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MOTOROLA
1–9
MICROPROCESSOR AND MEMORY TECHNOLOGIES GROUP
RELIABILITY AND QUALITY REPORT
STATISTICAL PROCESS CONTROL
Motorola’s Microprocessor and Memory Technologies
Group is continually pursuing new ways to improve product
quality. Initial design improvement is one method that can be
used to produce a superior product. Equally important to
outgoing product quality is the ability to produce product that
consistently conforms to specification. Process variability is
the basic enemy of semiconductor manufacturing since it
leads to product variability. Used in all phases of Motorola’s
product manufacturing, STATISTICAL PROCESS CONTROL
(SPC) replaces variability with predictability. The traditional
philosophy in the semiconductor industry has been adher-
ence to the data sheet specification. Using SPC methods
ensures that the product will meet specific process require-
ments throughout the manufacturing cycle. The emphasis is
on defect prevention, not detection. Predictability through
SPC methods requires the manufacturing culture to focus on
constant and permanent improvements. Usually, these im-
provements cannot be bought with state–of–the–art equip-
ment or automated factories. With quality in design, process,
and material selection, coupled with manufacturing predict-
ability, Motorola produces world class products.
The immediate effect of SPC manufacturing is
predictability through process controls. Product centered and
distributed well within the product specification benefits
Motorola with fewer rejects, improved yields, and lower cost.
The direct benefit to Motorola’s customers includes better
incoming quality levels, less inspection time, and
ship–to–stock capability. Circuit performance is often
dependent on the cumulative effect of component variability.
Tightly controlled component distributions give the customer
greater circuit predictability. Many customers are also
converting to just–in–time (JIT) delivery programs. These
programs require improvements in cycle time and yield
predictability achievable only through SPC techniques. The
benefit derived from SPC helps the manufacturer meet the
customer’s expectations of higher quality and lower cost
product.
Ultimately, Motorola will have Six Sigma capability on all
products. This means parametric distributions will be centered
within the specification limits, with a product distribution of plus
or minus Six Sigma about mean. Six Sigma capability , shown
graphically in Figure 1–3, details the benefit in terms of yield
and outgoing quality levels. This compares a centered distri-
bution versus a 1.5 sigma worst case distribution shift.
New product development at Motorola requires more
robust design features that make them less sensitive to minor
variations in processing. These features make the implemen-
tation of SPC much easier.
A complete commitment to SPC is present throughout
Motorola. All managers, engineers, production operators, su-
pervisors, and maintenance personnel have received multiple
training courses on SPC techniques. Manufacturing has iden-
tified 22 wafer processing and 8 assembly steps considered
critical to the processing of semiconductor products. Pro-
cesses controlled by SPC methods that have shown signifi-
cant improvement are in the diffusion, photolithography, and
metallization areas.
To better understand SPC principles, brief explanations
have been provided. These cover process capability, imple-
mentation, and use.
PROCESS CAPABILITY
Figure 1–3 – AOQL and Yield from a Normal
Distribution of Product With 6σ Capability
Standard Deviations From Mean
Distribution Centered Distribution Shifted ± 1.5
At ±3σ2700 ppm defective
99.73% yield
At ±4σ63 ppm defective
99.9937% yield
At ±5σ0.57 ppm defective
99.999943% yield
At ±6σ0.002 ppm defective
99.9999998% yield
66810 ppm defective
93.32% yield
6210 ppm defective
99.379% yield
233 ppm defective
99.9767% yield
3.4 ppm defective
99.99966% yield
–6σ–5σ–4σ–3σ–2σ–1σ01σ2σ3σ4σ5σ6σ
One goal of SPC is to ensure a process is CAPABLE. Pro-
cess capability is the measurement of a process to produce
products consistently to specification requirements. The pur-
pose of a process capability study is to separate the inherent
RANDOM VARIABILITY from ASSIGNABLE CAUSES.
Once completed, steps are taken to identify and eliminate the
most significant assignable causes. Random variability is
generally present in the system and does not fluctuate. Some-
times, the random variability is due to basic limitations asso-
ciated with the machinery , materials, personnel skills, or man-
ufacturing methods. Assignable cause inconsistencies relate
to time variations in yield, performance, or reliability.
T raditionally, assignable causes appear to be random due
to the lack of close examination or analysis. Figure 1–4 shows
the impact on predictability that assignable cause can have.
Figure 1–5 shows the difference between process control and
process capability.
A process capability study involves taking periodic sam-
ples from the process under controlled conditions. The per-
formance characteristics of these samples are charted
against time. In time, assignable causes can be identified and
engineered out. Careful documentation of the process is the
key to accurate diagnosis and successful removal of the
assignable causes. Sometimes, the assignable causes will
remain unclear, requiring prolonged experimentation.
Elements which measure process variation control and ca-
pability are Cp and Cpk, respectively. Cp is the specification
width divided by the process width or Cp = (specification
width) / 6σ. Cpk is the absolute value of the closest specifica-
tion value to the mean, minus the mean, divided by half the
process width or Cpk = closest specification – X/3σ.