F3M-S825 - Omron - Datasheet.Directory

Silicon Wafer Mapping Sensor F3M-S

Allows Simultaneous Mapping of up

to 25 Silicon Wafers

HEconomical, one sensor detects most

wafer types, including dummy wafers

HModels match wafer sizes of 300 mm,

200 mm and 150 mm

HAutomatic and remote teaching

capability

HSelf-diagnostic functions reduce

downtime

Orderin

Information

Applicable wafer size Number of cassette slots Function Remarks Part number

6 inches (4.76-mm pitch) 25 Self-diagnosis --- F3M-S625

(

)

26 --- --- F3M-S626

8 inches (6.35-mm pitch) 25 Self-diagnosis --- F3M-S825

(

)

26 --- --- F3M-S826

12 inches (10-mm pitch) 13 Self-diagnosis CE marking F3M-S1213

(

)

25 Self-diagnosis CE marking F3M-S1225

Application Examples

Detects Transparent Glass Wafers

with a Transparency of 92%

(F3M-S6jand F3M-S8j)

The F3M-S allows the mapping ofcassettes that have both

silicon wafers and glass wafers.The F3M-S also accurately

detects dummy wafers in the carrier used to testcoating or

processing tolerances.

Automatic Teaching Saves Setting Time

Remote Teaching Available

The F3M-S has an automatic teaching function that ensures easy

adjustments within a minimal time.The remote teaching function

allows quick, on-the-fly set up.

Answer-back Alarms for Setting Errors and

Self-diagnostic Alarms for Operation Errors

These alarms help reduce system downtime and shorten

troubleshooting time.

Note: The self-diagnostic outputfunction is not incorporated by

the F3M-S826/-S626.

Static Electricity Protection

OMRON’s optical system, including an emitter and receiver,

prevents Sensor malfunction and damage by protecting the

Sensor from static electricity thatmay be charged on

semiconductor wafers at the time of mapping.

F3M-S F3M-S

Specifications

JRATINGS/CHARACTERISTICS

Part number F3M-S625 F3M-S626 F3M-S825 F3M-S826 F3M-S1213 F3M-S1225

Sensing object 6-inch (5-inch) semiconductor

silicon wafers and transparent

wafers (with transparency of

92% max.) (See Note.)

8-inch semiconductor silicon

wafers and transparent wafers

(with transparency of 92% max.)

(See Note.)

12-inch semiconductor silicon

wafers and 12-inch SIC wafers

(with transparency of 30% max.)

Number of channels 25 26 25 26 13 25

Optical axis pitch 4.76 mm 6.35 mm 10 mm

Optical axis width 1.5 mm

Light source Infrared LED (940 nm)

Power supply voltage 12 to 24 VDC ±10%, ripple (p-p): 10% max.

Current consumption 120 mA max.

Output Control

output Load power supply voltage:30 VDC

Load current: 20 mA max. (residual voltage: 1 V max.)

Inflow current: 20 mA

Parallel output fromall channels, NPN open collector

Dark-ON operation

Answer-back

output When remote teaching is ON,pin 28 will be used forthis function.

Self-

diagnostic

output

Load power

supply voltage:

30 VDC max.

Load current:

20 mA max.

(Residual

voltage: 1 V

max.)

Inflow current:

20 mA

NPN open

collector

--- Load power

supply voltage:

30 VDC max.

Load current:

20 mA max.

(Residual

voltage: 1 V

max.)

Inflow current:

20 mA

NPN open

collector

--- Load power supply voltage:

30 VDC max.

Load current: 20 mA max.

(Residual voltage: 1 V max.)

Inflow current: 20 mA

NPN open collector

Indicators Power Green indicator is ON when power is being supplied.

Warning Red indicator is ON under the following conditions:

Teaching, no sensing object, insufficient light, or error.

Response time 10 ms max.

Control output interrupt input All outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V

short-circuit current is 1 mA max.

Output interrupt reset: GND and control output interrupt input terminals are opened or the voltage is

between 9 V and the working power supply voltage.

Remote ON GND and remote input terminals are short-circuited and 0-V short-circuitcurrentis 1 mA max.

teaching

input OFF GND and remote inputterminals are opened orthe voltage is between 9 V and the working power

supply voltage.

Teaching check function Orange LED indicator

Ambient

temperature Operating 0°Cto40°C(32°F to 104°F)with no icing or condensation 0°Cto55°C(32°F to 131°F)

with no icing or condensation

Storage -- 2 5 °Cto60°C(--13°F to 140°F) -- 2 5 °Cto60°C(--13°F to 140°F)

Relative humidity 35% to 85%with no condensation

Ambient illumination Fluorescent lamp: 1,500 ℓxmax.

Noise resistance Power supply line: ±480 V in normal mode with noise simulator

Static electrical noise: No malfunction or destruction at ±8kV

Vibration resistance 10 to 55 Hz, 0.5-mm double amplitude for 2 hrs each in X, Y, and Z axes

Shock resistance 300 m/s2(30G) for 3 times each in X, Y, and Z axes

Degree ofprotection IEC60529 IP40

Connection Preleaded cable (standard cable length: 100 mm) Connector

(This table continues on the nextpage.)

F3M-SF3M-S

Specifications Table -- continued from previous page

Part number F3M-S625 F3M-S626 F3M-S825 F3M-S826 F3M-S1213 F3M-S1225

Weight (packed state) Approx. 110 g Approx. 200 g Approx. 300 g

Material Optical axis Polycarbonate

Case ABS ABS, aluminum(alumite

treated/clear finish)

Cable Vinyl-insulated, bending type ---

Accessories Spacer and instruction manual Instruction manual

Note: Operating conditions are restricted for the detection of transparentwafers. Contactyour OMRON representatives for details.

JAUTOMATIC TEACHING FUNCTION

F3M-S6jand F3M-S8j

Power indicator Warning indicator

Teaching button RUN/TEACH mode selector Teaching indicator

F3M-S12j

Power indicator

Warning indicatorTeaching button

RUN/TEACH mode selector Teaching indicator

The remote or manual automatic teaching of the F3M-S is

possible with the following two sensitivity settings:

1. Max. Sensitivity Setting: Detects semiconductor silicon

wafers, translucent dummy wafers, and SIC wafers.

2. Teaching with No Target Object: Detects transparent wafers

(except F3M-S12j).

The sensitivity is setto maximum before shipping. Refer to the

Instruction Manual when setting the sensitivity ofthe F3M-S.

JANSWER-BACK FUNCTION AND

SELF-DIAGNOSTIC FUNCTION

The F3M-S has an answer-back function to warn the user about

setting errors and a self-diagnostic function (except F3M-S626

and F3M-S826) to warn the user about operational errors.

•Answer-back Function: Normal or error teaching output turns

ON.

•Self-diagnostic Function: Warning output turns ON for a

decrease in optical input.

F3M-S F3M-S

eration

JOUTPUT CIRCUIT DIAGRAM

Output

(OUT1)

Output (see note)

(OUT26)

Main circuit

Control outputinterruptinput

Remote teaching input

Note: When remote teaching is input,this output will be for

answer-back output. For Sensors other than

F3M-S626/F3M-S826, this output is for self-diagnostic

output. For F3M-S626/F3M-S826, this output is OUT26.

JI/O TERMINAL ARRANGEMENT

Pin assignment

Pin Assignment Pin Assignment

1GND (0 V) 16 OUT14

2 VCC (12to24V) 17 OUT15

3OUT1 18 OUT16

4OUT2 19 OUT17

5OUT3 20 OUT18

6OUT4 21 OUT19

7OUT5 22 OUT20

8OUT6 23 OUT21

9OUT7 24 OUT22

10 OUT8 25 OUT23

11 OUT9 26 OUT24

12 OUT10 27 OUT25

13 OUT11 28 Self-diagnostic output/OUT26

(see note 1)

14 OUT12 29 Control output interrupt input

15 OUT13 30 Remote teaching input

Note: 1. Pin 28 will have answer-back output only when remote

teaching input is turned ON. Otherwise, for Sensors

other than F3M-S626/F3M-S826, this output is for self-

diagnostic output. For F3M-S626/F3M-S826, this out-

put is OUT26.

2. For the F3M-S1213,terminals forpins 16 to 27 are not

used.

F3M-SF3M-S

Dimensions

Unit:mm(inch)

Two, R4

Two, M4

Thirty,(19/0.08 dia.)

vinyl-insulated,flat

bending cable

Width: 38.1

Pitch:1.27

Optical axis

Side mark

Two,

4.2-dia.

mounting

holes

Teaching button

RUN/TEACH

mode selector

Warning indicator

Teaching indicator

Power indicator

Mounting Dimensions

Two, M4

OMRON XG4E-3031

Connector

Two,

4.2-dia.

mounting

holes

Thirty,(19/0.08 dia.)

vinyl-insulated,flat

bending cable

Width: 38.1

Pitch:1.27

OMRON XG4E-3031

Connector

Optical axis

Side mark

Teaching button

RUN/TEACH

mode selector

Warning indicator

Teaching indicator

Power indicator

Mounting Dimensions

(1.97)

18.5 (0.71)

135(5.31)

14 (0.55)

(3.94)

(4.72)

(1.97)

18.5 (0.71)

135(5.31)

14 (0.55)

(3.94)

(4.72)

JF3M-S625 JF3M-S626

JF3M-S825 JF3M-S826

Optical axis

Side mark

Thirty,(19/0.08 dia.)

vinyl-insulated,flat

bending cable

Width: 38.1

Pitch:1.27

Two,

4.2-dia.

mounting

holes

OMRON XG4E-3031

Connector

Teaching button

RUN/TEACH mode selector Warning indicator

Teaching indicator

Power indicator

Mounting Dimensions

Two, R5

Two, M4

Optical axis

Side mark

Thirty,(19/0.08 dia.)

vinyl-insulated,flat

bending cable

Width: 38.1

Pitch:1.27

Two,

4.2-dia.

mounting

holes

Teaching button

RUN/TEACH mode selector Warning indicator

Teaching indicator

Power indicator

Mounting Dimensions

Two, R5

Two, M4

OMRON XG4E-3031

Connector

(1.97)

18.5 (0.71)

170(6.69)

14 (0.55)

(3.94)

(6.30)

(1.97)

18.5 (0.71)

175(6.89)

14 (0.55)

(3.94)

(6.30)

F3M-S F3M-S

JF3M-S1213 JF3M-S1225

Optical axis

Two, M4,depth:8

(mounting holes)

OMRON XG4A-3034

Connector

Teaching button

RUN/TEACH mode selector Warning indicator

Teaching indicator

Power indicator

Optical axis

Two, M4,depth:8

(mounting holes)

OMRON XG4A-3034

Connector

Teaching button

RUN/TEACH mode selector Warning indicator

Teaching indicator

Power indicator

Optical axis

(1.97)

140 (5.51)

25 (0.98)

18 (0.71)

(1.97)

260 (10.24)

25 (0.98)

18 (0.71)

Precautions

JCORRECT USE

Avoid Damage to the F3M-S

•Do not use the F3M-S ata voltage that exceeds the rated

voltage range.

•Do not make mistakes in wiring, such as mistakes in polarity.

•Do not short-circuit the load.

•Do not connectAC to the F3M-S.

JINSTALLATION/ENVIRONMENT

Do NOT use the F3M-S in the following places:

•Places exposed to directsunlight.

•Places with high humidity thatmay cause condensation.

•Places with corrosive gas.

•Places with vibration or shock directly affecting the Sensor.

JCONNECTION AND MOUNTING

•A maximumof 24 VDC+10% can be imposed on the F3M-S.

Check thatthe voltage ofthe power supply is within the per-

missible range before turning on the F3M-S. The power sup-

ply mustbe constructed so that the secondary circuit is insu-

lated with an isolating transformer.

•Do not wire power lines or high-tension lines within the same

conduit with the lines of the F3M-S, orthe F3M-S may be

damaged ormalfunction due to induction. You mustwire the

lines of the F3M-S separate from power lines or high-tension

lines or laid in an separate, shielded conduit.

•Avoid mechanical impactwhen mounting the F3M-S, orthe

water-resistant properties of the F3M-S will be reduced.

JCLEANING

Do not attempt to clean the F3M-S using paint thinner, to avoid

damaging the surface ofthe F3M-S.

JPOWER SUPPLY

If a standard switching power supply is connected to the F3M-S,

be sure to ground the FG (frame ground) and G (ground)

terminals of the power supply. The F3M-S may malfunction due

to switching noise that will be generated from the power supply if

these terminals are notgrounded.

F3M-S F3M-S

Cat. No. CEDSAX4 11/01 Specifications subject to change without notice. Printed in U.S.A.

OMRONELECTRONICSLLC

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Schaumburg, IL 60173

NOTE:DIMENSIONS SHOWN AREINMILLIMETERS.To convertmillimeterstoinches divideby 25.4.

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