Go with the ow of engineering leadership. All airflow sensors
operate on heat transfer — flow and differential pressure.
But Honeywell Sensing and Control (S&C) offers advanced
chip design, manufacturing techniques and microstructure
technology, allowing our microbridge to be notably faster, smaller
and more sensitive. Our silicon chip design is created from a thin-
film, thermally isolated bridge structure, containing both heater
FEATURES
HONEYWELL ZEPHYR™ ANALOG
OR DIGITAL AIRFLOW SENSORS
HAF Series-High Accuracy.
Features: Total error band as low as ±2.25
%FSS • Wide range of airows from ±50
SCCM to ±750 SCCM • Full calibration
and temperature compensation
• Customizable for specic end-user
needs • High stability • Low pressure drop
• Linear output • Fast response time
• 11-bit (analog version) or 12-bit
(digital version) resolution • Low 3.3 Vdc
operating voltage option and low power
consumption • ASIC-based I2C digital
output (digital version) • Bidirectional
ow sensing capability • Insensitivity to
mounting orientation • Insensitivity to
altitude • Small size occupies less space
on PCB • RoHS-compliant materials meet
Directive 2002/95/EC
Benets: Provide an analog or digital
interface for reading airflow over the
specified full-scale flow span and
temperature range. Thermally isolated
heater and temperature sensing
elements help provide a fast response
to air or gas flow. Total error band as
low as ±2.25 %FSS allows for very
Airow Sensors
Line Guide
continued on page 5
precise airflow measurement, often
ideal for demanding applications with
high accuracy requirements. Detects
presence or absence of airow from ±50
SCCM to ±750 SCCM, increasing the
options for integrating the sensor into
the application; also has high sensitivity
at very low flows. Full calibration and
temperature compensation typically
allow the customer to remove additional
components associated with signal
conditioning from the PCB, reducing PCB
size as well as costs often associated
with those components (e.g., acquisition,
inventory, assembly). Customizable for
specific end-user needs. High stability
reduces errors due to thermal effects and
null shift to provide accurate readings
over time, often eliminating need for
system calibration after PCB mount and
periodically over time. Low pressure
drop typically improves patient comfort in
medical applications, and reduces noise
and system wear on other components
such as motors and pumps. Linear output
provides more intuitive sensor signal than
the raw output of basic airflow sensors,
which can help reduce production costs,
design, and implementation time. Fast
response time allows the customer’s
application to respond quickly to airflow
change, important in critical medical
and industrial applications. 11-bit
(analog version) or 12-bit (digital version)
resolution increases ability to sense small
airflow changes, allowing customers to
more precisely control their application.
Low 3.3 Vdc operating voltage option
and low power consumption allow for
use in battery-driven and other portable
applications. ASIC-based I2C digital
output (digital version) compatibility
eases integration to microprocessors or
microcontollers, reducing PCB complexity
and component count. Bidirectional
flow sensing capability eliminates the
need for two airflow sensors, helping
to reduce production costs and
implementation time. Insensitivity to
mounting orientation allows customer
to position sensor in most optimal point
in the system, eliminating concern for
positional effects. Insensitivity to altitude
eliminates customer-implemented altitude
adjustments in the system, easing
integration and reducing production costs
and temperature sensing elements. This provides rapid response
to the air or gas flow and amount and direction, delivering
a proportional output voltage. Amplified versions provide
an enhanced output signal and less external circuitry, while
unamplified versions allow additional external circuit options.
What’s more, a variety of port styles provides greater application
flexibility.
HAF Series-High Accuracy
Signal conditioning amplified, digital
Technology silicon die with thermally isolated heater
Flow/pressure range ±50 SCCM to ±750 SCCM
Total error band as low as ±2.25 %FSS
Output analog (Vdc), digital (I2C)
Power consumption
3.3 Vdc: 40 mW typ. (no load) (analog)
23 mW typ. (no load) (digital)
5.0 Vdc: 55 mW typ. (no load) (analog)
38 mW typ. (no load) (digital)
Port style long port, short port
Media capability non-corrosive dry gases
Compensated temperature
range 0 °C to 50 °C [32 °F to 122 °F]
Operating temperature range -20 °C to 70 °C [-4 °F to 158 °F]
AWM1000 Series AWM2000 Series
Signal conditioning unamplified, compensated unamplified, compensated
Technology silicon die silicon die
Flow/pressure range
±200 SCCM, 1000 SCCM to -600
SCCM, ±5,0 mbar [2.0 in H20],
±10,0 mbar [4.0 in H20]
±30 SCCM, ±1000 SCCM,
±10,0 mbar [4.0 in H20]
Output analog analog
Power consumption 30 mW typ. 30 mW typ.
Port style straight straight
Media capability dry gas only dry gas only
Operating temperature range -25 °C to 85 °C [-13 °F to 185 °F] -25 °C to 85 °C [-13 °F to 185 °F]
Our technology is most
sensitive to your needs.
Honeywell S&C offers
specially crafted airflow sensor
housings to precisely direct
and control the airflow across
the element. The mechanical
package design allows easy
mounting to circuit boards,
plus other advantages:
amplified or un-amplified
microbridge airflow; state-of-
the-art silicon micromachining;
sensitivity to low ows (30
SCCM to 300 SLPM); accurate
low pressure sensing
0.003 mbar to 10 mbar
(0.0001 in H20 to 4.0 in H20);
analog or digital output.
Honeywell S&C airflow sensors
offer enhanced performance in
multiple potential applications,
including HVAC system
damper control, gas analysis,
leak detection equipment, gas
metering and chromatography,
process control, and vent
hoods. In the medical industry,
potential applications range
from respiratory equipment
such as respirators,
spirometers, anesthesia and
oxygen delivery to sleep
apnea equipment.
2 www.honeywell.com/sensing
Airow Sensors Line Guide
Airow Sensors
Honeywell Zephyr™
Analog or Digital
Airow Sensors
AWM5000 Series AWM700 Series
Signal conditioning amplified amplified
Technology silicon die silicon die
Flow/pressure range
0 SLPM to 5,0 SLPM,
0 SLPM to 10,0 SLPM,
0 SLPM to 15,0 SLPM,
0 SLPM to 20,0 SLPM
300 SLPM
Output analog analog
Power consumption 100 mW max. 60 mW max.
Port style 1/4 in-18 NPT 22 mm tapered
Media capability dry gas only dry gas only
Operating temperature range -20 °C to 70 °C [-4 °F to 158 °F] -25 °C to 85 °C [-13 °F to 185 °F]
AWM3000 Series
Signal conditioning amplified
Technology silicon die
Flow/pressure range 30 SCCM, 200 SCCM, 1000 SCCM, 0 mbar to 1,25 mbar [0 in H20 to 0.5 in H20],
0 mbar to 5,0 mbar [0 in H20 to 2 in H20], 5,0 mbar [2.0 in H20]
Output analog
Power consumption 50 mW or 100 mW typ.
Port style straight
Media capability dry gas only
Operating temperature range -25 °C to 85 °C [-13 °F to 185 °F]
www.honeywell.com/sensing 3
Airow Sensors
Airow Sensors
4 www.honeywell.com/sensing
Airow Sensors Line Guide
AWM40000 Series AWM90000 Series
Signal conditioning unamplified (compensated) or amplified uncompensated
Technology silicon die silicon die
Flow/pressure range ±25,0 SCCM,
1,0 SLPM, 6,0 SLPM
±200 SCCM,
±5,0 mbar [2.0 in H20]
Output analog analog
Power consumption 60 mW max., 75 mW max. 50 mW typ.
Port style manifold parallel
Media capability dry gas only dry gas only
Operating temperature range -40 °C to 125 °C [-40 °F to 251 °F]
(inclusive) -25 °C to 85 °C [-13 °F to 185 °F]
Airow Sensors
by not having to purchase additional
sensors for altitude adjustments. Small
size occupies less space on PCB,
allowing easier fit and potentially reducing
production costs; PCB size may also
be reduced for easier fit into space-
constrained applications. RoHS-compliant
materials meet Directive 2002/95/EC.
Designed for use in medical equipment
such as anesthesia delivery machines,
ventricular assist devices (heart pumps),
hospital diagnostics (spectrometry, gas
chromatography), nebulizers, oxygen
concentrators, patient monitoring
systems (respiratory monitoring), sleep
apnea machines, as well as industrial
analytical instrumentation, gas meters/leak
detection, HVAC lters, and meteorlogical
equipment.
AIRFLOW SENSORS
AWM1000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(200 SCCM to 1000 SCCM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective • Bi-
directional sensing capability • Low
differential pressure sensing • Sensor to
sensor interchangeability • Unamplied
• Laser trimmed • Mass ow and
differential pressure sensing
Benets: Cost-effective microbridge
technology for potential applications
including HVAC damper control, process
control, respirators, oxygen concentrators,
gas metering, and chromatography.
Differential amplifier circuitry provides
output gain and/or introduces voltage
offsets to sensor output.
AWM2000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(30 SCCM to 1000 SCCM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective • Bi-
directional sensing capability • Low
differential pressure sensing • Actual
mass airow sensing • Unamplied
• Laser trimmed • Sensor to sensor
interchangeability • Mass ow and
differential pressure sensing
Benets: Cost-effective microbridge
technology for potential applications
including process control, respirators,
ventilators, oxygen concentrators, and
leak detection equipment. Differential
amplifier circuitry provides output gain
and/or introduces voltage offsets to sensor
output.
AWM3000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(30 SCCM to 1000 SCCM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective • Low
differential pressure sensing • Laser
trimmed • Amplied • Actual mass airow
sensing • Mass ow and differential
pressure sensing • Sensor to sensor
interchangeability
Benets: Amplified signal conditioning
increases gain and introduces voltage
offsets to sensor output. On board heater
control circuit. Laser trimmed for improved
sensor interchangeability. Potential
applications include HVAC damper
control, process control, respirators, leak
detection equipment, gas metering, and
chromatography.
AWM5000 Series.
Features: Precision silicon
micromachining • Sensitivity to low
ows (5 SLPM to 20 SLPM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective • On-
board signal conditioning • Venturi
type ow housing • Remote mounting
capability • Laser trimmed • “AMP”
compatible connector • Rugged plastic
package • Amplied • Mass ow
pressure sensing • Sensor to sensor
interchangeability
Benets: Performs amplification,
linearization, temperature compensation,
and gas calibration. Separate gas
calibration types (nitrogen, carbon
dioxide, nitrous oxide or argon).
Microbridge chip in direct contact with
flow stream reduces error due to orifice
or bypass channel clogging. In-line ow
measurement potential applications
including HVAC damper control, oxygen
concentrators, leak detection equipment,
gas metering, and chromatography. 1 Vdc
to 5 Vdc linear output possible regardless
of flow range or calibration gas. Active
laser trimming improves interchangeability.
AMP-compatible connector often provides
reliable connection in demanding
applications.
AWM700 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(200 SLPM to 300 SLPM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective • High
flow range capability in a small package
• Highly stable null and full-scale
• Compact package design • Extremely
low hysteresis and repeatability errors
• AMP-compatible connector
• Amplied • Mass ow and differential
pressure sensing • Sensor to sensor
interchangeability
Benets: Performs amplification and
temperature compensation. Specially
designed bypass flow housing provides
in-line flow measurement. Provides
combination of enhanced reliability,
accuracy, and precision operating
characteristics for use in potential
medical ventilation equipment and
medical and analytical instrumentation
applications. Low power consumption for
portable devices and battery-powered
applications. Enhanced accuracy over
life reduces need for recalibration. Snap-
in AMP-compatible connector provides
reliable connection.
AWM40000 Series.
Features: Precision silicon
micromachining • Sensitivity to low
ows (25 SCCM to 6 SLPM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective
• Repeatable response • Laser trimmed
• Standard mounting centers
• Amplied and unamplied • Mass ow
pressure sensing • Sensor to sensor
interchangeability
Benets: Sensitive to low flows,
adaptable for use with higher flows for
www.honeywell.com/sensing 5
Sensing and Control
Automation and Control Solutions
Honeywell
1985 Douglas Drive North
Golden Valley, MN 55422 USA
+1-815-235-6847
www.honeywell.com/sensing
008150-5-EN IL50 GLO
February 2012
Copyright © 2012 Honeywell International Inc. All rights reserved.
Warranty. Honeywell warrants goods of
its manufacture as being free of defective
materials and faulty workmanship.
Honeywell’s standard product warranty
applies unless agreed to otherwise by
Honeywell in writing; please refer to your
order acknowledgement or consult your
local sales office for specific warranty
details. If warranted goods are returned to
Honeywell during the period of coverage,
Honeywell will repair or replace, at its
option, without charge those items it finds
defective. The foregoing is buyer’s sole
remedy and is in lieu of all warranties,
expressed or implied, including those
of merchantability and tness for a
particular purpose. In no event shall
Honeywell be liable for consequential,
special, or indirect damages.
While we provide application assistance
personally, through our literature and
the Honeywell web site, it is up to the
customer to determine the suitability of the
product in the application.
Specifications may change without notice.
The information we supply is believed to
be accurate and reliable as of this printing.
However, we assume no responsibility for
its use.
For more information about Sensing and
Control products, visit www.honeywell.
com/sensing or call +1-815-235-6847
Email inquiries to info.sc@honeywell.com
potential applications including process
control, respirators, ventilators, oxygen
concentrators, gas metering, and
chromatography. Low power consumption
for portable devices and battery-powered
applications. Laser-trimmed thick-lm and
thin-film resistors designed to provide
consistent interchangeability from one
device to the next.
AWM90000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(200 SCCM) • Low power consumption
• Analog output • Cost-effective • Bi-
directional sensing capability • Low
differential pressure sensing
• Actual mass airow sensing • Enhanced
response time • Uncompensated • Mass
flow and differential pressure sensing
Benets: Proven thermal bridge
technology. Two versions available,
mass flow and differential pressure.
Provides ability to customize sensor
function for potential applications
including HVAC damper control, process
control, respirators, ventilators, oxygen
concentrators, leak detection equipment,
gas metering, and chromatography. Low
power consumption for portable devices
and battery-powered applications.
