Rev 1
July 2005 CD00059664 1/17
17
LIS2L02AQ3
MEMS INERTIAL SENSOR:
2-axis - ±2g/±6g LINEAR ACCELEROMETER
Features
■2.4V TO 5.25V SINGLE SUPPLY
OPERATION
■LOW POWER CONSUMPTION
■±2g/±6g USER SELECTABLE FULL-SCALE
■0.3mg RESOLUTION OVER 100Hz
BANDWIDTH
■EMBEDDED SELF TEST AND POWER
DOWN
■OUTPUT VOLTAGE, OFFSET AND
SENSITIVITY RATIOMETRIC TO THE
SUPPLY VOLTAGE
■HIGH SHOCK SURVIVABILITY
■ECO-PACK COMPLIANT
Description
The LIS2L02AQ3 is a low-power 2-axis linear
capacitive accelerometer that includes a sensing
element and an IC interface able to take the
information from the sensing element and to
provide an analog signal to the external world.
The sensing element, capable of detecting the
acceleration, is manufactured using a dedicated
process developed by ST to produce inertial
sensors and actuators in silicon.
The IC interface is manufactured using a standard
CMOS process that allows high level of integration
to design a dedicated circuit which is trimmed to
better match the sensing element characteristics.
The LIS2L02AQ3 has a user selectable full scale
of ±2g, ±6g and it is capable of measuring
accelerations over a bandwidth of 1.5 KHz for all
axes. The device bandwidth may be reduced by
using external capacitances. A self-test capability
allows to check the mechanical and electrical
signal path of the sensor.
The LIS2L02AQ3 is available in plastic SMD
package and it is specified over an extended
temperature range of -40°C to +85°C.
The LIS2L02AQ3 belongs to a family of products
suitable for a variety of applications:
– Mobile terminals
– Gaming and Virtual Reality input devices
– Free-fall detection for data protection
– Antitheft systems and Inertial Navigation
– Appliance and Robotics.
Order codes
QFN-44
Part number Temp range, °C Package Packing
LIS2L02AQ3 -40°C to +85°C QFN-44 Tray
LIS2L02AQ3TR -40°C to +85°C QFN-44 Tape & Reel
www.st.com
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LIS2L02AQ3
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Contents
1 Block Diagram & Pin Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Pin Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Mechanical and Electrical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Mechanical Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Electrical Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.4 Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3 Functionality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.1 Sensing element . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.2 IC Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.3 Factory calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4 Application hints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.1 Soldering information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5 Typical performance characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.1 Mechanical Characteristics at 25°C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.2 Mechanical Characteristics derived from measurement in the
-40°C to +85°C temperature range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.3 Electrical characteristics at 25°C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6 Package Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
7 Revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
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LIS2L02AQ3 1 Block Diagram & Pin Description
CD00059664 3/17
1 Block Diagram & Pin Description
1.1 Block diagram
Figure 1. Block Diagram
1.2 Pin Description
Figure 2. Pin Connection (Top view)
DEMUX
S/H
CHARGE
AMPLIFIER
S/H
MUX
Y+
Y-
Voutx
Vouty
Routx
Routy
TRIMMING CIRCUIT CLOCK
X+
X-
SELF TEST
REFERENCE
a
DIRECTION OF THE
DETECTABLE
ACCELERATIONS
Y
1
X
NC
NC
NC
GND
Vdd
Vouty
ST
Voutx
NC
NC
NC
NC
NC
NC
NC
NC
Reserved
Reserved
Reserved
NC
NC
Reserved
NC
NC
PD
NC
FS
Reserved
Reserved
Reserved
Reserved
NC
Reserved
NC
NC
NC
NC
NC
NC
NC
NC
NC
NC
NC
LIS2L02AQ3
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Table 1. Pin description
Pin # Pin Name Function
1 to 3 NC Internally not connected
4 GND 0V supply
5 Vdd Power supply
6 Vouty Output Voltage, y-channel
7 ST Self Test (Logic 0: normal mode; Logic 1: Self-test)
8 Voutx Output Voltage, x-channel
9-13 NC Internally not connected
14 PD Power Down (Logic 0: normal mode; Logic 1: Power-Down mode)
15 NC Internally not connected
16 FS Full Scale selection (Logic 0: ±2g Full-scale; Logic 1: ±6g Full-scale)
17-18 Reserved Leave unconnected
19 Reserved Leave unconnected
20 Reserved Leave unconnected
21 NC Internally not connected
22-23 Reserved Leave unconnected
24-25 NC Internally not connected
26 Reserved Connect to Vdd or GND
27 Reserved Leave unconnected or connect to Vdd
28 Reserved Leave unconnected or connect to GND
29-44 NC Internally not connected
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LIS2L02AQ3 2 Mechanical and Electrical Specifications
CD00059664 5/17
2 Mechanical and Electrical Specifications
2.1 Mechanical Characteristics
Table 2. Mechanical Characteristics1
(Temperature range -40°C to +85°C) All the parameters are specified @ Vdd =3.3V,
T = 25°C unless otherwise noted.
Note: 1 The product is factory calibrated at 3.3V. The device can be powered from 2.4V to 5.25V. Voff,
So and Vt parameters will vary with supply voltage.
2 Typical specifications are not guaranteed
Symbol Parameter Test Condition Min. Typ.2Max. Unit
Ar Acceleration Range3
FS pin connected to
GND ±1.8 ±2.0 g
FS pin connected to
Vdd ±5.4 ±6.0 g
So Sensitivity4Full-scale = 2g Vdd/5–10% Vdd/5 Vdd/5+10% V/g
Full-scale = 6g Vdd/15–10% Vdd/15 Vdd/15+10% V/g
SoDr Sensitivity Change Vs
Temperature Delta from +25°C ±0.01 %/°C
Voff Zero-g Level4T = 25°C Vdd/2-6% Vdd/2 Vdd/2+6% V
OffDr Zero-g Level Change Vs
Temperature Delta from +25°C ±0.2 mg/°C
NL Non Linearity5Best fit straight line
Full-scale = 2g ±0.3 ±1.5 % FS
CrossAx Cross-Axis6±2±4%
An Acceleration Noise
Density
Vdd=3.3V;
Full-scale = 2g 30
Vt Self Test Output Voltage
Change7,8,9
T = 25°C
Vdd=3.3V
Full-scale = 2g
X axis
20 50 100 mV
T = 25°C
Vdd=3.3V
Full-scale = 2g
Y axis
-20 -50 -100 mV
Fres Sensing Element
Resonance Frequency10 all axes 1.5 KHz
Top Operating Temperature
Range -40 +85 °C
Wh Product Weight 0.2 gram
µg
Hz
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2 Mechanical and Electrical Specifications LIS2L02AQ3
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3 Guaranteed by wafer level test and measurement of initial offset and sensitivity
4 Zero-g level and sensitivity are essentially ratiometric to supply voltage
5 Guaranteed by design
6 Contribution to the measuring output of the inclination/acceleration along any perpendicular
axis
7 Self test “output voltage change” is defined as Vout(Vst=Logic1)-Vout(Vst=Logic0)
8 Self test “output voltage change” varies cubically with supply voltage
9 When full-scale is set to ±6g, self-test “output voltage change” is one third of the specified value
10 Minimum resonance frequency Fres=1.5KHz. Sensor bandwidth=1/(2*
π
*110K
Ω
*Cload) with
Cload>1nF.
2.2 Electrical Characteristics
Note: 1 The product is factory calibrated at 3.3V
2 Typical specifications are not guaranteed
3 Minimum resonance frequency Fres=1.5KHz. Sensor bandwidth=1/(2*
π
*110K
Ω
*Cload) with
Cload>1nF
Table 3. Electrical Characteristics1
(Temperature range -40°C to +85°C) All the parameters are specified @ Vdd =3.3V, T=25°C
unless otherwise noted
Symbol Parameter Test Condition Min. Typ.2Max. Unit
Vdd Supply Voltage 2.4 3.3 5.25 V
Idd Supply Current
mean value
PD pin connected to
GND
0.85 1.5 mA
IddPdn Supply Current in Power
Down Mode
rms value
PD pin connected to Vdd 25µA
Vst Self Test Input Logic 0 level 0 0.8 V
Logic 1 level 2.2 Vdd V
Rout Output Impedance 80 110 140 kΩ
Cload Capacitive Load Drive3320 pF
Ton Tu r n-O n Ti me at Exit
From Power Down Mode Cload in µF 550*Cload+0.3 ms
Top Operating Temperature
Range -40 +85 °C
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2.3 Absolute maximum ratings
Stresses above those listed as “absolute maximum ratings” may cause permanent damage to
the device. This is a stress rating only and functional operation of the device under these
conditions is not implied. Exposure to maximum rating conditions for extended periods may
affect device reliability.
Table 4. Absolute maximum ratings
2.4 Terminology
Sensitivity describes the gain of the sensor and can be determined by applying 1g
acceleration to it. As the sensor can measure DC accelerations this can be done easily by
pointing the axis of interest towards the center of the earth, note the output value, rotate the
sensor by 180 degrees (point to the sky) and note the output value again thus applying ±1g
acceleration to the sensor. Subtracting the larger output value from the smaller one and dividing
the result by 2 will give the actual sensitivity of the sensor. This value changes very little over
temperature (see sensitivity change vs. temperature) and also very little over time. The
Sensitivity Tolerance describes the range of Sensitivities of a large population of sensors.
Zero-g level describes the actual output signal if there is no acceleration present. A sensor in a
steady state on a horizontal surface will measure 0g in X axis and 0g in Y axis. The output is
ideally for a 3.3V powered sensor Vdd/2 = 1650mV. A deviation from ideal 0-g level (1650mV in
this case) is called Zero-g offset. Offset of precise MEMS sensors is to some extend a result of
stress to the sensor and therefore the offset can slightly change after mounting the sensor onto
a printed circuit board or exposing it to extensive mechanical stress. Offset changes little over
temperature - see "Zero-g level change vs. temperature" - the Zero-g level of an individual
sensor is very stable over lifetime. The Zero-g level tolerance describes the range of zero-g
levels of a population of sensors.
Symbol Ratings Maximum Value Unit
Vdd Supply voltage -0.3 to 7 V
Vin Input Voltage on Any Control pin (FS, PD, ST) -0.3 to Vdd +0.3 V
APOW Acceleration (Any axis, Powered, Vdd=3.3V) 3000g for 0.5 ms
10000g for 0.1 ms
AUNP Acceleration (Any axis, Not powered) 3000g for 0.5 ms
10000g for 0.1 ms
TSTG Storage Temperature Range -40 to +125 °C
ESD Electrostatic Discharge Protection
2KV HBM
200V MM
1500V CDM
This is a Mechanical Shock sensitive device, improper handling can cause
permanent damages to the part
This is an ESD sensitive device, improper handling can cause permanent damages
to the part
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2 Mechanical and Electrical Specifications LIS2L02AQ3
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Self Test allows to test the mechanical and electrical part of the sensor. By applying a digital
signal to the ST input pin an internal reference is switched to a certain area of the sensor and
creates a defined deflection of the moveable structure. The sensor will generate a defined
signal and the interface chip will perform the signal conditioning. If the output signal changes
with the specified amplitude than the sensor is working properly and the parameters of the
interface chip are within the defined specifications.
Output impedance describes the resistor inside the output stage of each channel. This
resistor is part of a filter consisting of an external capacitor of at least 320pF and the internal
resistor. Due to the high resistor level only small, inexpensive external capacitors are needed to
generate low corner frequencies. When interfacing with an ADC it is important to use high input
impedance input circuitries to avoid measurement errors. Note that the minimum load
capacitance forms a corner frequency beyond the resonance frequency of the sensor. For a flat
frequency response a corner frequency well below the resonance frequency is recommended.
In general the smallest possible bandwidth for an particular application should be chosen to get
the best results.
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LIS2L02AQ3 3 Functionality
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3 Functionality
The LIS2L02AQ3 is a high performance, low-power, analog output 2-axis linear accelerometer
packaged in a QFN package. The complete device includes a sensing element and an IC
interface able to take the information from the sensing element and to provide an analog signal
to the external world.
3.1 Sensing element
A proprietary process is used to create a surface micro-machined accelerometer. The
technology allows to carry out suspended silicon structures which are attached to the substrate
in a few points called anchors and are free to move in the direction of the sensed acceleration.
To be compatible with the traditional packaging techniques a cap is placed on top of the
sensing element to avoid blocking the moving parts during the moulding phase of the plastic
encapsulation.
When an acceleration is applied to the sensor the proof mass displaces from its nominal
position, causing an imbalance in the capacitive half-bridge. This imbalance is measured using
charge integration in response to a voltage pulse applied to the sense capacitor.
At steady state the nominal value of the capacitors are few pF and when an acceleration is
applied the maximum variation of the capacitive load is up to 100fF.
3.2 IC Interface
In order to increase robustness and immunity against external disturbances the complete signal
processing chain uses a fully differential structure. The final stage converts the differential
signal into a single-ended one to be compatible with the external world.
The signals of the sensing element are multiplexed and fed into a low-noise capacitive charge
amplifier that implements a Correlated Double Sampling system (CDS) at its output to cancel
the offset and the 1/f noise. The output signal is de-multiplexed and transferred to three
different S&Hs, one for each channel and made available to the outside.
The low noise input amplifier operates at 200 kHz while the three S&Hs operate at a sampling
frequency of 66 kHz. This allows a large oversampling ratio, which leads to in-band noise
reduction and to an accurate output waveform.
All the analog parameters (zero-g level, sensitivity and self-test) are ratiometric to the supply
voltage. Increasing or decreasing the supply voltage, the sensitivity and the offset will increase
or decrease almost linearly. The self test voltage change varies cubically with the supply
voltage.
3.3 Factory calibration
The IC interface is factory calibrated for sensitivity (So) and Zero-g level (Voff).
The trimming values are stored inside the device by a non volatile structure. Any time the
device is turned on, the trimming parameters are downloaded into the registers to be employed
during the normal operation. This allows the user to employ the device without further
calibration.
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4 Application hints
Figure 3. LIS2L02AQ3 Electrical Connection
Power supply decoupling capacitors (100nF ceramic or polyester + 10µF Aluminum) should be
placed as near as possible to the device (common design practice).
The LIS2L02AQ3 allows to band limit Voutx, Vouty and Voutz through the use of external
capacitors. The re-commended frequency range spans from DC up to 1.5 KHz. In particular,
capacitors must be added at output pins to implement low-pass filtering for antialiasing and
noise reduction. The equation for the cut-off frequency (ft) of the external filters is:
Taking into account that the internal filtering resistor (Rout) has a nominal value equal to
110kOhm, the equation for the external filter cut-off frequency may be simplified as follows:
The tolerance of the internal resistor can vary typically of within its nominal value of
110kΩ; thus the cut-off frequency will vary accordingly. A minimum capacitance of 320 pF for
Cf(x, y, z) is required in any case.
res
res
res
Vout Y
100nF
LIS2L02AQ3
10
µ
F
Vdd
Vout X
GND
GND
Vdd
GND
1
44
34
33
11
12
22
23
DIRECTION OF THE
DETECTABLE
ACCELERATIONS
Cload x
Cload y
res
res
res
Y
1
X
(top view)
Optional
PD
FS
ST
Digital signals
GND
GND
Optional
ft
1
2πRout Cload xyz,,()⋅⋅
----------------------------------------------------------------=
ft
1.45µF
Cload xyz,,()
-----------------------------------=
20%±
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LIS2L02AQ3 4 Application hints
CD00059664 11/17
Table 5. Filter Capacitor Selection, Cf (x,y,z). Capacitance value approximated closest
commercial available.
4.1 Soldering information
The QFN44 package is lead free and green package qualified for soldering heat resistance
according to JEDEC J-STD-020C. Land pattern and soldering recommendations are available
upon request.
Cut-off frequency Capacitor value
1 Hz 1500 nF
10 Hz 150 nF
20 Hz 68 nF
50 Hz 30 nF
100 Hz 15 nF
200 Hz 6.8 nF
500 Hz 3 nF
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5 Typical performance characteristics LIS2L02AQ3
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5 Typical performance characteristics
5.1 Mechanical Characteristics at 25°C
Figure 4. x-axis 0-g level at 3.3V Figure 5. y-axis 0-g level at 3.3V
Figure 6. x-axis sensitivity at 3.3V Figure 7. y-axis sensitivity at 3.3V
1.55 1.6 1.65 1.7 1.75
0
5
10
15
0 g LEVEL (V)
Percent of parts (%)
1.55 1.6 1.65 1.7 1.75
0
5
10
15
0 g LEVEL (V)
Percent of parts (%)
0.62 0.63 0.64 0.65 0.66 0.67 0.68 0.69 0.7
0
2
4
6
8
10
12
14
16
18
20
sensitivity (V/g)
Percent of parts (%)
0.62 0.63 0.64 0.65 0.66 0.67 0.68 0.69 0.7
0
5
10
15
sensitivity (V/g)
Percent of parts (%)
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LIS2L02AQ3 5 Typical performance characteristics
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5.2 Mechanical Characteristics derived from measurement in the
-40°C to +85°C temperature range
Figure 8. x-axis 0-g level change Vs
temperature
Figure 9. y-axis 0-g level change Vs
temperature
Figure 10. x-axis sensitivity change Vs
temperature
Figure 11. y-axis sensitivity change Vs
temperature
10.8 0.6 0.4 0.2 00.2 0.4 0.6
0
5
10
15
20
25
30
35
40
45
Zero g level change (mg/˚C)
Percent of parts (%)
10.5 00.5 1
0
5
10
15
20
25
30
35
40
Zero g level change (mg/˚C)
Percent of parts (%)
20 15 10 5 0 5
x 10 3
0
5
10
15
20
25
30
sensitivity change (%/˚C)
Percent of parts (%)
20 15 10 5 0 5
x 10 3
0
5
10
15
20
25
30
sensitivity change (%/˚C)
Percent of parts (%)
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5.3 Electrical characteristics at 25°C
Figure 12. Noise density at 3.3V Figure 13. Current consumption at 3.3V
Figure 14. Current consumption in power
down mode at 3.3V
18 20 22 24 26 28 30 32
0
5
10
15
20
25
30
35
Noise density (ug/sqrt(Hz))
Percent of parts (%)
0.4 0.6 0.8 11.2 1.4
0
2
4
6
8
10
12
14
16
18
20
current consumption (mA)
Percent of parts (%)
1.2 1.3 1.4 1.5 1.6 1.7 1.8
0
5
10
15
20
25
30
current consumption (uA)
Percent of parts (%)
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LIS2L02AQ3 6 Package Information
CD00059664 15/17
6 Package Information
Figure 15. QFN-44 Mechanical Data & Package Dimensions
OUTLINE AND
MECHANICAL DATA
DIM.
mm inch
MIN. TYP. MAX. MIN. TYP. MAX.
A 1.70 1.80 1.90 0.067 0.071 0.075
A1 0.19 0.21 0.007 0.008
b 0.20 0.25 0.30 0.008 0.01 0.012
D 7.0 0.276
E 7.0 0.276
e 0.50 0.020
J 5.04 5.24 0.198 0.206
K 5.04 5.24 0.198 0.206
L 0.38 0.48 0.58 0.015 0.019 0.023
P 45 REF 45 REF
QFN-44 (7x7x1.8mm)
Quad Flat Package No lead
G
M
M
DETAIL "N"
34 44
11
1
N
22 12
23
33
44
1
DETAIL G
SEATING PLANE
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7 Revision history LIS2L02AQ3
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7 Revision history
Date Revision Changes
15-July-2005 1First issue.
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Information furnished is believed to be accurate and reliable. However, STMicroelectronics assumes no responsibility for the consequences
of use of such information nor for any infringement of patents or other rights of third parties which may result from its use. No license is granted
by implication or otherwise under any patent or patent rights of STMicroelectronics. Specifications mentioned in this publication are subject
to change without notice. This publication supersedes and replaces all information previously supplied. STMicroelectronics products are not
authorized for use as critical components in life support devices or systems without express written approval of STMicroelectronics.
The ST logo is a registered trademark of STMicroelectronics.
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