Airflow Sensors Microbridge Mass Airflow OPERATION The microbridge mass airflow sensor op- erates on the theory of heat transfer due to mass airflow directed across the sur- face of the sensing element. Output volt- age varies in proportion to the mass air or other gas flow through the inlet and outlet ports of the package. The microbridge mass airflow sensor has a unique silicon chip based on recent ad- vances in microstructure technology. It consists of a thin-film, thermally isolated bridge structure containing heater and temperature sensing elements. The bridge structure provides a sensitive and fast response to the flow of air or other gas over the chip. Dual sensing elements flanking a central heating element allow the indication of direction of flow as well as rate of flow. Laser trimmed thick film and thin film resistors result in consistent sensitivity from one device to the next. A specially designed housing precisely directs and controls the airflow across the sensing microstructure. It is easily mount- ed to printed circuit boards. AWM Series Microbridge Mass Airflow sensors will not sense liquid flow, and may be damaged by high velocity liquid flowing through the sensor. The microbridge mass airflow sensor us- es temperature-resistive films laminated within a thick film of dielectric material. These are suspended in the form of two bridges over an etched cavity in the sili- con, as shown. The chip is located in a precisely dimensioned airflow channel to provide a reproducible flow response. Highly effective thermal isolation for the heater and sensing resistors is attained by the etch cavity air space beneath the flow sensor bridges. The small size and thermal isolation of the microbridge mass airflow sensor are responsible for the re- markably fast response and high sensitiv- ity to flows. 52 Honeywell MICRO SWITCH Sensing and Control Mi 45514630 0021183 313 @ AWM Series FEATURES @ State-of-the-art silicon micromachining @ Sensitive to low flows 0.1 sccm to 20 LPM e Adaptable for use with higher flows @ Fast response time Analog output Low power consumption Repeatable response Laser-trimmed interchangeability Accurate, low cost sensing In-line printed circuit board terminals e Standard .100 mounting centers Accurate sensing of low pressure 0.001 to 2 H,O (.003 to 5mBar) APPLICATION @ Damper control for heating, ventilation, and air conditioning systems @ Gas analyzers @ Low vacuum control @ Process contro! @ Medical respirators and spirometers @ Demand oxygen supply @ Anesthesia control @ Gas metering For application help: call 1-800-537-6945.Airflow Sensors Microbridge Mass Airflow FEATURES Bidirectional sensing capability @ Actual mass air flow sensing The AWM2000 series microbridge mass airflow sensor is a passive device com- prised of two Wheatstone bridges: one for closed loop heater control, and one for the twin sensing elements. Figures 1 and 2 indicate the additional circuitry neces- sary for proper operation of the sensor. The heater control circuit in Figure 1 is re- quired for operation per specification. Itis uniquely adapted to the flow sensor and provides an output proportional to mass flow by minimizing errors due to ambient temperature changes. The circuit is de- signed to keep the heater temperature at a constant differential above ambient air temperature under varying temperature and air flow. Ambient temperature is sensed by a similar heatsunk resistor on the chip. This mode of heater operation also reduc- es, but does not eliminate, the effects of changes in air such as density or gas composition. These changes could alter thermal conductance and otherwise change operating characteristics of the heater and sensing resistances. Figure 1 Heater Control Circuit OVs (10 VOC) PIN2 + R3 R4 (Vv) V4LMI24 WA AAA AWM 2000 Series Figure 3 Optional Differential Instrumentation Amplifier Interface For Sensing Bridge R2s OPIN 1 RIZ feum>!_ vo Figure 2 Sensing Bridge Supply Circuit #24.9K +Vg (10 mee *500 *USE TRIMPOT TO BALANCE Vs PIN 2 AND Ys PIN 6 RESISTANCE PIN 6 *24.9K The sensing bridge supply circuit in Fig- ure 2 is also required for operation per specification. This is a conventional Wheatstone bridge circuit where the dual sensing resistors make up the two active arms ofthe circuit. The ratiometric voltage output of the device corresponds to the differential voltage across the Wheat- stone bridge circuit. As the direction of the airflow through the device is reversed, the polarity of the differential voltage goes negative, as does the voltage output of the microbridge mass airflow sensor. The differential instrumentation amplifier in Figure 3 is a useful interface for the sensing bridge, as it can be used to in- crease the gain and to introduce voltage offsets to the sensor output. mm 4551830 0021184 25T = For application help: call 1-800-537-6945. Rez - RS R4 I/4LMI24 Aa AAA PIN 6 + (V2) +VS RS VOFFSET RE Vox | ZRethi R4 VoVy }) +Votfset 0 ovi Ri Rg Rg here Votfset=Vg { where Vo 8 {Re 4R Dust contamination is possible in some airflow applications, but can be mini- mized. Dust particles in the air stream flow past the chip parallel to its surface. In ad- dition, the microstructure is kept clean by athermophoretic effect, which impels mi- crometre-sized dust particles away from the structure. In an accelerated operating life test, with less than 50 sccm flow, a life- time equivalent to over 20 years in a typ- ical industrial air environment was achieved with no degradation of sensor response. Rt nO) Clogging due to dust adherence to chip edges and channel surfaces can be com- pletely prevented for low flow applica- tions by the use ofa simple filter. The opti- mum filtering action is obtained with the small cross-section and high flow imped- ance of the channel relative to a low series impedance of the filter. This permits a large accumulation of dust in the filter without significant change in the com- bined impedance. A disposable five-mi- cron filter used in series upstream is ade- quate where filtering is desired. Honeywell MICRO SWITCH Sensing and Control 53Airflow Sensors Microbridge Mass Airflow/Unamplified AWM2000 ORDER GUIDE ACCURACY SPECIFICATIONS at 10.0+ 0.01 VDC AWM2000 Series AWM2100V AWM2150V AWM2200V AWM2300V Flow Range (Full Scale)/ | +200 sccm/ +30 SCCM/ Pressure Range (psi) +.2H,O0 (.SmBar) | +.05H,O +60 sccm (+20 sccm)/ | 1000 sccm/ (.12mBar) +2.0" H,O (.5mBar) +1.3 +.1"H,0 (3.2mBar) Output Voltage @ Trim Point 30 mV @ 100 sccm | 2.5 mV @ 5 sccm 20 mV @ 2 H,0 50 mV @ 650 sccm Null Voltage Shift, Typ. +25 to 85C +0.14 mV ++0.14 mV +0.05 mV +0.14 mV Output Voltage Shift 25 to +25C +2.5% Reading +2.5% Reading +22.0% Reading +5% Reading (Note 4) 25 to 85C -2.5% Reading 2.5% Reading 22.0% Reading -15% Reading (Note 4) Repeatability & +0.35% Reading +0.35% Reading +0.35% Reading max. | +1% Reading Max Hysteresis max. (Note 3) Min. Typ. Max. Excitation (VDC) 8.0 10+.01 15 (Note 2) Power Consumption (mW) _ 30 Null Voltage (mV) -1.0 0.0 +1.0 Response Time (msec) | _ 3.0 Max. Common Mode Pressure (psi) _ 1.0 25 Sensor Resistance (Kohm) Pin 2-Pin 1, Pin6-Pin 1 | 5 _ Sensor Current (mA) Pin 2-Pin 1, Pin6-Pin1 | _ 0.6 Temperature Range Operating -25 to +85C (-13 to +185F) Storage 40 to +90C (-40 to +194F) Termination (.100 centers) 0.025 square Weight (grams) 10.8 Shock Rating (6 drops, 6 axes) 100 g peak Notes: 1. Output Voltage is ratiometric to supply Voltage. Ratings are based on LM124 op-amp. 2. Temperature shifts in the differential pressure devices are mostly due to the density change of the gas over temperature. Temperature shifts in the massflow devices are due to the change of the second order TCR coefficient of thin-film and thick- film resistors over temperature. OUTPUT FLOW VS INTERCHANGEABILITY AWM2100V AWM2150V AWM2200V AWM2300V Flow NOM TOL** Flow NOM TOL** Press NOM TOL** Flow NOM TOL** sccm mV +mV sccm mV +mvV inH,O mV =mV sccm mV +mV 200 44.50 4.25 30 14 2.5 4.00 31.75 3.50 1000 55.50 3.70 150 38.75 3.00 20 9.5 15 3.00 26.75 2.50 s00 52.90 35 100 30.00 1.5 10 5 1.5 2.00 20.00 1.2 650 50.00 2.50 50 16.50 2.50 5 25 1.0 1.00 11.20 1.80 400 42.50 3.00 QO 0.00 1.0 4 2 1.0 0 0.00 1.0 200 29.20 3.20 -50 -16.50 4.50 3 1.5 1.0 1.00 -11.20 3.00 0 0.00 1.00 -100 -30.00 5.00 2 1.0 1.0 -2.00 -20.00 3.30 -200 -28.90 15.00 150 -38.75 7.65 1 0.5 0.8 3.00 -26.75 5.30 -400 -41.20 26.00 -200 44.50 9.75 0 0 0.6 4.00 -31.75 7.00 -600 -48.20 29.50 -800 -52.20 32.50 -1000 -55.00 36.00 **The unique design of the microbridge mass airflow sensor can accommodate your special applications requirements. Custom laser-trimming and flow channel dimensioning can conform performance characteristics to specific applications. Please contact the Application Center. Note: Do not exert a force greater than 10 Ibs. on the flow ports (Py and Po) in any direction. 54 Honeywell e MICRO SWITCH Sensing and Control M@ 4551830 0021145 154 For application help: call 1-800-537-6945.Airflow Sensors AWM2000 Series Microbridge Mass Airflow OUTPUT FLOW VS INTERCHANGEABILITY - Continued AWM2100V AWM2200V AWM2300V OUTPUT VOLTAGE VS FLOW OUTPUT VOLTAGE VS FLOW OUTPUT VOLTAGE VS FLOW co REFERENCED TO NULL VOLTAGE REFERENCED TO MULL VOLTAGE REFERENCED TO NUL. VOLTAGE so Yt =H 40 40 30 8 20 g 2 S oO BS Oo 5 ~0 8 = = -20 & zg -20 30 2 =a 5 40 ~s0 5 -0 60 -200 -0 o 100 200 MASS - FLOW (SCCM) NOMINAL 80 - MIN/MAX ~100 nh -2 2 + al O28 -06 O4 -O7 0 0.2 4 06 O08 1 DIFFERENTAL PRESSURE (INCHES OF WATER) = ___ nominal MASS - FLOW (SCCM) === MINZMAX (THOUSANDS) a NN MOUNTING DIMENSIONS (For reference only) AWM2150V 20 TYPICAL RESPONSE. 12,7 30 20 1S (3) 0 06 = 3 10 20 5,1 2 (2) 30 214 .20 0 40 2 20 % 0 FLOW (sem) 15 06 NOTE: Positive flow direction is defined as proceding from Port 1 (P1) to Port 2 (P2) and results in positive output (PIN 6 > PIN 2). Negative flow direction is de- fined conversely and results in negative ouput (PIN 6 < PIN 2). Mm 4551830 0021146 Oec For application help: call 1-800-537-6945. Honeywell e MICRO SWITCH Sensing and Control 55Airflow Sensors Microbridge Mass Airflow/Amplified FEATURES e Laser trimmed for interchangeability @ Flow sensing up to 1.0 LPM Two Wheatstone bridges control airflow measurement one provides closed loop heater control, the other contains the twin sensing elements. Figure 1 depicts the heater control circuitry. It minimizes er- rors due to ambient temperature changes by providing an output proportional to mass flow. The circuit keeps the heater temperature at a constant differential above ambient air temperature, despite variations in airflow and temperature. The heater circuitry, operational amplifier, and precision thick-film resistors are lo- cated on the ceramic substrate. Ambient temperature is sensed by a similar heat- sunk resistor on the chip. This mode of heater operation also reduc- es, but does not eliminate, the effects of changes in air density or gas composi- tion. These changes could alter thermal conductance and otherwise change op- erating characteristics of the heater and sensing resistances. The sensing bridge supply circuit in Fig- ure 2 is a conventional Wheatstone bridge circuit where dual sensing resis- tors make up the two active arms of the circuit. The ratiometric voltage output of the device corresponds to the amplified differential voltage across the Wheat- stone bridge circuit. The supply circuit, along with the differen- tial instrumentation amplifier shown in Figure 2 are designed into the sensor package and are precision laser adjusted during manufacture. Active laser trim- ming, combined with short signal paths, results in excellent noise resistance, repeatability, and sensor interchange- ability. Dust contamination is possible in some airflow applications, but can be mini- mized, Dust particles in the airstream flow past the chip parallel to its surface. In ad- dition, the microstructure is kept clean by a thermophoretic effect, which impels the micrometer-sized dust particles away from the structure. In an accelerated op- erating life test, with less than 50 sccm flow, a lifetime equivalent to over 20 years in atypical industrial air environment was achieved with no degradation of sensor response. Figure 1 Heater contro! circuit veo T PIN 2 RI? Sk a Rb Ro Sk 5000, RB 182k Ly 4 A 1800.2 Rh S00n MAI oa Ra PIN 3 Figure 2 AWM3000 Series Clogging due to dust adherence to chip edges and channel surfaces can be sub- stantially eliminated through the use of a simple filter. The optimum filtering action is obtained with a low impedance filter in series with the small cross-section and high flow impedance of the channel. This permits a large accumulation of dust in the filter without significant change in the combined impedance. Where filtering is desired, a disposable five-micron filter may be used upstream of the flow sensor. Sensing bridge supply circuit and differential instrumentation amplifier vi San 2 SENSING | ___ BRIDGE TON BOARD AMPLIFIER {ON BOARD) me 4551830 0021187 Tb ma 56 Honeywell e MIGRO SWITCH Sensing and Control PIN 1 Vout Ri2 100k Au 10K < = PIN 3 For application help: cai! 1-800-537-6945.Airflow Sensors Microbridge Mass Airflow/Amplified AWM3000 ORDER GUIDE ACCURACY SPECIFICATIONS at 10.0 0.01 VDC Flow Range (Full Scale)/ Pressure Range (psi) AWM3000 Series AWM3100V AWM3150V AWM3200V AWM3300V +200 sccm/+.2" | 30 scem/+1"H,O | +2.0 H,O (5mBar) +1000 scom/+1.3 +.1" H,O (.5mBar) (.12mBar) H,O (3.2mBar) Output Voltage @ Laser | 5 VDC @ 200 1.5 VDC @5sccm |5VDC @ 2H,0 5 VDC @ 1000 sccm Trim Point scem Null Voltage 1.00+.05 VDC 1.00+.10 VDC 1.00+.08 VDC 1.00+.10 VDC Null Voltage Shift +25 to +85C +25mV +100mV +25mV +25mvV +25 to -25C +25 mV +100 mV +25 mV +25 mV Output Voltage Shift 25 to -25C -4.0% Reading +5% Reading +24.0% Reading -5.0% Reading (Note 4) 25 to 85C +4.0% Reading +5% Reading -24.0% Reading +5.0% Reading (Note 4) Repeatability & +0.50% Reading | +1% Reading +0.50% Reading max. +1% Reading max. Hysteresis max. Min. Typ. Max, Excitation (VDC) 8.0 10+.01 15 (Note 2) Power Consumption (mW) _ 30 50 Response Time (msec) | 1.0 3.0 (Note 1) Max. Common Mode Pressure (psi) _ _ 25 Temperature Range Operating 25 to + 85C (-13 to +185F} Storage -40 to +90C (-40 to +194F) Termination (.100 centers) 0.025 square Weight (grams) 10.8 Shock Rating (5 drops, 6 axes) 100 g peak Notes: 1. Initial warmup time for signal conditioned circuitry is 1 minute max. 2. Output Voltage is ratiometric to supply voltage. 3. Repeatability and Hysteresis tolerances reflect inherent inaccuracies of the measurement equipment. 4. Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature. Temperature shifts in the massflow devices are due to the change of the second order TCR coefficient of thin-film and thick-film resistors over temperature, plus shifts in Op Amp. OUTPUT FLOW VS. INTERCHANGEABILITY AWM3100V AWM3150V * * AWM3200V AWM3300V Flow Nominal Tol. Flow Nominal Tol. Press Nominal Tol. Flow Nominal Tol. sccm VDC +VDC sccm VDC +VDG in. HO VDC +VDC sccm VDG +VDG 200 5.00 0.15 30 3.75 .70 2.00 5.00 0.15 1000 5.00 0.15 175 4.80 0.16 20 2.90 .45 1.75 4.59 0.15 900 4.90 0.16 150 4.50 0.17 10 1.95 .20 1.50 4.16 0.16 800 4.80 0.17 125 4.17 0.18 5 1.50 10 1.25 3.70 0.20 700 4.66 0.18 100 3.75 0.19 4 1.40 08 1.00 3.25 0.22 600 4.42 0.19 75 3.27 0.19 3 1.30 08 0.75 2.65 0.22 500 4.18 0.20 50 2.67 0.17 2 1.20 o7 0.50 2.15 0.19 400 3.82 0.21 25 1.90 0.13 1 1.10 06 0.25 1.55 0.11 300 3.41 0.19 0 1.00 0.05 0 1.00 05 0.00 1.00 0.08 200 2.96 0.17 100 2.30 0.14 0 1.00 0.10 5. The unique design of the microbridge mass airflow sensor accommodates your special requirements. Custom laser-trimming and flow channel dimensioning can conform performance characteristics to specific applications. For application heip: call 1-800-537-6945. We 4551830 00211488 ITS Honeywell #e MICRO SWITCH Sensing and Control 57Airflow Sensors AWM3000 Series Microbridge Mass Airflow/Amplified OUTPUT CURVES AWM3100V AWM3200V AWM3300V QUTPUT VOLTAGE vs MASSFLOW QUTPUT VOLTAGE vs PRESSURE OUTPUT VOLTAGE vs MASSFLOW 6 6 6 8 6 8 5 6 T 4 T 4 tT, P P Pp u 3 v 38 v 3 v2 i v2 v2 D, Dd, Dp, cS c Cc % 26 30 7 00 2s 150 175 200 5 O28 os 0.75 1 125 ve 176 2 5 100 200 309 400 600 600 700 goo gpg 1000 MASSFLOW (Scom) DIFFERENTIAL PRESSURE ("H20) MASSFLOW (Scom) NOM. ~~~ MIN/MAX Nom. cote MIN/MAX NOM. ooo> MIN/MAX MOUNTING DIMENSIONS (For reference only) AWM3150V belied . 7 50 43 07 g 2 Oe 5.1 3 , 1 54,4 8,3 25 8,4 o 10 5 20 25 30 3s f 3,6 33 T a PN ESF) [RES | 71 l l S15 23,4 Pic ! 1.24 4 45 1,0 g2 5,1 NI 2,8 | fo4 tr I } [-20 SS A OUTPUT CONNECTIONS 4273 i , 0.8R T ,! Pin 1 Output Voltage ol (2.512) oar TYP 0,63 + Pin 2 + Supply Voltage 70 L115 025 16 Pin3 Ground _[L.0.6313)| | -06 " 25 ose 12,7 | -29 NOTE: Positive flow direction is defined 50 as proceeding into Port 1 (P1) and out of 04 BS p 9 U ) 30,5 , Port 2 (P2), and results in positive output. 1.20 61 MB 45514830 0021189 431 = 58 Honeywell e MICRO SWITCH Sensing and Control For application help: call 1-800-537-6945.Airflow Sensors High Flow Mass Airflow/Amplified In-Line Flow Measurement AWM5000 Series Microbridge Mass Air- flow Sensors feature a venturi type flow housing. They measure flow as high as 20 standard liters per minute (SLPM) while inducing a maximum pressure drop of 2.25 H,O. The microbridge chip is in di- rect contact with the flow stream, greatly reducing error possibilities due to orifice or bypass channel clogging. Rugged, Versatile Package The rugged plastic package has been de- signed to withstand common mode pres- sures up to 50 psi, and the small sensing element allows 100 gs of shock without compromising performance. The ports are separate moldings which can be modified for alternative fittings with a mini- mum of tooling cost or performance im- pact. The snap-in AMP compatible connector provides reliable connection in demanding applications. On-board Signal Conditioning Each AWM5000 sensor contains circuitry which performs ampilificatiion, lineariza- tion, temperature compensation, and gas calibration. A 1 to & VDC linear output is possible for all listings regardless of flow range (5, 10, 15, or 20 SLPM) or calibra- tion gas (nitrogen, carbon dioxide, ni- trous oxide, or argon). All calibration is performed by active laser trimming. Two Wheatstone bridges control airflow measurement - one provides closed loop heater control, the other contains the twin sensing elements. Heater control circui- try is shown in Figure 1. The circuit keeps the heater temperature at a constant dif- ferential above ambient air temperature, despite variations in airflow and temper- ature. The heater circuitry, operational amplifier, and precision thick-film resis- tors are located on the ceramic substrate. Ambient temperature is sensed by a simi- lar heatsunk resistor on the chip. FEATURES Variety of flow connections possible @ Venturi design @ Remote mount Active laser trimmed to COg, No or ar- gon calibration Figure 1 AWM5000 Series Heater control, sensing bridge supply circuit and differential instrumentation amplifier circuits voc R2 14 j2 HEATER CONTROL CIRCUIT ql 13 R4 < z s AAA, NOMINAL VALUES a Ri- 3.3K R2= 5.0K R3 + 182K R4 = 24.9K RAS = 24.9K A7 = 200K R&* 32K RO + 9.0K R10 = 1.0K RIS Rit = 10K 2 Vout R12 = 400K 1 R13 = 3.5K 5 Wr Rt4 + SK R15 = SK oD a AAA, v a 5 SENSOR BRIDGE CIRCUIT Ri VCC - PIN 4 GND - PINI This mode of heater operation also reduc- es, but does not eliminate, the effects of changes in air density. These changes could alter thermal conductance and oth- erwise change operating characteristics of the heater and sensing resistance. See Notes. The sensing bridge supply circuit in Fig- ure 1is aconventional Wheatstone bridge circuit where dual sensing resistors make up the two active arms of the circuit. The ratiometric voltage output of the device corresponds to the amplified differential voltage across this Wheatstone bridge circuit. Circuitry in Figure 1 is designed into the sensor package and is precision laser ad- justed during manufacture. Active laser trimming, combined with short signal paths, results in excellent noise resist- ance, repeatability, and sensor inter- changeability. MM! 45514630 0021190 Ss3 For application help: call 1-800-537-6945. HIGH FLOW MICROBRIDGE LINEAR CIRCUIT Ri6 = 400K R17 = 400K R18 = 9K R19 = 1K Ra 600 Rb = 3.0K Re = 1.0K Re - 6.0K Rh 800 Ru = 1.6K Rd > 1.5K Particulate contamination is a concern in some applications. Failure due to partic- ulate impact can be substantially elimi- nated through the use of a simple filter. The optimum filtering action is obtained with the low impedance filter in series with the flow sensor. This permits accumula- tion of dust in the large diameter of a filter without significant change in the com- bined impedance of the system. We rec- ommend locating a five-micron filter up- stream of the device. Honeywell MICRO SWITCH Sensing and Control 59Airflow Sensors High Flow Mass Airflow/Amplified SPECIFICATIONS AWM5000 Series PRESSURE vs. AIRFLOW Recommended power supply (1) 10 +.01 VDC ae ena Minimum power supply 8.0 VDC Maximum power supply 15 VDC *r Power consumption 100 mW max. 1st Output type Linear, 1 to 5 VDC Calibration gas Suffix VA = Argon Suffix VC = COo, Carbon dioxide: N,O, Nitrous Oxide Suffix VN = No, Nitrogen: O,, Oxygen Gas flow range* AWM5101 0-5 SLM AWM5102 = 0-10 SLM AWM5103 =0-15 SLM AWM5104 0-20SLM Output @ laser trim point 5 VDC @ Full Scale Flow Differential pressure @ full scale See Pressure vs. Airflow Chart N ull output 1.00+0.05 VDC N ull output shift, -20 to +70"C +.050 VDC typ., +.200 VDC max. Full scale output shift Suffix VA or VN +7.0% Reading, VC +10.0% Reading -20 to +25C, +20 to 70C Linearity error (2) +3.0% Reading R epeatability & Hysteresis +0.5% Reading R esponse time 60.0 msec max. Temperature range 20 to +70C (4 to + 158F) Termination (0.100 centers) 0.025 square Connector (4 pin receptacle) (3) AMP (103956-3) or Micro Switch (8S12143) Weight 60 grams (2.12 oz) Shock rating 100 g peak, 6 msec half-sine (3 drops, each direction of 3 axes) Maximum common mode pressure 50 psi max. Leak rate, max. 0.1 psi/min. at static condition. See note 4 1. 2. 3. * Cannot guarantee calibration at supply voltages other than 10.00 +0.01 VDC. Linearity specification applies from 2 to 100% full scale of gas flow range, and does not apply to nuil output at O SLM. Supplied in strip form. Other strip form receptacles are available, as well as various tools to assemble receptacles in strip form. Individual receptacle assemblies are also available from Amp. . The 5000 series product has a leakage spec of less than 0.1 psi per minute at 50 psi internal pressure. If during installation, the end adapters are twisted with respect to the flowtube, this will break the seal between the o-ring and the flowtube and cause a small temporary leak. This leak might be as high as 1psi or might remain in specification. it will self-heal as the o-ring takes a new set. About 85% of the temporary leak will be gone in 24 hours. In 48 hours complete recovery will take place. SLM denotes standard liters per minute which is a flow measurement referenced to standard conditions of 0C, 760 torr (sea level), 50% RH. Mm 4551830 0021191 45T 60 Honeywell e MICRO SWITCH Sensing and Conitroi 0 L 1 1 10 15 20 28 Airflow (SLM} AWM5101V CHARACTERISTICS 1-5 VDC Linear Output QUTFUT VOLTAGE (var) AIRFLOW (SLM) +/- 3% Reading _ Mean Min, AWM5102V CHARACTERISTICS 1-5 VDC Linear Output OUTPUT VOLTAGE (vOor 6 1 2 3 4 5 6 7 & 9 10 AIRFLOW [SLM +/- @% Reading ~ Mean oo Min, AWM5103V CHARACTERISTICS 1-5 VDC Linear Ouptut 6 QUTPUT VOLTAGE (Vdc) 0.0 25 5.0 10.0 AIRFLOW (SLM) +/- 8% Reading Mean Min, AWM5104V CHARACTERISTICS 1-5 VDC Linear Output Maz. OUTPUT VOLTAGE (vac! 6 a0 26 5.0 78 10.0 AIRRLOW [SLU 12.6 +/- 3% Reading Mean Min For application help: call 1-800-537-6945.Airflow Sensors High Flow Mass Airflow/Amplified AWM5000 ORDER GUIDE alog g Flow Range AWM5101VA 5 SLPM, Argon calibration AWM5101VC 5 SLPM, CO, calibration (2) AWMS5101VN 5 SLPM, No calibration (1) AWM5102VA 10 SLPM, Argon calibration AWM5102VG 10 SLPM, CO calibration (2) AWM5102VN 10 SLPM, No calibration (1) AWM5103VA 15 SLPM, Argon calibration AWM5103VC 15 SLPM, COo calibration (2) AWM5103VN 15 SLPM, No calibration (1) AWM5104VA 20 SLPM, Argon calibration AWM5104VC 20 SLPM, COo calibration (2) AWM5104VN 20 SLPM, Na calibration (1) CONNECTOR ORDER GUIDE Catatog Listing $$12143 Description Electrical connector (prototype quantities only) Connectors use Amp 103956-3, Molex 14-56-2042 NOTE: All listings have 1 - 5 VDC linear output with 10 VDC supply over given flow range for a given gas. 1. No calibration is identical to Oo and air calibration. 2. COz calibration is identical toN5O calibration. OUTPUT CONNECTIONS Pint + Supply voltage Pin2 Ground Pin3 No connection Pin 4 Output voltage Flow direction indicated on housing MOUNTING DIMENSIONS (for reference only) SEAL (MS28775016) 474 NPT (SNAP ON FITTING) MH 4551830 0021192 3cb For application help: call 1-800-537-6945. AWM5000 Series Honeywell e MICRO SWITCH Sensing and Contro! = 61