greater noise

reduction

•Synchronization to line provides

110dB NMRR and minimizes

the effect of AC common-mode

currents

•Dual channels support measuring

voltage, temperature, or the ratio

of an unknown resistance to a

reference resistor

•Built-in thermocouple

linearization and cold junction

compensation

Figure 1. Compare the Model 2182A’s DC noise performance with a nanovolt/micro-ohm-

meter’s. All the data shown was taken at 10 readings per second with a low thermal short

applied to the input.

-100

-50

100

150

Keithley 2182A

nV/µΩ Meter

0 100

Number of Readings

Flexible, Effective Speed/Noise Trade-offs

The Model 2182A makes it easy to choose the best speed/filter combination for a particular applica-

tion’s response time and noise level requirements. The ability to select from a wide range of response

times allows optimizing speed/noise trade-offs. Low noise levels are assured over a wide range of

useful response times, e.g., 15nV p-p noise at 1s and 40-50nV p-p noise at 60ms are typical. Figure 1

illustrates the Model 2182A’s noise performance.

2182A

Nanovoltmeter

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Low noise measurements for research, metrology, and other low voltage testing applications

Reliable Results

Power line noise can compromise measurement accuracy significantly at the nanovolt level. The

Model 2182A reduces this interference by synchronizing its measurement cycle to line, which

minimizes variations due to readings that begin at different phases of the line cycle. The result is

exceptionally high immunity to line interference with little or no shielding and filtering required.

Optimized for Use with Model 6220/6221 Current Sources

Device test and characterization for today’s very small and power-efficient electronics requires sourc-

ing low current levels, which demands the use of a precision, low current source. Lower stimulus

currents produce lower—and harder to measure—voltages across the devices. Linking the Model

2182A Nanovoltmeter with a Model 6220 or 6221 Current Source makes it possible to address both of

these challenges in one easy-to-use configuration.

When connected, the Model 2182A and Model 6220 or 6221 can be operated like a single instrument.

Their simple connections eliminate the isolation and noise current problems that plague other solu-

tions. The Model 2182A/622X combination allows making delta mode and differential conductance

measurements faster and with less noise than the original Model 2182 design allowed. The Model

2182A will also work together with the Model 6221 to make pulse-mode measurements.

The 2182A/622X combination is ideal for a variety of applications, including resistance measure-

ments, pulsed I-V measurements, and differential conductance measurements, providing significant

advantages over earlier solutions like lock-in amplifiers or AC resistance bridges. The 2182A/622X

combination is also well suited for many nanotechnology applications because it can measure

resistance without dissipating much power into the device under test (DUT), which would otherwise

invalidate results or even destroy the DUT.

An Easy-to-Use Delta Mode

Keithley originally created the delta mode method for measuring voltage and resistance for the

Model 2182 and a triggerable external current source, such as the Model 2400 SourceMeter® SMU

instrument. Basically, the delta mode automatically triggers the current source to alternate the signal

polarity, and then triggers a nanovoltmeter reading at each polarity. This current reversal technique

Ordering Information

2182A Nanovoltmeter

Accessories Supplied

2107-4 Low Thermal Input Cable

with spade lugs, 1.2m (4 ft).

User manual, service

manual, contact cleaner,

line cord, alligator clips.

Measurement

Delta Mode

Measurement

4µV

5nV

APPLICATIONS

Research

•Determining the transition

temperature of superconductive

materials

• I-V characterization of a material

at a specific temperature

•Calorimetry

•Differential thermometry

•Superconductivity

•Nanomaterials

Metrology

•Intercomparisons of standard cells

• Null meter for resistance bridge

measurements

ACCESSORIES AVAILABLE

2107-30 Low Thermal Input Cable with spade lugs,

9.1m (30 ft)

2182-KIT Low Thermal Connector with strain relief

2187-4 Low Thermal Test Lead Kit

2188 Low Thermal Calibration Shorting Plug

4288-1 Single Fixed Rack Mount Kit

4288-2 Dual Fixed Rack Mount Kit

7007-1 Shielded GPIB Cable, 1m (3.2 ft)

7007-2 Shielded GPIB Cable, 2m (6.5 ft)

7009-5 Shielded RS-232 Cable, 1.5m (5 ft)

8501-1 Trigger Link Cable, 1m (3.2 ft)

8501-2 Trigger Link Cable, 2m (6.5 ft)

8503 Trigger Link Cable to 2 male BNC connectors

KPCI-488LPA IEEE-488 Interface/Controller for the PCI Bus

KUSB-488B IEEE-488 USB-to-GPIB Interface Adapter

SERVICES AVAILABLE

2182A-3Y-EW 1-year factory warranty extended to 3 years

from date of shipment

C/2182A-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3

years of purchase*

* Not available in all countries

Figure 2. Results from a Model 2182A/6220 using the delta mode to measure a 10mW resistor

with a 20µA test current. The free Model 6220/6221 instrument control example start-up

software used here can be downloaded from www.keithley.com.

2182A

Nanovoltmeter

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Low noise measurements for research, metrology, and other low voltage testing applications

2182A Nanovoltmeter

cancels out any constant thermoelectric offsets, so the results reflect the

true value of the voltage being measured. The improved delta mode for

the Model 2182A and the Model 622X current sources uses the same basic

technique, but the way in which it’s implemented has been simplified dra-

matically. The new technique can cancel thermoelectric offsets that drift

over time (not just static offsets), produces results in half the time of the

original technique, and allows the current source to control and configure

the Model 2182A. Two key presses are all that’s required to set up the

measurement. The improved cancellation and higher reading rates reduce

measurement noise to as little as 1nV.

Differential Conductance Measurements

Characterizing non-linear tunneling devices and low temperature devices

often requires measuring differential conductance (the derivative of a

device’s I-V curve). When used with a Model 622X current source, the

Model 2182A is the industry’s fastest, most complete solution for differen-

tial conductance measurements, providing 10X the speed and significantly

lower noise than other instrumentation options. There’s no need to

average the results of multiple sweeps, because data can be obtained in a

single measurement pass, reducing test time and minimizing the potential

for measurement error.

Pulsed Testing with the Model 6221

When measuring small devices, introducing

even tiny amounts of heat to the DUT can raise

its temperature, skewing test results or even

destroying the device. When used with the

Model 2182A, the Model 6221’s pulse capability

minimizes the amount of power dissipated into

a DUT. The Model 2182A/6221 combination

synchronizes the pulse and measurement. A

measurement can begin as soon as 16µs after

the Model 6221 applies the pulse. The entire

pulse, including a complete nanovolt measure-

ment, can be as short as 50µs.

In the delta, differential conductance, and pulse

modes, The Model 2182A produces virtually no transient currents, so it’s

ideal for characterizing devices that can be easily disrupted by current spikes

(see Figure 4).

Metrology Applications

The Model 2182A combines the accuracy of a digital multimeter with

low noise at high speeds for high-precision metrology applications. Its

low noise, high signal observation time, fast measurement rates, and

2ppm accuracy provide the most cost-effective meter available today for

applications such as intercomparison of voltage standards and direct

measurements of resistance standards.

Nanotechnology Applications

The Model 2182A combined with the Model 622X current source or Series

2400 SourceMeter® SMU instrument is a highly accurate and repeatable

solution for measuring resistances on carbon nanotube based materials

and silicon nanowires.

Figure 3. It’s simple to connect the Model 2182A to the Model

6220 or 6221 to make a variety of measurements. The instrument

control example start-up software available for the Model 622X

current sources includes a step-by-step guide to setting up the

instrumentation and making proper connections.

GPIB or

Ethernet

RS-232

Trigger Link

DUT

2182A NANOVOLTMETER6220 DC AND AC CURRENT SOURCE

Model 2182A Model 622X

0.5µA

100µs

Figure 4. The Model 2182A produces the lowest transient currents of any nanovoltmeter available.

Competition 2182A 2182A in delta mode

Research Applications

The Model 2182A’s 1nV sensitivity, thermoelectric EMF cancellation, direct

display of “true” voltage, ability to perform calculations, and high measure-

ment speed makes it ideal for determining the characteristics of materials

such as metals, low resistance filled plastics, and high and low temperature

superconductors.

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Low noise measurements for research, metrology, and other low voltage testing applications

Optional Accessory: Model 2187-4 Low Thermal

Test Lead Kit

The standard cabling provided with the Model

2182A Nano volt meter and Model 622X Current

Sources provides everything normally needed

to connect the instruments to each other and to

the DUT. The Model 2187-4 Low Thermal Test

Lead Kit is required when the cabling provided

may not be sufficient for specific applications,

such as when the DUT has special connection

requirements. The kit includes an input cable

with banana terminations, banana extensions,

sprung-hook clips, alligator clips, needle probes,

and spade lugs to accommodate virtually any

DUT. The Model 2187-4 is also helpful when the

DUT has roughly 1GW impedance or higher.

In this case, measuring with the Model 2182A

directly across the DUT will lead to loading

errors. The Model 2187-4 Low Thermal Test Lead Kit provides a banana cable and banana jack

extender to allow the Model 2182A to connect easily to the Model 622X’s low impedance guard

output, so the Model 2182A can measure the DUT voltage indirectly. This same configuration also

removes the Model 2182A’s input capacitance from the DUT, so it improves device response time,

which may be critical for pulsed measurements.

Three Ways to Measure Nanovolts

DC nanovoltmeters. DC nanovoltmeters

and sensitive DMMs both provide low noise

DC voltage measurements by using long

integration times and highly filtered readings

to minimize the bandwidth near DC.

Unfortunately, this approach has limitations,

particularly the fact that thermal voltages

develop in the sample and connections vary,

so long integration times don’t improve

measurement precision. With a noise

specification of just 6nV p-p, the Model 2182A

is the lowest noise digital nanovolt meter

available.

AC technique. The limitations of the long

integration and filtered readings technique

have led many people to use an AC technique

for measuring low resistances and voltages.

In this method, an AC excitation is applied

to the sample and the voltage is detected

syn chronously at the same frequency and

an optimum phase. While this technique

removes the varying DC component, in many

experiments at high frequencies, users can

experience problems related to phase shifts

caused by spurious capacitance or the L/R

time constant. At low frequencies, as the

AC frequency is reduced to minimize phase

shifts, amplifier noise increases.

The current reversal method. The Model

2182A is optimized for the current reversal

method, which combines the advantages of

both earlier approaches. In this technique,

the DC test current is reversed, then the

difference in voltage due to the difference

in current is determined. Typically, this

measure ment is performed at a few hertz (a

frequency just high enough for the current

to be reversed before the thermal voltages

can change). The Model 2182A’s low noise

performance at measurement times of a

few hundred milliseconds to a few seconds

means that the reversal period can be set

quite small in comparison with the thermal

time constant of the sample and the con-

nections, effectively reducing the impact of

thermal voltages.

180

185

190

195

200

205

210

215

220

0817 25 33 42 50 58 67 75 83 92 100108 117 125

Voltage

(nV)

Temperature

(°C)

Minutes

–10

–5

Figure 5. The Model 2182A’s delta mode provides extremely stable results, even in the pres-

ence of large ambient temperature changes. In this challenging example, the 200nV signal

results from a 20µA current sourced by a Model 6221 through a 10mW test resistor.

2182A Nanovoltmeter

Figure 7. Model 2182A rear panel

Figure 6. Model 2187-4 Test Lead Kit

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Model 2182A specifications

Volts Specifications (20% over range)

CONDITIONS: 1PLC with 10 reading digital filter or 5PLC with 2 reading digital filter.

Accuracy: ±(ppm of reading + ppm of range)

(ppm = parts per million) (e.g., 10ppm = 0.001%) Temperature

Channel 1 Input 24 Hour 1 90 Day 1 Year 2 Year Coefficient

Range Resolution Resistance TCAL ±1°C TCAL ±5°C TCAL ±5°C TCAL ±5°C 0°–18°C & 28°–50°C

10.000000 mV 2, 3, 4 1 nV >10 GW 20 + 4 40 + 4 50 + 4 60 + 4 (1 + 0.5)/°C

100.00000 mV 10 nV >10 GW 10 + 3 25 + 3 30 + 4 40 + 5 (1 + 0.2)/°C

1.0000000 V 100 nV >10 GW 7 + 2 18 + 2 25 + 2 32 + 3 (1 + 0.1)/°C

10.000000 V 1 µV >10 GW 2 + 1 5 18 + 2 25 + 2 32 + 3 (1 + 0.1)/°C

100.00000 V 4 10 µV 10 MW ±1% 10 + 3 25 + 3 35 + 4 52 + 5 (1 + 0.5)/°C

Channel 2 6, 10

100.00000 mV 10 nV >10 GW 10 + 6 25 + 6 30 + 7 40 + 7 (1 + 1 )/°C

1.0000000 V 100 nV >10 GW 7 + 2 18 + 2 25 + 2 32 + 3 (1 + 0.5)/°C

10.000000 V 1 µV >10 GW 2 + 1 5 18 + 2 25 + 2 32 + 3 (1 + 0.5)/°C

CHANNEL 1/CHANNEL 2 RATIO: For input signals ≥1% of the range, Ratio Accuracy =

±{[Channel 1 ppm of Reading + Channel 1 ppm of Range * (Channel 1 Range/Channel 1 Input)] + [Channel 2 ppm of Reading + Channel 2 ppm of Range * (Channel 2 Range/Channel 2 Input)]}.

DELTA (hardware-triggered coordination with Series 24XX, Series 26XXA, or Series 622X current sources for low noise R measurement):

Accuracy = accuracy of selected Channel 1 range plus accuracy of I source range.

DELTA MEASUREMENT NOISE WITH 6220 or 6221: Typical 3nVrms /

(10mV range)21. 1Hz achieved with 1PLC, delay = 1ms, RPT filter = 23 (20 if 50Hz).

PULSE-MODE (WITH 6221): Line synchronized voltage measurements within current pulses from 50µs to 12ms, pulse repetition rate up to 12Hz.

PULSE MEASUREMENT NOISE (typical rms noise, RDUT<10W): ±(0.009ppm of range*)/ meas_time /

pulse_avg_count + 3nV** / (2 · meas_time · pulse_avg_count)

for 10mV range.

* 0.0028ppm for the 100mV range, 0.0016ppm for ranges 1V and above.

** 8nV/

for ranges above 10mV. meas_time (seconds) = pulsewidth – pulse_meas_delay in 33µs incr.

DC Noise Performance 7 (DC noise expressed in volts peak-to-peak)

Response time = time required for reading to be settled within noise levels from a stepped input, 60Hz operation.

Channel 1

Response Range

Time NPLC, Filter 10 mV 100 mV 1 V 10 V 100 V NMRR 8 CMRR 9

25.0 s 5, 75 6 nV 20 nV 75 nV 750 nV 75 µV 110 dB 140 dB

4.0 s 5, 10 15 nV 50 nV 150 nV 1.5 µV 75 µV 100 dB 140 dB

1.0 s 1, 18 25 nV 175 nV 600 nV 2.5 µV 100 µV 95 dB 140 dB

667 ms 1, 10 or 5, 2 35 nV 250 nV 650 nV 3.3 µV 150 µV 90 dB 140 dB

60 ms 1, Off 70 nV 300 nV 700 nV 6.6 µV 300 µV 60 dB 140 dB

Channel 2 6, 10

25.0 s 5, 75 — 150 nV 200 nV 750 nV — 110 dB 140 dB

4.0 s 5, 10 — 150 nV 200 nV 1.5 µV — 100 dB 140 dB

1.0 s 1, 10 or 5, 2 — 175 nV 400 nV 2.5 µV — 90 dB 140 dB

85 ms 1, Off — 425 nV 1 µV 9.5 µV — 60 dB 140 dB

VOLTAGE NOISE VS. SOURCE RESISTANCE 11

(DC noise expressed in volts peak-to-peak)

Source Analog Digital

Resistance Noise Filter Filter

0 W 6 nV Off 100

100 W 8 nV Off 100

1 kW 15 nV Off 100

10 kW 35 nV Off 100

100 kW 100 nV On 100

1 MW 350 nV On 100

TEMPERATURE (Thermocouples) 12 ACCURACY

(Displayed in °C, °F, or K. Accuracy based on 90 Day/1 Year

ITS-90, exclusive of thermocouple errors.) 23° ±5°C

Relative to Simulated

TYPE RANGE RESOLUTION Reference Junction

J –200 to +760°C 0.001 °C ±0.2 °C

K –200 to +1372°C 0.001 °C ±0.2 °C

N –200 to +1300°C 0.001 °C ±0.2 °C

T –200 to +400°C 0.001 °C ±0.2 °C

E –200 to +1000°C 0.001 °C ±0.2 °C

R 0 to +1768°C 0.1 °C ±0.2 °C

S 0 to +1768°C 0.1 °C ±0.2 °C

B +350 to +1820°C 0.1 °C ±0.2 °C

2182A Nanovoltmeter

Operating Characteristics 13, 14

60Hz (50Hz) Operation

Function Digits Readings/s PLCs

DCV Channel 1, 7.5 3 (2) 5

Channel 2, 7.5 17, 19 6 (4) 5

Thermocouple 6.5 18, 19 18 (15) 1

6.5 18, 19, 20 45 (36) 1

5.5 17, 19 80 (72) 0.1

4.5 16, 17, 19 115 (105) 0.01

Channel 1/Channel 2 (Ratio), 7.5 1.5 (1.3) 5

Delta with 24XX, Scan 7.5 17, 19 2.3 (2.1) 5

6.5 18 8.5 (7.5) 1

6.5 18, 20 20 (16) 1

5.5 17 30 (29) 0.1

4.5 17 41 (40) 0.01

Delta with 622X 6.5 47 (40.0) 22 1

System Speeds 13, 15

RANGE CHANGE TIME: 14 <40 ms (<50 ms).

FUNCTION CHANGE TIME: 14 <45 ms (<55 ms).

AUTORANGE TIME: 14 <60 ms (<70 ms).

ASCII READING TO RS-232 (19.2K Baud): 40/s (40/s).

MAX. INTERNAL TRIGGER RATE: 16 120/s (120/s).

MAX. EXTERNAL TRIGGER RATE: 16 120/s (120/s).

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Model 2182A specifications

Measurement Characteristics

A/D LINEARITY: ±(0.8ppm of reading + 0.5ppm of range).

FRONT AUTOZERO OFF ERROR

10mV–10V: Add ±(8ppm of range + 500µV) for <10 minutes and ±1°C.

NOTE: Offset voltage error does not apply for Delta Mode.

AUTOZERO OFF ERROR

10mV: Add ±(8ppm of range + 100nV) for <10 minutes and ±1°C.

100mV–100V: Add ±(8ppm of range + 10µV) for <10 minutes and ±1°C.

NOTE: Offset voltage error does not apply for Delta Mode.

INPUT IMPEDANCE

10mV–10V: >10GW, in parallel with <1.5nF (Front Filter ON).

10mV–10V: >10GW, in parallel with <0.5nF (Front Filter OFF).

100V: 10MW ±1%.

DC INPUT BIAS CURRENT: <60pA DC at 23°C, –10V to 5V. <120pA @ 23°C, 5V to 10V.

COMMON MODE CURRENT: <50nA p-p at 50Hz or 60Hz.

INPUT PROTECTION: 150V peak to any terminal. 70V peak Channel 1 LO to Channel 2 LO.

CHANNEL ISOLATION: >10GW.

EARTH ISOLATION: 350V peak, >10GW and <150pF any terminal to earth. Add 35pF/ft with

Model 2107 Low Thermal Input Cable.

Analog Output

MAXIMUM OUTPUT: ±1.2V.

ACCURACY: ±(0.1% of output + 1mV).

OUTPUT RESISTANCE: 1kW ±5%.

GAIN: Adjustable from 10–9 to 106. With gain set to 1, a full range input will produce a 1V output.

OUTPUT REL: Selects the value of input that represents 0V at output. The reference value can be

either programmed value or the value of the previous input.

Triggering and Memory

WINDOW FILTER SENSITIVITY: 0.01%, 0.1%, 1%, 10%, or full scale of range (none).

READING HOLD SENSITIVITY: 0.01%, 0.1%, 1%, or 10% of reading.

TRIGGER DELAY: 0 to 99 hours (1ms step size).

EXTERNAL TRIGGER DELAY: 2ms + <1ms jitter with auto zero off, trigger delay = 0.

MEMORY SIZE: 1024 readings.

Math Functions

Rel, Min/Max/Average/Std Dev/Peak-to-Peak (of stored reading), Limit Test, %, and mX+b with user-

defined units displayed.

Remote Interface

Keithley 182 emulation.

GPIB (IEEE-488.2) and RS-232C.

SCPI (Standard Commands for Programmable Instruments).

GENERAL

POWER SUPPLY: 100V/120V/220V/240V.

LINE FREQUENCY: 50Hz, 60Hz, and 400Hz, automatically sensed at power-up.

POWER CONSUMPTION: 22VA.

MAGNETIC FIELD DENSITY: 10mV range 4.0s response noise tested to 500 gauss.

OPERATING ENVIRONMENT: Specified for 0° to 50°C. Specified to 80% RH at 35°C.

STORAGE ENVIRONMENT: –40° to 70°C.

EMC: Complies with European Union Directive 89/336/EEC (CE marking requirement), FCC

part 15 class B, CISPR 11, IEC 801-2, IEC-801-3, IEC 801-4.

SAFETY: Complies with European Union Directive 73/23/EEC (low voltage directive); meets

EN61010-1 safety standard. Installation category I.

VIBRATION: MIL-T-28800E Type III, Class 5.

WARM-UP: 2.5 hours to rated accuracy.

DIMENSIONS: Rack Mounting: 89mm high × 213mm wide × 370mm deep (3.5 in × 8.375

in × 14.563 in). Bench Configuration (with handles and feet): 104mm high × 238mm

wide × 370mm deep (4.125 in × 9.375 in ×14.563 in).

SHIPPING WEIGHT: 5kg (11 lbs).

2182A Nanovoltmeter

NOTES

1. Relative to calibration accuracy.

2. With Analog Filter on, add 20ppm of reading to listed specification.

3. When properly zeroed using REL function. If REL is not used, add 100nV to the range accuracy.

4. Specifications include the use of ACAL function. If ACAL is not used, add 9ppm of reading/°C

from TCAL to the listed specification. TCAL is the internal temperature stored during ACAL.

5. For 5PLC with 2-reading Digital Filter. Use ±(4ppm of reading + 2ppm of range) for 1PLC with

10-reading Digital Filter.

6. Channel 2 must be referenced to Channel 1. Channel 2 HI must not exceed 125% (referenced

to Channel 1 LO) of Channel 2 range selected.

7. Noise behavior using 2188 Low Thermal Short after 2.5 hour warm-up. ±1°C. Analog Filter off.

Observation time = 10× response time or 2 minutes, whichever is less.

8. For LSYNC On, line frequency ±0.1%. If LSYNC Off, use 60dB.

9. For 1kW unbalance in LO lead. AC CMRR is 70dB.

10. For Low Q mode On, add the following to DC noise and range accuracy at stated response

time: 200nV p-p @ 25s, 500nV p-p @ 4.0s, 1.2µV p-p @ 1s, and 5µV p-p @ 85ms.

11. After 2.5 hour warm-up, ±1°C, 5PLC, 2 minute observation time, Channel 1 10mV range only.

12. For Channel 1 or Channel 2, add 0.3°C for external reference junction. Add 2°C for internal

reference junction.

13. Speeds are for 60Hz (50Hz) operation using factory defaults operating conditions (*RST).

Autorange Off, Display Off, Trigger Delay = 0, Analog Output off.

14. Speeds include measurements and binary data transfer out the GPIB. Analog Filter On, 4

readings/s max.

15. Auto Zero Off, NPLC = 0.01.

16. 10mV range, 80 readings/s max.

17. Sample count = 1024, Auto Zero Off.

18. For LSYNC On, reduce reading rate by 15%.

19. For Channel 2 Low Q mode Off, reduce reading rate by 30%.

20. Front Auto Zero off, Auto Zero off.

21. Applies to measurements of room temperature resistances <10W, Isource range ≤20µA.

22. Display off, delay 1ms.