D6F50A7D0000 - OMRON - Datasheet.Directory

D6F-A7D/-AB71D

MEMS Flow Sensor

Digital Compensation for High

Accuracy

•Temperature compensation and linear compensation produce

high accuracy (±3% RD (25% to 100% FS)).

•Compact models for 10 to 70 L/min.

•Reduced piping work with quick-fastening feature.

Ordering Information

MEMS Flow Sensor

Accessories (Sold separately)

Note: Refer to Accessories for the D6F Series on page 39.

Connections

D6F-10A7D-000-0

D6F-20A7D-000-0

D6F-50A7D-000-0

D6F-70AB71D-000-0

Output Characteristics

D6F-10A7D-000-0

Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temper-

ature 25±5°C and ambient humidity 35 to 75%RH.

Flow rate = (Output value - 1,024)/60,000 x 10

D6F-20A7D-000-0

Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temper-

ature 25±5°C and ambient humidity 35 to 75%RH.

Flow rate = (Output value - 1,024)/60,000 x 20

D6F-50A7D-000-0

Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temper-

ature 25±5°C and ambient humidity 35 to 75%RH.

Flow rate = (Output value - 1,024)/60,000 x 50

D6F-70AB71D-000-0

Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temper-

ature 25±5°C and ambient humidity 35 to 75%RH.

Flow rate = (Output value - 1,024)/60,000 x 100

RoHS Compliant

Refer to the Common Precautions for the D6F Series on page 40.

Joint Applicable fluid Flow rate range Model

Quick joint P10 Air

0 to 10 L/min D6F-10A7D-000-0

0 to 20 L/min D6F-20A7D-000-0

0 to 50 L/min D6F-50A7D-000-0

Quick joint P14 0 to 70 L/min

D6F-70AB71D-000-0

Type Model

Cable D6F-CABLE3

Quick fastener D6F-FASTENER-P10

Pipe fittings D6F-PLG1

Enlarged View

1: Vcc

2: SDA3: SCL

4: GND

Pin No. 1: Vcc

2: SDA

3: SCL

4: GND

Connector BM04B-GHS (made by J.S.T. Mfg. Co.)

Use the following connectors for connections to the D6F:

Housing GHR-04V-S (made by J.S.T. Mfg. Co.)

Terminals SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.)

Wires AWG26 to AWG30

Flow rate

L/min (normal) 0246810

Output

(HEX)

1024

(0400)

13024

(32E0)

25024

(61C0)

37024

(90A0)

49024

(BF80)

61024

(EE60)

Flow rate

L/min (normal) 04812 16 20

Output

(HEX)

1024

(0400)

13024

(32E0)

25024

(61C0)

37024

(90A0)

49024

(BF80)

61024

(EE60)

Flow rate

L/min (normal) 010 20 30 40 50

Output

(HEX)

1024

(0400)

13024

(32E0)

25024

(61C0)

37024

(90A0)

49024

(BF80)

61024

(EE60)

Flow rate

L/min (normal) 020 40 60 70

Output

(HEX)

1024

(0400)

13024

(32E0)

25024

(61C0)

37024

(90A0)

43024

(A810)

Flow rate (L/min)

70000

60000

50000

40000

30000

20000

10000

2081064

Output (Count)

Flow rate (L/min)

70000

60000

50000

40000

30000

20000

10000

015 20105

Output (Count)

Flow rate (L/min)

70000

60000

50000

40000

30000

20000

10000

10040 503020

D6F-10A7D-000-0 D6F-20A7D-000-0

D6F-50A7D-000-0

Output (Count)

Flow rate (L/min)

50000

40000

30000

20000

10000

100407050 603020

D6F-70AB71D-000-0

D6F-A7D/-AB71D MEMS Flow Sensor

Characteristics/Performance

Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.

Note: 2. Dry gas (must not contain large particles, e.g., dust, oil, or mist.)

Note: 3. -10 ≤ Operating Temperature ≤ 60°C

Note: 4. Reference (typical)

Note: 5. Refer to the D6F-@@@@D-000-@ Application Notes for details.

Note: 6. With no condensation or icing.

Note: 7. The following custom options are available.

Ask your OMRON representative for details.

- Temperature measurement

- Address settings (up to four addresses)

- Fault detection

- Threshold setting

Communication

Model D6F-10A7D-000-0 D6F-20A7D-000-0 D6F-50A7D-000-0 D6F-70AB71D-000-0

Flow Range (See note 1.) 0 to 10L/min 0 to 20 L/min 0 to 50 L/min 0 to 70 L/min

Calibration Gas (See note 2.) Air

Flow Port Type Quick joint P10 Quick joint P14

Electrical Connection Four-pin connector

Power Supply 3.0 to 3.6 VDC

Current Consumption 10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25°C

Resolution 15 bit

Accuracy (See note 3.) ±5%RD (10%F.S. ≤ Flow rate < 25%F.S.)

±3%RD (25%F.S. ≤ Flow rate ≤ 100%F.S.)

±5%RD (10L/min ≤ Flow rate < 20L/min)

±3%RD (20L/min ≤ Flow rate ≤ 70L/min)

Response time 90 ms max.

Repeatability (See note 4.) 0.3 %RD 0.3%RD 0.5%RD 1.3%RD

Interface (See note 5.) I2C

Case PPS

Degree of Protection IEC IP40 (Excluding tubing sections.)

Withstand Pressure 100 kPa

Pressure Drop (See note 4.) 0.034 kPa 0.083 kPa 0.28 kPa 0.57 kPa

Operating Temperature (See note 6.) –10 to +60°C

Operating Humidity (See note 6.) 35 to 85%RH

Storage Temperature (See note 6.) –30 to +80°C

Storage Humidity (See note 6.) 35 to 85%RH

Insulation Resistance Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)

Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)

Weight 57.3 g 64.4 g

Serial Interface I2C

Master/Slave Slave / Address: HEX : 0x6C

BIN : 110_1100 (7bit)

Speed mode Fast Mode 400kHz

Signal

SCL Serial Clock

SDA Data Signal

D6F-A7D/-AB71D MEMS Flow Sensor

Dimensions (Unit: mm)

(4.4)

(60.6)

(34.9)

(7.9)

84.6

±0.5

17±0.5 dia.

20±0.5 dia.

(66.6)

±0.5

Note

CROSS A-A (B-B)

13 dia.

+0.1

-0.05

0.9

±0.5

±0.15

30°

Note 1. Note . The Port type of pipe fitting based on “Quick Joint P10 Type”.

* P10 shows the name of an O-ring prescribed by JIS B 2401.

* The port of O-ring ditch is based on P10 of JIS B 2406.

* Please obtain a male joint separately.

Note 2. Use the following connectors to connect to the Sensor.

Connector :GHR-04V-S (JST)

Terminals :SSHL-002T-P0.2 (JST)

Wires :AWG26 to AWG30

Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND

Lot No. Display

C0.5 (circumference)

R2 (circumference)

If using a Rc3/8 converter joint, the following is recommended.

REGAL JOINT CO., LTD eigyou@rgl.co.jp

Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM10

O ring: O ring P10 fluororubber (material)

9 max.

1.6 max

2.5±0.05

2 min. 2 min.

C0.3

C0.5

R0.4 R0.4

C0.1

2.5 +0.25

-0

CROSS X-X Description Y

12.85±0.05 dia.

20 dia.

17 dia.

max. 10 dia.

-0.05

● MEMS Flow Sensors

D6F-10A7D-000-0

D6F-20A7D-000-0

D6F-50A7D-000-0

Recommended Quick joint male P10 type

Note 1.

The Port type of pipe fitting based on “Quick Joint P14 Type”.

P14 shows the name of an O-ring prescribed by JIS B 2401.

* The port of O-ring ditch is based on P14 of JIS B 2406.

* Please obtain a male joint separately.

Note 2. To mount the Sensor with 2.6-dia. holes, use P-type

self-tapping screws with a nominal diameter of 3 mm and

tighten them to a torque of 1.2 N·m max.

The screw threads must engage for 5.5 mm min.

Note 3. Use the following connectors to connect to the Sensor.

Connector :GHR-04V-S (JST)

Terminals :SSHL-002T-P0.2 (JST)

Wires :AWG26 to AWG30

Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND

(4.4)

(34.8)

(7.9)

25.8

±0.2

30.9

±0.5

84.6

±0.5

(64.5)

(66.6) (60.6)

±0.5

20.5

±0.2

20.5

±0.2

25.8

±0.2

±0.5

Note 1

Lot No. Display

2-2.6 dia. Depth 6.5

CROSS A-A (B-B)

22±0.5 dia.

26±0.5 dia.

18 dia.

+0.1

-0.05

0.9

±0.5

±0.15

30°

Two, 4

±0.1

dia.

Recommended

Installation

Dimensions

from back side

(See note 2.)

C0.5 (circumference)

R2 (circumference)

C0.3

C0.5

R0.4 R0.4

C0.1

If using a Rc3/8 converter joint, the following is recommended.

REGAL JOINT CO., LTD eigyou@rgl.co.jp

Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM14

O ring: O ring P14 fluororubber (material)

9 max.

1.6 max

2.5±0.05

2 min. 2 min.

2.5 +0.25

-0

CROSS X-X Description Y

17.85±0.05 dia.

26 dia.22 dia.

max.

14 dia.

-0.05

D6F-70AB71D-000-0

Recommended Quick joint male P14 type