Data Sheet
The MiCS-2714 is a compact MOS sensor.
The MiCS-2714 is a robust MEMS sensor for nitrogen
dioxide and leakage detection.
MiCS-2714
1107 rev 6
SGX Sensortech, Courtils 1
CH-2035 Corcelles-Cormondrèche
Switzerland
www.sgxsensortech.com
For more information please contact:
info.em@sgxsensortech.com
Features
• Smallest footprint for compact designs
(5 x 7 x 1.55 mm)
• Robust MEMS sensor for harsh environments
• High-volume manufacturing for low-cost
applications
• Short lead-times
Detectable gases
• Nitrogen dioxide NO2 0.05 – 10ppm
• Hydrogen H2 1 – 1000ppm Continuous power ON, 25°C, 50% RH
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0.01
0.10
1.00
10.00
100.00
0.01 0.1 1 10 100
Concentration [ppm]
Rs/R0
Hydrogen
NO
NO2
Data Sheet
Performance sensor
Characteristic
OX sensor Symbol Typ Min Max Unit
Sensing resistance in air (see note 1) R0 - 0.8 20 k
Typical NO2 detection range FS 0.05 10 ppm
Sensitivity factor (see note 2) S60 - 2 - -
MiCS-2714
1107 rev 6
Notes:
1. Sensing resistance in air R0 is measured under controlled ambient conditions, i.e. synthetic air at 23
±5°C and 50 ± 10% RH. Sampling test.
2. Sensitivity factor is defined as Rs at 0.25 ppm NO2, divided by RS in air. Test conditions are 23 ± 5°C
and ≤5% RH. Indicative values only. Sampling test.
IMPORTANT PRECAUTIONS:
Read the following instructions carefully before using the MiCS-2714 described here to avoid erroneous
readings and to prevent the device from permanent damage.
•The sensor must be reflow soldered in a neutral atmosphere, without soldering flux vapours.
•The sensor must not be exposed to high concentrations of organic solvents, silicone vapours or
cigarette-smoke in order to avoid poisoning the sensitive layer.
•Heater voltage above the specified maximum rating will destroy the sensor due to overheating.
•This sensor is to be placed in a filtered package that protects it against water and dust projections.
•SGX sensortech strongly recommends using ESD protection equipment to handle the sensor.
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Data Sheet
Power circuit and measurement circuit
Parameter Symbol Typ Min Max Unit
Heating power PH 43 30 50 mW
Heating voltage VH 1.7 - - V
Heating current IH 26 - - mA
Heating resistance
at nominal power RH 66 59 73
Rating Symbol Value / Range Unit
Maximum heater power dissipation PH 50 mW
Maximum sensitive layer power dissipation Ps 8 mW
Voltage supplyHeating current Vsupply 4.9 – 5.1 V
Relative humidity range RH 5 – 95 %RH
Ambient operating temperature Tamb -30 – 85 °C
Storage temperature range Tsto -40 – 120 °C
Storage humidity range RHsto 5 - 95 %RH
MiCS-2714
1107 rev 6
MiCS-2714 with measurement circuit (top view)
The voltage measured on the load resistor is directly linked
to the resistance of the sensor. RLOAD must be 820 W at
the lowest in order not to damage the sensitive layer.
MiCS-2714 with recommended supply circuit (top view)
R is 131 . This resistor is necessary to obtain the right
temperature on the heater while using a single 5 V power
supply. The resulting voltages is typically VH = 1.7 V.
Page 3 of 5
Data Sheet
Package outline dimensions
The package is compatible with SMD assembly process.
Operating conditions
MiCS-2714
1107 rev 6
Sensor configuration
The silicon gas sensor structure consists of an accurately micro machined diaphragm with an
embedded heating resistor and the sensing layer on top.
The internal connections are shown above.
Pin Connection
A Rh1
B Rs1
C
D
E
F
G
H Rh2
J Rs2
K MiCS-2714 configuration (bottom view)
Page 4 of 5
Data Sheet
SGX Sensortech, Courtils 1
CH-2035 Corcelles-Cormondrèche
Switzerland
www.sgxsensortech.com
For more information please contact:
info.em@sgxsensortech.com
Power circuit
The two resistors (82 ohm for RED and 51+82
ohm for OX) are necessary to obtain the right
temperatures on the two independent heaters
while using a 5V power supply.
Packaging
The sensors are packaged in a tape and reel for
expedition.
The sensors are placed in a carrier type. The
dimensions of the cavity are 5.5 x 7.5 x 2.55 mm
(the tolerance is +/- 0.2 mm).
The outside dimension of the reel is either 178
+- mm (for a maximum of 700 sensors ) or 330
+ 0.25 / -4 mm (for a maximum of 2000
sensors).
MiCS-2714
1107 rev 6
Whilst SGX sensortech has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences
of any use thereof and also reserves the right to change the specification of goods without notice. SGX sensortech accepts no liability beyond the set
out in its standard conditions of sale in respect of infringement of third party patents arising from the use of tubes or other devices in accordance
with information contained herein.
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