MEMS flow sensors MEMS flow sensors you can rely on Precise, dependable mass flow measurement in a small package. We have introduced a new generation of MEMS based flow sensors used for gas flow velocity and mass flow rate measurements. The 3D MEMS structure offers outstanding characteristics in terms of resolution and repeatability even at very low flow rates. The D6F-V, D6F-W and D6F-P products incorporate a patent pending Dust Segregation System (DSS) allowing it to be used to monitor the performance of fans and air intakes and to detect clogged filters in general. Precision performance is maintained over the product life time with an integral DSS that separates up to 99.5% of dry air borne particulates (simulation result). Gas/Air Flow Flow measurement principle Inside each D6F there is a highly sensitive MEMS flow chip that is only 1.55mm x 1.55mm x 0.4mm thick. The MEMS flow chip has two thermopiles either side of a tiny heater element used to measure the deviations in heat symmetry caused by the passing gas flow in either direction. A thin layer of Heater insulating film protects the sensor chip from exposure to the gas. Upstream thermopile Downstream thermopile When there is no flow present, temperature distribution concentrated around the heater is uniform and the differential voltage over the two thermopiles is 0V (Diagram 1). Diagram 2 No flow conditionHeater Flow When even the smallest flow is present, temperature on the side of the heater facing the flow cools, and warms up on the other side of the heater - heat symmetry collapses (Diagram 2). Diagram 1 Flow condition The difference of temperature appears as a differential voltage between the 2 FEM Simulation thermopiles - the flow velocity, direction and mass flow rate can be measured. Flow Omron has been a leading manufacturer of MEMS based components and modules for measurement and control applications since 1990 and has shipped more than 20 million products. Thermistor (poly-Si) Upper thermopile (poly-Si, Al) Heater (poly-Si) Lower thermopile (poly-Si, Al) Upper side insulator film Electrode Pad We concentrate on bulk micro-machining such as anodic bonding, electro chemical etch (ECE), silicon processes Under side insulator film such as thin film deposition, wet and dry etching, electrode formation & fine plastic replication and glass wafer processes. Cavity Base Thermopile Gas and Air Flow Sensors Our family of MEMS Flow Sensors includes intelligent compact models capable of measuring flow velocity and mass flow rate movement with highly Supersensitive gas flow sensors based on repeatable accuracy proprietary MEMS technology are able to measure at flow rates from gas velocity, direction and mass flow rate for both 1LPM to 50LPM (Litre extremely low and high flow rates. Capable of highly accurate measurements over a wider temperature range per minute). High compared with conventional mass flow metering, the D6F can detect sensitivity is mass flows with a repeatability of up to +/- 0.1% and an accuracy of achieved with the up to +/-3% full scale deflection. The extreme MEMS Flow Chip. sensitivity is achieved with a tiny heating element, associated with temperature sensors on both sides. Custom specific models could be made for quantities of approx. 100k pcs/year. Intelli Home Appliance Gas Meter Gas Leak Detector Building Ventilation Boiler/Combustion Control Smoke Detector Fan Assisted Heater Medical Chest Drainage Ventilator Anaesthetic device CPAP Oxygen Concentrator Ozone Generator Laparoscopic Surgery Gas Chromatograph Capnograph gent Industrial Process Control Environmental Monitor/Gas Sniffer Pressurised Cable Monitoring Ventilator control Clogged filter detection Gas welding machine Pick and Place Fuel Cell Scientific Devices Gas flow controller Fans Mass Flow Sensors D6F-P Uni-directional mass flow sensor* Flow Range 1LPM, PCB terminal type (D6F-P0010A1) 1LPM, connector type (D6F-P0010A2) Compact Size 27.2(L) x 17.2(W) x 35(H)mm Supply Voltage 4.75 - 5.25VDC Analogue Output 0.5 to 2.5V Accuracy +/- 5% F.S. Temp Range -10 to +60C Gas Type Air * Bi-directional mass flow sensor available on request. D6F-P0010A1/D6F-P0010A2 Operating Characteristics 3.00 Output voltage(V) 2.50 2.00 1.50 1.00 0.50 0.0 0.0 0.25 0.50 0.75 1.0 Flow rate(L/min) D6F-01A1 / 02A1 High accuracy mass flow sensor Flow Range 1LPM (D6F-01A1-110) 2LPM (D6F-02A1-110) Compact Size 66(L) x 36(W) x 15.1(H)mm Supply Voltage 10.8 - 26.4VDC Analogue Output 1 to 5V Accuracy +/- 3% F.S. Temp Range -10 to +60C Gas Type Air D6F-01A1-110 D6F-02A1-110 Operating Characteristics 6.0 5.0 5.0 Output voltage(V) Output voltage(V) Operating Characteristics 6.0 4.0 3.0 2.0 1.0 4.0 3.0 2.0 1.0 0.0 0.0 0.0 0.2 0.4 0.6 Flow rate(L/min) 0.8 1.0 0.0 0.4 0.8 1.2 Flow rate(L/min) 1.6 2.0 D6F-03A3 High accuracy mass flow sensor Flow Range 3LPM (D6F-03A3-000) Ultra-Compact Size 36.6(L) x 8(W) x 16.8(H)mm Supply Voltage 10.8 - 26.4VDC Analogue Output 1 to 5V Accuracy +/-5% F.S. Temp Range 0 to 50C Gas Type Air D6F-03A3-000 Operating Characteristics 6,0 Output voltage(V) 5,0 4,0 3,0 2,0 1,0 0,0 0,0 0,6 1,2 1,8 2,4 3,0 Flow rate(L/min) D6F-01N2 / 02L2 / 05N2 High accuracy mass flow sensor Flow Range 1LPM (D6F-01N2-000), 2LPM (D6F-02L2-000), 5LPM (D6F-05N2-000) Compact Size 62 (L) x 21.6(W) x 22.1 (H)mm Supply Voltage 10.8 - 26.4VDC Analogue Output 1 to 5V Accuracy +/- 3% F.S. Temp Range -10 to +60C Gas Type N2 type LNG (Liquified Natural Gas) L2 type LPG (Liquified Propane Gas) D6F-01N2-000 D6F-02L2-000 D6F-05N2-000 Operating Characteristics Operating Characteristics 6.0 5.0 5.0 5.0 4.0 3.0 2.0 4.0 3.0 2.0 1.0 1.0 0.0 0.0 0.0 0.2 0.4 0.6 Flow rate(L/min) 0.8 1.0 Output voltage(V) 6.0 Output voltage(V) Output voltage(V) Operating Characteristics 6.0 4.0 3.0 2.0 1.0 0.0 0.0 0.4 0.8 1.2 Flow rate(L/min) 1.6 2.0 0.0 1.0 2.0 3.0 Flow rate(L/min) 4.0 5.0 Mass Flow Sensors D6F-10A5 / 20A5 / 50A5-10A6 / 20A6 / 50A6 High accuracy mass flow sensor Flow Range 10LPM (D6F-10A5/10A6-000), 20LPM (D6F-20A5/20A6-000) 50LPM (D6F-50A5/A6-000) Compact Size 78(L) x 30(W) x 30 (H)mm Supply Voltage 10.8 - 26.4VDC Analogue Output 1 to 5V Accuracy +/- 3% F.S. Temp Range -10 to +60C Gas Type Air A6 type D6F-10A5/10A6-000 D6F-20A5/20A6-000 Operating Characteristics D6F-50A5/50A6-000 Operating Characteristics Operating Characteristics 6.0 6.0 5.0 5.0 5.0 4.0 3.0 2.0 4.0 3.0 2.0 1.0 1.0 0.0 0.0 0.0 2.0 4.0 6.0 8.0 10.0 Flow rate(L/min) Output voltage(V) 6.0 Output voltage(V) Output voltage(V) A5 type 4.0 3.0 2.0 1.0 0.0 0.0 4.0 8.0 12.0 Flow rate(L/min) 16.0 20.0 0.0 10.0 20.0 30.0 40.0 50.0 Flow rate(L/min) Air Velocity Sensors Our D6F-W and D6F-V Sensors incorporate a Dust Segregation System (DSS) that helps maintain sensing performance in a variety of applications. The housing design is based on a centrifugal principle to segregate particulates from the air. Most particulates cannot pass through the sensing area and are discharged through the exhaust route. As a result of the numerical analysis, the efficiency of the Dust Segregation System separates up to 99.5% of dry particulates.The D6F-W01A1 and D6F-W04A1 airflow sensors can measure air velocity from 0-1m/s and 0-4m/s with an accuracy of +/-5% full scale deflection. The D6F-V03A1 measures 0-3m/s. Each is supplied as standard, optimally adjusted at the factory so easy and rapid user application is guaranteed. Dust Segregation System (D6F-W) Perf Cassette (ceiling/suspended) Multimodular Air Conditions Duct Connected Heating and Air Conditioning Systems Alternative for Single Point Pitot tube Air & Water Air Conditioning Systems Air Purifiers/ Dehumidifiers Fan Assisted Heaters Air Cooled, High Power Indoor Lighting Mission Critical PC, Workstation Ventilation 19" Rack Ventilation Systems LCD Projectors AV Electronics Equipment ormance Air Velocity Sensors D6F-W01A1 / W04A1 Precision air flow detection sensor Flow Range 1m/s (D6F-W01A1) 4m/s (D6F-W04A1) Ultra Compact Size 20(L) x 39(W) x 9(H)mm Supply Voltage 10.8 - 26.4VDC Analogue Output 1 to 5V Accuracy +/- 5% F.S. Temp Range -10 to +60C Gas Type Air D6F-W01A1 D6F-W04A1 Operating Characteristics 6.0 5.0 5.0 Output voltage(V) Output voltage(V) Operating Characteristics 6.0 4.0 3.0 2.0 1.0 4.0 3.0 2.0 1.0 0.0 0.0 0.0 0.25 0.50 0.75 1.00 0.0 Flow velocity(m/s) 1.0 D6F-V03A1 Precision air flow detection sensor Flow Range 3m/s (D6F-V03A1) Ultra Compact Size 24(L) x 14(W) x 8(H)mm Supply Voltage 3.15 - 3.45VDC Analogue Output 0.5 to 2V Accuracy +/- 10% F.S. Temp Range -10 to +60C Gas Type Air D6F-V03A1 Operating Characteristics Output Voltage [V] 2.5 2.0 1.5 1.0 0.5 0.0 0.0 0.75 1.50 Flow velocity (m/s) 2.0 3.0 Flow velocity(m/s) 2.25 3.00 4.0 Clogged Filter Detection (Configuration 1) The sensor detects the pressure indicating the need for filter drop over the filter. The moment replacement is sent out. Clogged Filter this drop exceeds a given threshold, a warning signal Warning Signal is sent out Filter Replacement 6 Sensor Output [V] 5 4 3 2 Threshold 1 0 1 3 5 7 9 11 Months Clogged Filter Detection (Configuration 2) Filter clogging can be detected, accumulation of dirt in the filter, also using the bypass-like and the output voltage of the configuration. The differential sensor located on the bypass pressure between upstream channel increases. Clogged Filter and downstream of the filter grows in proportion to the Warning Signal is sent out Sensor Output [V] 6 5 4 3 Threshold 2 1 0 1 3 5 7 Months 9 11 Filter Replacement Omron Electronic Components Europe BV reserves the right to make any changes to the specifications of the products described in this brochure at its sole discretion and without prior notice. Omron Electronic Components Europe B.V. 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