F3M-S825-1 - Omron - Datasheet.Directory

Silicon Wafer Mapping Sensor F3M-S825-1

Allows Simultaneous Mapping of Up

to 25 Silicon Wafers

HEconomical—one sensor detects most

wafer types

H200 mm wafer size

HAutomatic and remote teaching

capability

HSelf-diagnostic functions reduce

downtime

Ordering Information

Applicable wafer size Number of cassette slots Function Remarks Part number

8 inches (6.35-mm pitch) 25 Self-diagnosis CE marking F3M-S825-1

Application Examples

Detects Transparent Glass Wafers

With a Transparency of 92%

The F3M-S825-1 allows the mapping of cassettes that have both

silicon wafers and glass wafers.

Automatic Teaching Saves Setting Time

(Remote Teaching Available)

The F3M-S825-1 has an automatic teaching function that ensures

easy adjustments in minimal time. The remote teaching function

allows quick, on-the-fly set up.

Answer-back Alarms for Setting Errors and

Self-diagnostic Alarms for Operation Errors

These alarms help reduce system downtime and shorten

troubleshooting time.

Static Electricity Protection

OMRON’s optical system (including emitter and receiver)

prevents malfunction and damage—protecting the Sensor from

static electricity if charged on the semiconductor wafers at the

time of mapping.

F3M-S825-1

Specifications

JRATINGS/CHARACTERISTICS

Item F3M-S825-1

Target object 8-inch semiconductor silicon wafers and transparent wafers

(with transparency of 92% max.) (See Note.)

Number of channels 25

Optical axis pitch 6.35 mm

Optical axis width 1.5 mm

Light source Infrared LED (940 nm)

Power supply voltage 12 to 24 VDC r10%, ripple (p-p): 10% max.

Current consumption 120 mA max.

Output Control output Load power supply voltage: 30 VDC

Load current: 20 mA max. (residual voltage: 1 V max.);

Inflow current: 20 mA.;

Parallel output from all channels, NPN open collector;

Dark-ON operation.

Answer-back output When remote teaching is ON, pin 28 will be used for this function.

Self-diagnostic output Load power supply voltage: 30 VDC max.;

Load current: 20 mA max.

(Residual voltage: 1 V max.);

Inflow current: 20 mA;

NPN open collector.

Indicators Power Green indicator is ON when power is being supplied.

Warning Red indicator is ON under the following conditions:

Teaching, no target object, insufficient light, or error.

Response time 10 ms max.

Control output interrupt input All outputs interrupted: GND and control output interrupt input terminals are

short-circuited and 0-V short-circuit current is 1 mA max.;

Output interrupt reset: GND and control output interrupt input terminals are

opened or the voltage is between 9 V and the working power supply

voltage.

Remote teaching input ON GND and remote input terminals are short-circuited and 0-V short-circuit

current is 1 mA max.

OFF GND and remote input terminals are opened or the voltage is between

9 V and the working power supply voltage.

Teaching check function Orange LED indicator

Ambient temperature Operating 0qCto40

qC(32

qF to 104qF) with no icing or condensation

Storage -- 2 5 qCto60

qC(--13

qF to 140qF)

Relative humidity 35% to 85% with no condensation

Ambient illumination Fluorescent lamp: 1,500 ℓxmax.

Noise resistance Power supply line: r480 V in normal mode with noise simulator

Static electrical noise: No malfunction or destruction at r8kV

Vibration resistance 10 to 55 Hz, 0.5 mm double amplitude for 2 hrs each in X, Y, and Z axes

Shock resistance 300 m/s2(30G) 3 times each in X, Y, and Z axes

Degree of protection IEC60529 IP40

Connection Pre-wired cable (length: 500 mm r35 mm)

IDC connector (insulation displacement)

Weight (packed state) Approx. 110 g (3.8 oz)

Material Optical axis Polycarbonate

Case ABS

Cable Vinyl-insulated, bending type

Accessories Spacer and instruction manual

Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details.

F3M-S825-1 F3M-S825-1

The remote or manual automatic teaching of the F3M-S825-1 is

possible with the following two sensitivity settings:

1. Max. Sensitivity Setting: Detects semiconductor silicon

wafers, and SIC wafers.

2. Teaching with No Target Object: Detects transparent wafers.

The sensitivity is set to maximum before shipping. Refer to the

Instruction Manual when setting the sensitivity of the F3M-S825-1.

Power indicator Warning indicator

Teaching button RUN/TEACH mode selector Teaching indicator

JAUTOMATIC TEACHING FUNCTION

F3M-S825-1

The F3M-S825-1 has an answer-back function to warn the

user about setting errors and a self-diagnostic function to

warn the user about operational errors.

xAnswer-back Function: Normal or error teaching output

turns ON.

xSelf-diagnostic Function: Warning output turns ON for a

decrease in optical input.

JANSWER-BACK FUNCTION AND

SELF-DIAGNOSTIC FUNCTION

Operation

JOUTPUT CIRCUIT DIAGRAM

Output

(OUT1)

Output (see note)

(OUT26)

Main circuit

Control output interrupt input

Remote teaching input

JI/O TERMINAL ARRANGEMENT

Pin assignment

Pin Assignment Pin Assignment

1GND (0 V) 16 OUT14

2 VCC (12to24V) 17 OUT15

3OUT1 18 OUT16

4OUT2 19 OUT17

5OUT3 20 OUT18

6OUT4 21 OUT19

7OUT5 22 OUT20

8OUT6 23 OUT21

9OUT7 24 OUT22

10 OUT8 25 OUT23

11 OUT9 26 OUT24

12 OUT10 27 OUT25

13 OUT11 28 Self-diagnostic output/OUT26

(See Note.)

14 OUT12 29 Control output interrupt input

15 OUT13 30 Remote teaching input

Note: Pin 28 will have answer-back output only when remote

teaching input is turned ON. Otherwise, this output is a

self-diagnostic output.

F3M-S825-1

mens

ons

Unit: mm (inch)

JF3M-S825-1

Optical axis

Side mark

Thirty, (19/0.08 dia.)

vinyl-insulated,

flat bending cable

500 L x 38.1 W

Pitch: 1.27

Two,

4.2-dia.

mounting

holes

OMRON XG4E-3031

Connector

Teaching button

RUN/TEACH mode selector

Warning indicator

Teaching indicator

Power indicator

Mounting Dimensions

Two, R5

Two, M4

(1.97)

18.5 (0.71)

170 (6.69)

14 (0.55)

(3.94)

(6.30)

18.5 (0.71)

recaut

ons

JCORRECT USE—TO AVOID DAMAGE

xDo not use the F3M-S825-1 at a voltage that exceeds the

rated voltage range.

xDo not make mistakes in wiring, such as mistakes in polarity.

xDo not short-circuit the load.

xDo not connect AC to the F3M-S825-1.

JINSTALLATION/ENVIRONMENT

Do NOT use the F3M-S825-1 in the following locations:

xLocations exposed to direct sunlight.

xLocations with high humidity that may cause condensation.

xLocations with corrosive gas.

xLocations where vibration or shock directly affects the

Sensor.

JCLEANING

Do not attempt to clean the F3M-S825-1 using paint thinner, to

avoid damaging the surface of the Sensor.

JCONNECTION AND MOUNTING

xA maximum of 24 VDC+10% can be imposed on the

F3M-S825-1. Check that the voltage of the power supply is

within the permissible range before turning on the

F3M-S825-1. The power supply must be constructed so that

the secondary circuit is insulated with an isolating

transformer.

xDo not wire power lines or high-voltage lines within the

same conduit with the lines of the F3M-S825-1, or the sensor

may be damaged or malfunction.

xAvoid mechanical impact when mounting the F3M-S825-1, or

its water-resistant properties will be reduced.

JPOWER SUPPLY

If a standard switching power supply is connected to the

F3M-S825-1, be sure to ground the FG (frame ground) and

G (ground) terminals of the power supply. If these terminals are

not grounded, the Sensor may malfunction due to switching noise

that will be generated from the power supply.

Cat. No. D063-E3-825 7/00 Specifications subject to change without notice. Printed in U.S.A.

OMRON ELECTRONICS, INC.

OneEastCommerceDrive

Schaumburg, IL 60173

NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.4.

1-800-55-OMRON

OMRON CANADA, INC.

885 Milner Avenue

Scarborough, Ontario M1B 5V8

416-286-6465