R Silicon Wafer Mapping Sensor F3M-S825-1 Allows Simultaneous Mapping of Up to 25 Silicon Wafers H Economical--one sensor detects most wafer types H 200 mm wafer size H Automatic and remote teaching capability H Self-diagnostic functions reduce downtime Ordering Information Applicable wafer size Number of cassette slots Function Remarks Part number 8 inches (6.35-mm pitch) 25 Self-diagnosis CE marking F3M-S825-1 Application Examples Detects Transparent Glass Wafers With a Transparency of 92% Answer-back Alarms for Setting Errors and Self-diagnostic Alarms for Operation Errors The F3M-S825-1 allows the mapping of cassettes that have both silicon wafers and glass wafers. These alarms help reduce system downtime and shorten troubleshooting time. Automatic Teaching Saves Setting Time (Remote Teaching Available) Static Electricity Protection The F3M-S825-1 has an automatic teaching function that ensures easy adjustments in minimal time. The remote teaching function allows quick, on-the-fly set up. OMRON's optical system (including emitter and receiver) prevents malfunction and damage--protecting the Sensor from static electricity if charged on the semiconductor wafers at the time of mapping. F3M-S825-1 F3M-S825-1 Specifications J RATINGS/CHARACTERISTICS Item F3M-S825-1 Target object 8-inch semiconductor silicon wafers and transparent wafers (with transparency of 92% max.) (See Note.) Number of channels 25 Optical axis pitch 6.35 mm Optical axis width 1.5 mm Light source Infrared LED (940 nm) Power supply voltage 12 to 24 VDC r10%, ripple (p-p): 10% max. Current consumption Output Indicators 120 mA max. Control output Load power supply voltage: 30 VDC Load current: 20 mA max. (residual voltage: 1 V max.); Inflow current: 20 mA.; Parallel output from all channels, NPN open collector; Dark-ON operation. Answer-back output When remote teaching is ON, pin 28 will be used for this function. Self-diagnostic output Load power supply voltage: 30 VDC max.; Load current: 20 mA max. (Residual voltage: 1 V max.); Inflow current: 20 mA; NPN open collector. Power Green indicator is ON when power is being supplied. Warning Red indicator is ON under the following conditions: Teaching, no target object, insufficient light, or error. Response time 10 ms max. Control output interrupt input All outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V short-circuit current is 1 mA max.; Output interrupt reset: GND and control output interrupt input terminals are opened or the voltage is between 9 V and the working power supply voltage. Remote teaching input ON GND and remote input terminals are short-circuited and 0-V short-circuit current is 1 mA max. OFF GND and remote input terminals are opened or the voltage is between 9 V and the working power supply voltage. Teaching check function Ambient temperature p Orange LED indicator Operating Storage 0qC to 40qC (32qF to 104qF) with no icing or condensation --25qC to 60qC (--13qF to 140qF) Relative humidity 35% to 85% with no condensation Ambient illumination Fluorescent lamp: 1,500 x max. Noise resistance Power supply line: r480 V in normal mode with noise simulator Static electrical noise: No malfunction or destruction at r8 kV Vibration resistance 10 to 55 Hz, 0.5 mm double amplitude for 2 hrs each in X, Y, and Z axes Shock resistance 300 m/s2 (30G) 3 times each in X, Y, and Z axes Degree of protection IEC60529 IP40 Connection Pre-wired cable (length: 500 mm r35 mm) IDC connector (insulation displacement) Weight (packed state) Material Accessories Approx. 110 g (3.8 oz) Optical axis Polycarbonate Case ABS Cable Vinyl-insulated, bending type Spacer and instruction manual Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details. 2 F3M-S825-1 F3M-S825-1 J AUTOMATIC TEACHING FUNCTION F3M-S825-1 Power indicator Warning indicator J ANSWER-BACK FUNCTION AND SELF-DIAGNOSTIC FUNCTION The F3M-S825-1 has an answer-back function to warn the user about setting errors and a self-diagnostic function to warn the user about operational errors. Answer-back Function: Normal or error teaching output turns ON. Self-diagnostic Function: Warning output turns ON for a decrease in optical input. x Teaching button RUN/TEACH mode selector Teaching indicator x The remote or manual automatic teaching of the F3M-S825-1 is possible with the following two sensitivity settings: 1. Max. Sensitivity Setting: Detects semiconductor silicon wafers, and SIC wafers. 2. Teaching with No Target Object: Detects transparent wafers. The sensitivity is set to maximum before shipping. Refer to the Instruction Manual when setting the sensitivity of the F3M-S825-1. Operation J OUTPUT CIRCUIT DIAGRAM J I/O TERMINAL ARRANGEMENT +V Main circuit Output (OUT1) Output (see note) (OUT26) Control output interrupt input Remote teaching input 0V Pin assignment Pin Assignment Pin Assignment 1 GND (0 V) 16 OUT14 2 VCC (12 to 24 V) 17 OUT15 3 OUT1 18 OUT16 4 OUT2 19 OUT17 5 OUT3 20 OUT18 6 OUT4 21 OUT19 7 OUT5 22 OUT20 8 OUT6 23 OUT21 9 OUT7 24 OUT22 10 OUT8 25 OUT23 11 OUT9 26 OUT24 12 OUT10 27 OUT25 13 OUT11 28 Self-diagnostic output/OUT26 (See Note.) 14 OUT12 29 Control output interrupt input 15 OUT13 30 Remote teaching input Note: Pin 28 will have answer-back output only when remote teaching input is turned ON. Otherwise, this output is a self-diagnostic output. 3 F3M-S825-1 F3M-S825-1 Dimensions Unit: mm (inch) J F3M-S825-1 170 (6.69) 14 (0.55) Optical axis 18.5 (0.71) 18.5 (0.71) Two, M4 Two, R5 Side mark Thirty, (19/0.08 dia.) vinyl-insulated, flat bending cable 500 L x 38.1 W Pitch: 1.27 Mounting Dimensions 50 (1.97) Two, 4.2-dia. mounting holes (6.30) (3.94) OMRON XG4E-3031 Connector Teaching button RUN/TEACH mode selector Warning indicator Teaching indicator Power indicator Precautions J CORRECT USE--TO AVOID DAMAGE Do not use the F3M-S825-1 at a voltage that exceeds the rated voltage range. Do not make mistakes in wiring, such as mistakes in polarity. Do not short-circuit the load. Do not connect AC to the F3M-S825-1. x x x x J CONNECTION AND MOUNTING x x J INSTALLATION/ENVIRONMENT Do NOT use the F3M-S825-1 in the following locations: x Locations exposed to direct sunlight. x Locations with high humidity that may cause condensation. x Locations with corrosive gas. x Locations where vibration or shock directly affects the Sensor. J CLEANING Do not attempt to clean the F3M-S825-1 using paint thinner, to avoid damaging the surface of the Sensor. x A maximum of 24 VDC+10% can be imposed on the F3M-S825-1. Check that the voltage of the power supply is within the permissible range before turning on the F3M-S825-1. The power supply must be constructed so that the secondary circuit is insulated with an isolating transformer. Do not wire power lines or high-voltage lines within the same conduit with the lines of the F3M-S825-1, or the sensor may be damaged or malfunction. Avoid mechanical impact when mounting the F3M-S825-1, or its water-resistant properties will be reduced. J POWER SUPPLY If a standard switching power supply is connected to the F3M-S825-1, be sure to ground the FG (frame ground) and G (ground) terminals of the power supply. If these terminals are not grounded, the Sensor may malfunction due to switching noise that will be generated from the power supply. NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.4. R OMRON ELECTRONICS, INC. OMRON CANADA, INC. 1-800-55-OMRON 416-286-6465 One East Commerce Drive Schaumburg, IL 60173 Cat. No. D063-E3-825 4 7/00 885 Milner Avenue Scarborough, Ontario M1B 5V8 Specifications subject to change without notice. Printed in U.S.A.