SENSORS FOR
SEMICONDUCTOR INDUSTRY
M-DW1
FD-L43
SH-72
M
HD-T1
EX-F70/F60
FD-F7
FT-F9
Liquid Leak / Liquid Level Sensing Glass Substrate / Wafer Sensing
FX-301-F
564
Optimum sensing
capability for LCD
manufacturing
Reliable detection of glass substrates
Its unique optical system enables
detection of transparent glass plate, as
well as, film deposite glass plates at the
same sensing distance.
Sensing range
0.5 to 7.5 mm
0.020 to 0.295 in
Glass
substrate
Beam-
emitting
part Beam-
receiving
part
No null zone
The sensor can reliably detect a glass
substrate right in front of it.
Glass substrate
Not affected by background
Because it is convergent reflective
type, a glass substrate is reliably
detected without any effect of back-
ground objects.
Glass substrate
Background object
High precision
Repeatability: 0.03 mm 0.001 in
0.03 mm
0.001 in Glass
substrate
SH-72
Glass Substrate Detection Sensor Amplifier-separated
Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com
SU-75
SU-77
SU-79
SU-7
SU-7P
SS-A5
Two PNP
open-collector
transistor
outputs
sensing output and
self-diagnosis output
Type Appearance Model No.
1 ms or less
Two NPN
open-collector
transistor
outputs
sensing output and
self-diagnosis output
Supply voltage Output Response time
External
synchronization function
Timer
function
Automatic sensitivity setting
Manually
sensitivity
set type Standard type
PNP output NPN output
External
sensitivity
selection type
Remote
sensitivity
setting type
External
synchronization
input type
()
Two NPN
open-collector
transistor
outputs
sensing output and
self-diagnosis output
()
()
Two NPN
open-collector
transistor
outputs
sensing output and
self-diagnosis output
()
0.6 ms or less
0.8 ms or less when the
interference prevention
function is used
Incorporated
Either gate trigger or
edge trigger is selectable
ON-delay /
OFF-delay timer
(variable 0 to 5 sec.)
ON-delay /
OFF-delay timer
(variable 0 to 5 sec.)
Approx. 40 ms fixed
OFF-delay timer
()
()
SENSORS FOR
SEMICONDUCTOR INDUSTRY
M-DW1
FD-L43
SH-72MHD-T1
EX-F70/F60
FD-F7
FT-F9
Liquid Leak / Liquid Level Sensing Glass Substrate / Wafer Sensing
FX-301-F
12 to 24 V DC
10 %
SH-72
565
Appearance Sensing range
0.5 to 7.5 mm
0.020 to 0.295 in
with transparent glass
plate
Model No.
SH-72
Type
Convergent reflective
APPLICATIONS
Detecting transparent glass substrates in a cassette Detecting a wafer
Sensor head
SH-72
Cassette
Transparent
glass substrate
ORDER GUIDE
Amplifiers
()
Wafer
SH-72
Accessories
• MS-DIN-2 (Amplifier mounting bracket for SU-7 series) • MS-DIN-1 (Amplifier mounting bracket for SS-A5)
Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com
Convergent reflective
SH-72
SU-7 series, SS-A5
0.5 to 7.5 mm 0.02 to 0.295 in (with transparent glass plate)
24 mm 0.945 in or more transparent glass, aluminum-evaporated mirror, etc.
5 % or less of operation distance
0.03 mm 0.001 in or less
10 to60 C 14 to140 F (No dew condensation or icing allowed), Storage 10 to60C 14 to140 F
35 to 85 % RH, Storage: 35 to 85 % RH
Sunlight: 11,000 ?x at the light-receiving face, Incandescent light: 3,500 ?x at the light-receiving face
10 to 55 Hz frequency, 1.5 mm 0.059 in amplitude in X, Y and Z directions for two hours each
500 m/s2acceleration (50 G approx.) in X, Y and Z directions for three times each
Infrared LED (modulated)
Enclosure: Polycarbonate
0.089 mm2single core two parallel shielded cables, 3 m 9.843 ft long
Extension up to total 5 m 16.404 ft is possible with an equivalent cable.
25 g approx.
Applicable amplifiers
Sensing range
Sensing object
Hysteresis
Repeatability (along sensing axis)
Ambient temperature
Ambient humidity
Ambient illuminance
Vibration resistance
Shock resistance
Emitting element
Material
Cable
Cable extension
Weight
Type
Item Model No.
Environmental
resistance
SENSORS FOR
SEMICONDUCTOR INDUSTRY
M-DW1
FD-L43
SH-72
M
HD-T1
EX-F70/F60
FD-F7
FT-F9
Liquid Leak / Liquid Level Sensing Glass Substrate / Wafer Sensing
FX-301-F
SH-72
566
SPECIFICATIONS
Sensor head
Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com
SENSORS FOR
SEMICONDUCTOR INDUSTRY
M-DW1
FD-L43
SH-72MHD-T1
EX-F70/F60
FD-F7
FT-F9
Liquid Leak / Liquid Level Sensing Glass Substrate / Wafer Sensing
FX-301-F
Supply voltage
Current consumption
Sensing output
Output operation
Short-circuit protection
Self-diagnosis output
Output operation
Short-circuit protection
Response time
Operation indicator
Stability indicator
Sensitivity adjuster
Interference prevention function
Timer function
External synchronization function
Ambient temperature
Ambient humidity
Voltage withstandability
Insulation resistance
Vibration resistance
Shock resistance
Material
Cable
Weight
Accessories
Environmental resistance
Slim body with automatic sensitivity setting amplifier Manually sensitivity set amplifier
Type
Item Model No. NPN output PNP output
SU-7 (Note) SU-7P (Note) SS-A5
12 to 24 V DC10 % Ripple P-P 10 % or less
35 mA or less 40 mA or less
Selectable either Light-ON or Dark-ON with the ON and OFF buttons
Incorporated
ON under unstable sensing condition (restored automatically after 40 ms approx.),
or if the sensing output is short-circuited (restored when short-circuit is rectified)
0.6 ms or less
(0.8 ms or less when the interference prevention function is used)
Red LED (lights up when the sensing output is ON)
Continuously variable twin adjusters
Incorporated (Two units of sensors can be mounted close together.)
(Either gate trigger or edge trigger is selectable with SU-75)
10 to55 C 14 to131 F, Storage:20 to70 C 4 to158 F
35 to 85 % RH (No dew condensation or icing allowed), Storage: 35 to 85 % RH
1,000 V AC for one min. between all supply terminals connected together and enclosure
20 MΩ, or more, with 250 V DC megger between all supply terminals connected
together and enclosure
10 to 150 Hz frequency, 0.75 mm 0.030 in amplitude in X, Y and Z directions for
two hours each
100 m/s2
acceleration (10 G approx.) in X, Y and Z directions for five times each
Enclosure: Heat-resistant ABS
Cover: Polycarbonate
Cable lock lever: PPS
0.2 mm2
4-core cabtyre cable, 2 m 6.562 ft long
65 g approx. 120 g approx.
MS-DIN-2 (Amplifier mounting bracket): 1 pc.
NPN open-collector transistor
• Maximum sink current: 50 mA
• Applied voltage: 30 V DC or less
(between self-diagnosis output and 0 V)
• Residual voltage:
1 V or less (at 50 mA sink current)
0.4 V or less (at 16 mA sink current)
MS-DIN-1(Amplifier
mounting bracket): 1 pc.
Adjusting screwdriver: 1 pc.
Adjuster cap: 1 pc.
0.2 mm2
4-core cabtyre cable,
3 m 9.843 ft long
10 to 55 Hz frequency, 1.5 mm 0.059 in amplitude
in X, Y and Z directions for two hours each
100 m/s
2
acceleration (10 G approx.) in X,
Y and Z directions for three times each
PNP open-collector transistor
•
Maximum source current: 50 mA
• Applied voltage: 30 V DC or less
(between self-diagnosis output and V)
• Residual voltage:
2.0 V or less (at 50 mA source current)
1.0 V or less (at 16 mA source current)
Green LED
(lights up under stable light received condition or stable dark condition)
(Refer to the SU-7 series p.392l for details)
ON under stable sensing condition
1 ms or less
NPN open-collector transistor
• Maximum sink current: 100 mA
• Applied voltage: 30 V DC or less
(between sensing output and 0 V)
• Residual voltage:
1 V or less
(at 100 mA sink current)
0.4 V or less
(at 16 mA sink current)
PNP open-collector transistor
• Maximum source current: 100 mA
• Applied voltage: 30 V DC or less
(between sensing output and V)
• Residual voltage:
2.0 V or less
(at 100 mA source current)
1.0 V or less
(at 16 mA source current)
NPN open-collector transistor
• Maximum sink current: 100 mA
• Applied voltage: 30 V DC or less
(between sensing output and 0 V)
• Residual voltage:
1.5 V or less
(at 100 mA sink current)
0.4 V or less
(at 16 mA sink current)
Selectable either Light-ON or Dark-ON
with the operation mode switch
()
NPN open-collector transistor
• Maximum sink current: 50 mA
• Applied voltage: 30 V DC or less
(between self-diagnosis output and 0 V)
• Residual voltage:
1 V or less (at 50 mA sink current)
0.4 V or less (at 16 mA sink current)
Enclosure: Heat-resistant ABS
Cover: Polycarbonate
20 MΩ, or more, with 500 V DC megger between all
supply terminals connected together and enclosure
Green LED
lights up under stable light received
condition or stable dark condition
ON-delay / OFF-delay timer
(variable 0 to 5 sec.) Approx. 40 ms fixed OFF-delay timer,
selectable either effective or ineffective
25 to60 C 13 to140 F,
Storage:30 to70 C 22 to158 F
Note: Refer to p.392 for details of other SU-7 series amplifiers.
SH-72
567
SPECIFICATIONS
Amplifiers
Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com
SENSORS FOR
SEMICONDUCTOR INDUSTRY
M-DW1
FD-L43
SH-72
M
HD-T1
EX-F70/F60
FD-F7
FT-F9
Liquid Leak / Liquid Level Sensing Glass Substrate / Wafer Sensing
FX-301-F
4
0.157 2
0.079 02
0.079 4
0.157
0
4
0.157
8
0.315 2424 mm
0.9450.945 in
Transparent glass plate
L
Center RightLeft
Sensor
head
Operating point # (mm in)
#
Setting distance L (mm in)
SH-72
568
I/O CIRCUIT AND WIRING DIAGRAMS
Refer to p.393 for
‘
I/O CIRCUIT AND WIRING DIAGRAMS’of SU-7
series excluding SU-7 and SU-7P, respectively.
SU-7
I/O circuit diagram Wiring diagram
D
ZD2 Tr1
Tr2
100 mA max.
50 mA max.
Color code
Load
ZD1
(Brown)V
(Black)
Sensing output
(Blue) 0 V
Users’ circuitInternal circuit
12 to 24 V DC
10 %
(Orange) Self-diagnosis output
Load
Sensor circuit
Symbols ... D: Reverse supply polarity protection diode
ZD1, ZD2: Surge absorption zener diode
Tr1, T r2: NPN output transistor
SU-7P
I/O circuit diagram Wiring diagram
D
ZD2
Tr1
Tr2
100 mA max.
50 mA max.
Color code
Load
Load
ZD1
(Brown)V
(Black) Sensing output
(Orange) Self-diagnosis
output
(Blue) 0 V
Users’ circuitInternal circuit
12 to 24 V DC
10 %
Sensor circuit
Symbols ... D: Reverse supply polarity protection diode
ZD1, ZD2: Surge absorption zener diode
Tr1, T r2: PNP output transistor
SENSING CHARACTERISTICS (TYPICAL)
Sensing field
D
ZD2 Tr1
Tr2
100 mA max.
50 mA max.
Color code
Load
ZD1
(Brown)V
(Black)
Sensing output
(Blue) 0 V
Users’ circuitInternal circuit
12 to 24 V DC
10 %
(Orange) Self-diagnosis output
Load
Sensor circuit
I/O circuit diagram Wiring diagram to sensor head
1
2
3
4
Gray cable (Beam-emitting)
Brown lead
wire
Yellow lead
wire Black cable (Beam-receiving)
Terminal No.
Shield
SS-A5
(Amplifier) Shield
Sensor head
Symbols ... D: Reverse supply polarity protection diode
ZD1, ZD2: Surge absorption zener diode
Tr1, T r2 : NPN output transistor
SS-A5
Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com
SENSORS FOR
SEMICONDUCTOR INDUSTRY
M-DW1
FD-L43
SH-72MHD-T1
EX-F70/F60
FD-F7
FT-F9
Liquid Leak / Liquid Level Sensing Glass Substrate / Wafer Sensing
FX-301-F
SH-72
569
This product is not a safety sensor. Its use is not
intended or designed to protect life and prevent body
injury or property damage from dangerous parts of
machinery. It is a normal object detection sensor.
PRECAUTIONS FOR PROPER USE
• Use the sensor head and the amplifier together at a set.
Mounting of the sensor head
• The tightening torque with M3 screws should be 0.29 N m
or less.
Refer to p.1135l for general precautions, p.397l for precautions for SU-7 series,
and p.409l for precautions for SS-A5.
M3 screws
(Please arrange separately.)
Wiring
• If the attached sensor head cables need to be extended,
use two single core shielded cables of at least equivalent
quality. (Extension up to total 5 m 16.404 ft is possible.)
If a joint terminal or connector is used for extension, refer
to the figures below. (The shielded extension cable must
be of "1.45 mm "0.057 in outer diameter.)
SH-72
Connection with metal connector
The beam-emitting
cable and the
beam-receiving
cable must not be
connected to one
metal connector.
Use two separate
metal connectors.
Beam-
emitting
cable
NG
Beam-
receiving
cable
Beam-
emitting
cable
Beam-
receiving
cable
OK
Connection with joint terminal
The beam-emitting
cable and the
beam-receiving
cable should be
separated from
each other as
much as possible.
This distance
should be as
short as pos-
sible.
Beam-
emitting
cable
NG
Beam-
receiving
cable
Beam-
emitting
cable
Beam-
receiving
cable
OK
Sensor head
DIMENSIONS (Unit: mm in)
12 0.472
62.5
2.461
19
0.748
2-"3.5 "0.138
mounting holes
40
1.575 36.5
1.437
Beam-
emitting
part Beam-
receiving
part
"1.45 "0.057 single core two parallel
shielded cables, 3 m 9.843 ft long
SH-72
The CAD data in the dimensions can be downloaded from the SUNX website: http://www.sunx.co.jp/
Refer to p.402 and p.412 for dimensions of SU-7 series, and SS-A5, respectively.
Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com