ADXL1003BCPZ-RL7 - ANALOG DEVICES

Low Noise, Wide Bandwidth,

MEMS Accelerometer

Data Sheet ADXL1003

Rev. 0 Document Feedback

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FEATURES

Single, in plane axis accelerometer with analog output

Full-scale range: ±200 g

Linear frequency response range: dc to 15 kHz typical

(3 dB point)

Resonant frequency: 28 kHz typical

Ultralow noise density: 45 μg/√Hz

Overrange sensing plus dc coupling allows fast recovery time

Complete electromechanical self test

Sensitivity performance

Sensitivity stability over temperature within ±5%

Linearity to ±0.2% of full-scale range

Cross axis sensitivity: ±1%/±0.8% (z-axis acceleration

effect on x-axis, y-axis acceleration effect on x-axis)

Single-supply operation

Output voltage ratiometric to supply

Low power consumption: 1.0 mA typical

Power saving standby operation mode with fast recovery

RoHS compliant

−40°C to +125°C operating temperature range

32-lead, 5 mm × 5 mm × 1.8 mm LFCSP package

APPLICATIONS

Condition monitoring

Predictive maintenance

Asset health

Test and measurement

Health usage monitoring systems (HUMSs)

Acoustic emissions

FUNCTIONAL BLOCK DIAGRAM

TIMING

GENERATOR

ADXL1003

OUT

SENSOR

MOD AMP

SELF TEST

ST V

OUTPUT

AMPLIFIER

DEMOD

OVERRANGE

DETECTION

STANDBY

16596-001

Figure 1.

GENERAL DESCRIPTION

The ADXL1003 delivers ultralow noise density over an

extended frequency range and is optimized for bearing fault

detection and diagnostics. The ADXL1003 has typical noise

density of 45 μg/√Hz across the linear frequency range.

Microelectronicmechanical systems (MEMS) accelerometers

have stable and repeatable sensitivity, and are immune to

external shocks of up to 10,000 g.

The integrated signal conditioning electronics enable such

features as full electrostatic self test (ST) and an overrange (OR)

indicator, useful for embedded applications. With low power

and single-supply operation of 3.0 V to 5.25 V, the ADXL1003

also enables wireless sensing product design. The ADXL1003 is

available in a 5 mm × 5 mm × 1.8 mm LFCSP package, and

operates over the −40°C to +125°C temperature range.

ADXL1003 Data Sheet

Rev. 0 | Page 2 of 14

TABLE OF CONTENTS

Features .............................................................................................. 1

Applications ....................................................................................... 1

Functional Block Diagram .............................................................. 1

General Description ......................................................................... 1

Revision History ............................................................................... 2

Specifications ..................................................................................... 3 

Absolute Maximum Ratings ............................................................ 4

Thermal Resistance ...................................................................... 4

Recommended Soldering Profile ............................................... 4

ESD Caution .................................................................................. 4

Pin Configuration and Function Descriptions ............................. 5

Typical Performance Characteristics ............................................. 6

Theory of Operation ........................................................................ 9

Mechanical Device Operation .................................................... 9

Operating Modes ...........................................................................9

Bandwidth ......................................................................................9

Applications Information .............................................................. 10

Application Circuit ..................................................................... 10

On Demand Self Test ................................................................. 10

Ratiometric Output Voltage ...................................................... 10

Interfacing Analog Output Below 10 kHz .............................. 11

Interfacing Analog Output Beyond 10 kHz ............................ 12

Overrange .................................................................................... 13

Mechanical Considerations for Mounting .............................. 13

Layout and Design Recommendations ................................... 13

Outline Dimensions ....................................................................... 14

Ordering Guide .......................................................................... 14

REVISION HISTORY

8/2018—Revision 0: Initial Version

Data Sheet ADXL1003

Rev. 0 | Page 3 of 14

SPECIFICATIONS

TA = 25°C, VDD = 5.0 V, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are guaranteed. Typical

specifications may not be guaranteed.

Table 1.

Parameter Test Conditions/Comments Min Typ Max Unit

SENSOR

Measurement Range ±200 g

Linearity1 Percentage of full-scale ±0.2 %

Cross Axis Sensitivity2 Z-axis acceleration effect on x-axis ±0.8 %

Y-axis acceleration effect on x-axis ±1.0 %

SENSITIVITY (RATIOMETRIC TO VDD)

Sensitivity3 DC 9.2 10 10.8 mV/g

Sensitivity Change Due to Temperature4 T

A = −40°C to +125°C ±5 %

ZERO g OFFSET (RATIOMETRIC TO VDD)

0 g Output Voltage VDD/2 V

0 g Output Range over Temperature5 −40°C to +125°C 2 g

NOISE

Noise Density 100 Hz to 14 kHz

VDD = 5.0 V 45 μg/√Hz

VDD = 3.0 V 80 μg/√Hz

1/f Frequency Corner 0.1 Hz

FREQUENCY RESPONSE

Sensor Resonant Frequency 24 28 kHz

5% Bandwidth6 6.2 kHz

3 dB Bandwidth7 15 kHz

SELF TEST

Output Change (Ratiometric to VDD) ST low to ST high 57 85 mV

Input Voltage Level

High, VIH V

DD × 0.7 V

Low, VIL V

DD × 0.3 V

Input Current 25 μA

OUTPUT AMPLIFIER

Short-Circuit Current 3 mA

Output Impedance <0.1 Ω

Maximum Capacitive Load8 No series resistor 100 pF

With series resistor 22 nF

POWER SUPPLY (VDD)

Operating Voltage Range3 3.0 5.0 5.25 V

Quiescent Supply Current 1.0 1.15 mA

Standby Current 225 285 μA

Standby Recovery Time (Standby to Measure Mode) Output settled to 1% of final value <50 μs

Turn On Time9 <550 μs

OPERATING TEMPERATURE RANGE −40 +125 °C

1 Linearity is tested using sine vibration at 13 kHz.

2 Cross axis sensitivity is defined as the coupling of excitation along a perpendicular axis onto the measured axis output.

3 Parameter limits are based on characterization data or are guaranteed by design.

4 Includes package hysteresis from 25°C.

5 Difference between the maximum and the minimum values in temperature range.

6 Specified as a frequency range that is within a deviation range relative to dc sensitivity. The range is limited by an increase in response due to response gain at the

sensor resonant frequency.

7 Specified as a frequency range that is within a deviation range relative to dc sensitivity. The range is limited by an increase in response due to response gain at the

sensor resonant frequency.

8 For capacitive loads larger than 100 pF, an external series resistor must be connected (minimum 8 kΩ). The output capacitance must not exceed 22 nF.

9 Measured time difference from the instant VDD reaches half its value to the instant at which the output settles to 1% of its final value.

ADXL1003 Data Sheet

Rev. 0 | Page 4 of 14

ABSOLUTE MAXIMUM RATINGS

Table 2.

Parameter Rating

Acceleration

Any Axis, Powered or Unpowered 10,000 g

Drop Test (Concrete Surface) 1.2 m

VDD −0.3 V to +5.5 V

Output Short-Circuit Duration

(Any Pin to Common Ground)

Indefinite

Temperature Range (Storage) −55°C to +150°C

Stresses at or above those listed under Absolute Maximum

Ratings may cause permanent damage to the product. This is a

stress rating only; functional operation of the product at these

or any other conditions above those indicated in the operational

section of this specification is not implied. Operation beyond

the maximum operating conditions for extended periods may

affect product reliability.

THERMAL RESISTANCE

Thermal performance is directly linked to printed circuit board

(PCB) design and operating environment. Careful attention to

PCB thermal design is required.

θJA is the natural convection junction to ambient thermal

resistance measured in a one cubic foot sealed enclosure.

θJC is the junction to case thermal resistance.

Table 3. Package Characteristics

Package Type θJA θ

JC Device Weight

CP-32-261 48°C/W 14.1°C/W <0.2 g

1 Thermal impedance simulated values are based on a JEDEC 2S2P thermal

test board with nine thermal vias. See JEDEC JESD51.

RECOMMENDED SOLDERING PROFILE

Figure 2 and Table 4 provide details about the recommended

soldering profile.

25°C TO PEAK

PREHEAT

CRITICAL ZONE

TL TO TP

TEMPERATURE

TIME

RAMP-DOWN

RAMP-UP

TSMIN

TSMAX

16596-002

Figure 2. Recommended Soldering Profile

Table 4. Recommended Soldering Profile

Profile Feature

Condition

Sn63/Pb37 Pb-Free

Average Ramp Rate (TL to TP) 3°C/sec

maximum

3°C/sec

maximum

Preheat

Minimum Temperature (TSMIN) 100°C 150°C

Maximum Temperature (TSMAX) 150°C 200°C

Time (TSMIN to TSMAX)(tS) 60 sec to

120 sec

60 sec to

180 sec

TSMAX to TL

Ramp-Up Rate 3°C/sec

maximum

3°C/sec

maximum

Time Maintained Above

Liquidous (TL)

Liquidous Temperature (TL) 183°C 217°C

Time (tL) 60 sec to

150 sec

60 sec to

150 sec

Peak Temperature (TP) 240 + 0/−5°C 260 + 0/−5°C

Time Within 5°C of Actual Peak

Temperature (tP)

10 sec to

30 sec

20 sec to

40 sec

Ramp-Down Rate 6°C/sec

maximum

6°C/sec

maximum

Time 25°C to Peak Temperature

(t25°C)

6 min

maximum

8 min

maximum

ESD CAUTION

Data Sheet ADXL1003

Rev. 0 | Page 5 of 14

PIN CONFIGURATION AND FUNCTION DESCRIPTIONS

NOTES

1. NIC = NOT INTERNALLY CONNECTED.

2. DNC = DO NOT CONNECT. LEAVE THIS PIN UNCONNECTED.

3. EXPOSED PAD. THE EXPOSED PAD ON THE BOTTOM OF

THE PACKAGE MUST BE CONNECTED TO GROUND AND

IS REQUIRED FOR BOTH ELECTRICAL AND

MECHANICAL PERFORMANCE.

4. AXIS OF SENSITIVITY IS IN PLANE TO THE PACKAGE

AND HORIZONTAL AS SHOWN.

24 DNC

23 DNC

22 DNC

21 DNC

20 OR

19 DNC

18 DNC

17 DNC

NIC

DNC

STANDBY

NIC

OUT

DNC

ADXL1003

TOP VIEW

(Not to Scale)

+–

16596-003

Figure 3. Pin Configuration

Table 5. Pin Function Descriptions

Pin No. Mnemonic Description

1 to 9, 31, 32 NIC Not Internally Connected.

10, 11, 17 to 19, 21 to

26, 29

DNC Do Not Connect. Leave this pin unconnected.

12 VDD 3.0 V to 5.25 V Supply Voltage.

13, 14, 27, 28 VSS Supply Ground.

15 STANDBY Standby Mode Input, Active High.

16 ST Self Test Input, Active High.

20 OR

Overrange Output. This pin instantaneously indicates when the overrange detection circuit

identifies significant overrange activity. This pin is not latched.

30 XOUT Analog Output Voltage.

EPAD

Exposed Pad. The exposed pad on the bottom of the package must be connected to ground and is

required for both electrical and mechanical performance.

ADXL1003 Data Sheet

Rev. 0 | Page 6 of 14

TYPICAL PERFORMANCE CHARACTERISTICS

100 1k 10k 100k

NORMALIZED AMPLITUDE

(OUTPUT (g)/REFERENCE(g))

FREQUENCY (Hz)

16596-004

Figure 4. Frequency Response, High Frequency (>5 kHz) Vibration Response;

a Laser Vibrometer Controller Referencing the ADXL1003 Package Used for

Accuracy

100

1000

10000

100000

0.01 0.1 1 10

POWER SPECTRAL DENSITY (µg/

√

Hz)

FREQUENCY (Hz)

DUT1

DUT2

16596-005

Figure 5. Noise Power Spectral Density (PSD) Below 10 Hz vs. Frequency

–5

–3

–1

–50 –30 –10 10 30 50 70 90 110 130 150

SENSITIVITY CHANGE (% FULL SCALE)

TEMPERATURE (°C)

16596-006

Figure 6. Sensitivity vs. Temperature

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

9.5

9.6

9.7

9.8

9.9

10.0

10.1

10.2

10.3

10.4

10.5

10.6

10.7

PERCENT OF POPULATION

SENSITIVITY (mV/g)

16596-007

Figure 7. Sensitivity Distribution at 25°C

100

1000

10000

100 1k 10k 100k

NOISE PSD (µg/√Hz)

FREQUENCY (Hz)

16596-008

Figure 8. Noise PSD Above 100 Hz

–1.0

–0.8

–0.6

–0.4

–0.2

0.2

0.4

0.6

0.8

1.0

10 30 50 70 90 110 130 150 170 190

SENSITIVITY ER

OR (

of Full-Scale)

INPUT ACCELERATION (g)

16596-009

Figure 9. Sensitivity Nonlinearity vs. Input Acceleration

Data Sheet ADXL1003

Rev. 0 | Page 7 of 14

–10

–8

–6

–4

–2

–40 –20 0 20 40 60 80 100 120

NORMALIZED OFFSET (g)

TEMPERATURE (°C)

16596-010

Figure 10. Normalized Offset vs. Temperature

600

650

700

750

800

850

900

950

1000

1050

1100

3.0 3.2 3.4 3.6 3.8 4.0 4.2 4.4 4.6 4.8 5.0 5.2 5.4

MEASURE MODE SUPPLY CURRENT (µA)

SUPPLY VOLTAGE (V)

16596-011

Figure 11. Measure Mode Supply Current vs. Supply Voltage

880 900 920 940 960 980 1000 1020 1040 1060

PERCENT OF POPULATION (%)

MEASURE MODE CURRENT (µA)

16596-012

Figure 12. Measure Mode Current Histogram at 25°C

2.45 2.46 2.47 2.48 2.49 2.5 2.51 2.52 2.53 2.54 2.55

PERCENT OF POPULATION (%)

OUTPUT DISTRIBUTION (V)

16596-013

Figure 13. 0 g Offset Histogram at 25°C

140

160

180

200

220

240

260

280

3.0 3.2 3.4 3.6 3.8 4.0 4.2 4.4 4.6 4.8 5.0 5.2 5.4

STANDBY MODE SUPPLY CURRENT (µA)

SUPPLY VOLTAGE (V)

16596-014

Figure 14. Standby Current vs. Supply Voltage

200 205 210 215 220 225 230 235 240 245

PERCENT OF POPULATION (%)

STANDBY CURRENT (µA)

16596-015

Figure 15. Standby Current Histogram at 25°C

ADXL1003 Data Sheet

Rev. 0 | Page 8 of 14

–2

–1

0 5 10 15 20 25 30 35 40

VOL

AGE (V)

TIME (µs)

STANDB Y

XOUT

16596-016

Figure 16. XOUT Output Recovery from Standby Mode to Measure Mode

TEMPERATURE (°C)

194

195

196

197

198

199

200

201

202

203

204

–50 0 50 100 150

INTERNAL CLOCK FREQUENCY,

= 5.0V (kHz)

16596-017

Figure 17. Internal Clock Frequency vs. Temperature at 5.0 V Supply Voltage (VDD)

–2

–100

100

200

300

400

500

600

13.013.514.014.515.015.516.016.517.017.518.0

OUTPUT (V)

INPUT ACCELERATION

(

TIME (ms)

OUT

DELTA

REFERENCE

OVERRANGE

16596-018

Figure 18. Response to Overload Condition, XOUT Delta is Difference from

Midscale Voltage

195.5

196.0

196.5

197.0

197.5

198.0

198.5

199.0

199.5

200.0

200.5

3.0 3.2 3.4 3.6 3.8 4.0 4.2 4.4 4.6 4.8 5.0 5.2

INTERNAL CLOCK FREQUENCY (kHz)

SUPPLY VOLTAGE (V)

16596-019

Figure 19. Internal Clock Frequency vs. Supply Voltage at 25°C

Data Sheet ADXL1003

Rev. 0 | Page 9 of 14

THEORY OF OPERATION

The ADXL1003 is a low noise, single-axis, MEMS accelerometer,

with a 28 kHz resonant frequency that provides an analog output

proportional to mechanical vibration. The ADXL1003 has a high

g range of ±200 g, suitable for vibration measurements in high

bandwidth applications. Such applications include vibration

analysis systems for monitoring and diagnosing machines or

system health.

The low noise and high frequency bandwidth allows the

measurement of vibration patterns caused by small moving

components, such as internal bearings. The high g range

provides the dynamic range necessary for in high vibration

environments such as heating, ventilation, and air conditioning

(HVAC) and heavy machine equipment. To achieve proper

performance, be aware of system noise, mounting, and signal

conditioning.

System noise is affected by supply voltage noise. The analog

output of the ADXL1003 is a ratiometric output. Therefore,

supply voltage modulation affects the output. Use a properly

decoupled, stable supply voltage to power the ADXL1003 and to

provide a reference voltage for the digitizing system.

The output signal is impacted by an overrange stimulus. An

overload indicator output feature indicates a condition that is

critical for an intelligent measurement system. For more infor-

mation about the overrange features, see the Overrange section.

Proper mounting ensures full mechanical transfer of vibration

to accurately measure the desired vibration rather than vibration

of the measurement system, including the sensor. A common

technique for high frequency mechanical coupling is to use a

sensor stud mount system while considering the mechanical

interface of fixing the ADXL1003 in the stud. For lower frequencies

(below the full capable bandwidth of the sensor), it may be possible

to use magnetic or adhesive mounting. Proper mounting technique

ensures proper and repeatable results that are not influenced by

measurement system mechanical resonances and/or damping at

the desired frequency, and represents an efficient and proper

mechanical transfer to the system being monitored.

Proper application specific signal conditioning is required to

achieve optimal results. Understanding the measurement

frequency range and managing overload conditions is

important to achieve accurate results. The electrical output

signal of the ADXL1003 requires some band limiting and a

proper digitization bandwidth. See the Interfacing Analog

Output Below 10 kHz section and the Interfacing Analog

Output Beyond 10 kHz section for more information.

MECHANICAL DEVICE OPERATION

The moving component of the sensor is a polysilicon surface-

micromachined structure built on top of a silicon wafer. Polysilicon

springs suspend the structure over the surface of the wafer and

provide a resistance against acceleration forces.

Differential capacitors that consist of independent fixed plates

and plates attached to the moving mass measure the deflection

of the structure. Acceleration deflects the structure and unbalances

the differential capacitor, resulting in a sensor output with amp-

litude proportional to acceleration. Phase sensitive demodulation

determines the magnitude and polarity of the acceleration.

OPERATING MODES

The ADXL1003 has two operating modes: measure mode and

standby mode. Measure mode provides a continuous analog

output for active monitoring. Standby mode is a

nonoperational, low power mode.

Measure Mode

Measure mode is the normal operating mode of the ADXL1003.

In this mode, the accelerometer actively measures acceleration

along the axis of sensitivity and consumes 1.0 mA (typical)

using a 5.0 V supply.

Standby Mode

Placing the ADXL1003 in standby mode suspends the measure-

ment and reduces the internal current consumption to 225 μA

(typical for the 5.0 V supply). The transition time from standby

to measure mode is <50 μs. Figure 16 shows the transition from

standby to measure mode.

BANDWIDTH

The ADXL1003 circuitry supports an output signal bandwidth

beyond the resonant frequency of the sensor, measuring accel-

eration over a bandwidth comparable to the resonant frequency

of the sensor. The output response is a combination of the sensor

response and the output amplifier response. Therefore, external

band limiting or filtering is required. See the Interfacing Analog

Output Below 10 kHz section and the Interfacing Analog

Output Beyond 10 kHz section for more information.

When using the ADXL1003 beyond 10 kHz, consider the

nonlinearity due to the resonance frequency of the sensor, the

additional noise due to the wideband output of the amplifier,

and the discrete frequency spurious tone due to coupling of the

internal 200 kHz clock. Aliased interferers in the desired band

cannot be removed, and observed performance degrades. A

combination of high speed sampling and appropriate band

limiting filtering is required for optimal performance.

ADXL1003 Data Sheet

Rev. 0 | Page 10 of 14

APPLICATIONS INFORMATION

APPLICATION CIRCUIT

For most applications, a single 1 μF capacitor adequately

decouples the accelerometer from noise on the power supply. A

band limiting filter at the output provides suppression of out of

band noise and signal. A capacitive load between 100 pF and

22 nF is recommended.

The output amplifier can drive resistive loads up to 2 mA of

source current, for example a load greater than 2.5 kΩ for 5 V

operation. If the output is to drive a capacitive load greater than

or equal to 100 pF, a series resistor of at least 8 kΩ is required to

maintain the amplifier stability.

When inactive, the ST and STANDBY pins are forced low. The

overrange indicator is an output that can be monitored to

identify the status of the system.

(3.0V TO 5.25V

SUPPLY VOLTAGE)

STANDBY (ACTIVE HIGH)

ST (ACTIVE HIGH)

OUT

1µF

ADXL1003

OPTIONAL

LOW-PASS FILTER

16596-020

Figure 20. Application Circuit

ON DEMAND SELF TEST

A fully integrated electromechanical self test function is designed

into the ADXL1003. This function electrostatically actuates the

accelerometer proof mass, resulting in a displacement of the

capacitive sense fingers. This displacement is equivalent to the

displacement that occurs as a result of external acceleration input.

The proof mass displacement is processed by the same signal

processing circuitry as a true acceleration output signal,

providing complete coverage of both the electrical and mechanical

responses of the sensor system.

The self test feature can be exercised by the user with the

following steps:

1. Measure the output voltage.

2. Turn on self test by setting the ST pin to VDD.

3. Measure the output again.

4. Subtract the two readings and compare the result to the

expected value from Table 1, while factoring in the

response curve due to supply voltage, if necessary, from

Figure 21.

The self test function can be activated at any point during

normal operation by setting the ST pin to VDD. Self test takes

approximately 300 μs from the assertion of the ST pin to a

result. Acceleration outputs return approximately 300 μs after

the release of the ST pin. While performing the self test

measurement, do not use the accelerometer output to measure

external acceleration.

16596-021

100

120

3.0 3.2 3.4 3.6 3.8 4.0 4.2 4.4 4.6 4.8 5.0 5.2

SELF TEST DELTA (

SUPPLY VOLTAGE (V)

Figure 21. Typical Self Test Delta vs. Supply Voltage

RATIOMETRIC OUTPUT VOLTAGE

The ADXL1003 was tested and specified at VDD = 5.0 V. However,

the ADXL1003 can be powered with VDD as low as 3.0 V or as high

as 5.25 V. Some performance parameters change as the supply

voltage is varied.

The ADXL1003 output is ratiometric to the supply voltage, VDD.

Therefore, the output sensitivity (or scale factor) varies propor-

tionally to the supply voltage. At VDD = 5.0 V, the output sensitivity

is typically 10 mV/g for the ADXL1003. The zero g bias output

is ratiometric also and is nominally midscale relative to the

supply voltage (VDD/2).

16596-022

3.0 3.2 3.4 3.6 3.8 4.0 4.2 4.4 4.6 4.8 5.0 5.2

SENSITIVITY (

V/g)

SUPPLY VOLTAGE (V)

Figure 22. Sensitivity vs. Supply Voltage

Data Sheet ADXL1003

Rev. 0 | Page 11 of 14

INTERFACING ANALOG OUTPUT BELOW 10 kHz

The ADXL1003 senses mechanical motion along a single axis and

produces a voltage output. The system performance depends on

the output response resulting from sense mechanical vibration and

signal processing of the electrical output.

The sensor must be effectively mechanically coupled. Mechanical

coupling can be a complex integration of multiple components,

typically unique for each application. Consideration must be

made for all mechanical interfaces including the mounting of

the MEMS to the PCB (the location on the PCB as well as the

solder chemistry), the size of the PCB (both thickness and active

surface area), and the mounting of the PCB to the system being

monitored (either in a module or directly mounted).

In general, the following guidelines for effective mechanical

interface must be used to support up to 10 kHz bandwidth:

 Keep the ADXL1003 near a stable mechanical mounting on

the PCB.

 Provide multiple hard mounting points.

 Keep the PCB thick and avoid a large surface area PCB that

induces higher magnitude and lower frequency resonances.

 Ensure the mechanical connection is sufficiently stiff to

transfer mechanical forces up to the desired frequency.

Below 10 kHz, magnetic and adhesive mounting is possible

with proper attention. The EVAL-ADXL1003Z evaluation

boards can be used as a reference.

The ADXL1003 electrical output supports a bandwidth beyond the

resonance of the sensor. The small signal bandwidth of the output

amplifier in the ADXL1003 is 70 kHz. During the digitization

process, aliasing (which is the folding of higher frequency noise

and signals into the desired band) can occur. To avoid aliasing

noise from the amplifier and other internal circuits (for example,

coupling of the internal 200 kHz clock), it is recommended that

an external filter be implemented at the desired bandwidth and

the chosen analog-to-digital converter (ADC) sampling rate be

faster than the amplifier bandwidth.

The output amplifier is ratiometric to the supply voltage, and

there are two distinct cases regarding digital conversion, as

follows:

 The user has an ADC downstream of the accelerometer

that can use the VDD voltage as a reference. In this case, the

voltage supply tolerance and voltage temperature

coefficient (commonly associated with external regulators)

tracks between the sensor and the ADC. Therefore, the

supply and reference voltage induced error cancels out.

This design approach is recommended.

 If the ADC cannot reference the same 5 V supply as the

sensor for any reason, the sensitivity of the digitized sensor

output reflects the regulator tolerance and temperature

coefficient.

The ADXL1003 output amplifier is stable while driving capacitive

loads of up to 100 pF directly without a series resistor. At loads

greater than 100 pF, an 8 kΩ or greater series resistor must be used.

See Figure 23 for an example of the interface, including compo-

nents when measuring mechanical vibration from 0 kHz to

5 kHz. For a 5 kHz pass band, a single-pole resistor capacitor

(RC) filter is acceptable. However, in some applications, use of a

more aggressive filter and lower sample ADC sample rate is

possible. The following components are recommended to form

a 5 kHz low-pass RC filter at the output of the ADXL1003 when

interfacing to an ADC, such as the ADAQ7980: R1 = 5 kΩ, C1 =

5 nF, R2 = 0 Ω, and C2 are not required. A minimum ADC

sample rate of 20 kHz is recommended to avoid aliasing. When

using sampling rates less than the resonance frequency (typically

28 kHz), be aware and account for the effective gain at the output of

the sensor due to the resonance to ensure out of band signals

are properly attenuated and do not alias into the band.

See Figure 23 for an example of the interface, including compo-

nents when measuring mechanical vibration from 0 kHz to 10 kHz.

The following components are recommended to form a two-pole

RC filter at the output of the ADXL1003: R1 = 5 kΩ, C1 = 2 nF,

R2 = 5 kΩ, and C2 = 2 nF. A minimum ADC sample rate of 200

kHz is recommended to avoid aliasing.

ADXL1003 Data Sheet

Rev. 0 | Page 12 of 14

16596-023

ADC

REF

GND

VDD

IN+

IN–

VIO

SDI

SCK

SDO

CNV

20Ω

V+

V–

1.8nF

LDO

2.2µF

REF_OUT LDO_OUT

PD_REF

AMP_OUT

PD_AMP ADCN

PD_LDO

ADXL1003

10µF

ADAQ7980/ADAQ7988

0.1µF

(

+1µF,OPTIONAL)

3.0V TO 5.0V

3.0V LIMITED BY ADXL1003; 5.0V LIMITED BY ADAQ7980/ADAQ79888

ADR4530

ADR4533

ADR4540

ADR4550

Figure 23. Application Circuit for the ADXL1003

INTERFACING ANALOG OUTPUT BEYOND 10 kHz

The ADXL1003 is a high frequency, single-axis MEMS

accelerometer that provides an output signal pass band beyond

the resonance frequency range of the sensor. Although the output

3 dB frequency response bandwidth is approximately 15 kHz

(note that this is a 3 dB response, meaning there is a gain in

sensitivity at this frequency), in some cases, it is desirable to

observe frequency beyond this range. To accommodate this

frequency, the ADXL1003 output amplifier supports a 70 kHz

small signal bandwidth, which is well beyond the resonant

frequency of the sensor.

Although a mechanical interface is always important to achieve

accurate and repeatable results in MEMS applications, it is critical

when measuring greater than a few kilohertz. Typically, magnetic

and adhesive mounting are not sufficient to maintain proper

mechanical transfer of vibration through these frequencies.

Mechanical system analysis is required for these applications.

When using the ADXL1003 beyond 10 kHz, consider the

nonlinearity due to the resonance frequency of the sensor, the

additional noise due to the wideband output of the amplifier,

and the discrete frequency spurious tone due to coupling of the

internal 200 kHz clock. If any of these interferers alias in the

desired band, the aliasing cannot be removed and observed

performance degrades. A combination of high speed sampling

and appropriate filtering is required for optimal performance.

The first consideration is the effect of the sensor resonance

frequency at 28 kHz. Approaching and above this frequency, the

output response to an input stimulus peaks, as shown in Figure 4.

When frequencies are near or above the resonance, the output

response is outside the linear response range and the sensitivity is

different than observed at lower frequencies. In these frequency

ranges, the relative response (as opposed to absolute value) over

time is typically observed.

The ADXL1003 output amplifier small signal bandwidth is 70 kHz.

The user must interface to the device with proper signal filtering to

avoid issues with out of band noise aliasing into the desired band.

The amplifier frequency response roll-off can be modeled as a

single-pole, low-pass filter, at 70 kHz. In the absence of additional

external low-pass filtering, to avoid aliasing of high frequency

noise, choose a sampling rate of at least 2× the equivalent noise

bandwidth (ENBW) for a single-pole, low-pass filter, as follows:

ENBW = (π/2) × 70 kHz ≈ 110 kHz

The sample rate must be at least 220 kHz. This sample rate

reduces broadband noise due to the amplifier from folding back

(aliasing) in-band, but does not prevent out of band signals

from aliasing in-band. To prevent out of band responses,

additional external low-pass filtering is required.

Another artifact that must be addressed is the coupling of the

internal clock signal at 200 kHz onto the output signal. This

clock spur must be filtered by analog or digital filtering so as

not to affect the analysis of results.

To achieve the lowest rms noise and noise density for extended

bandwidth applications, it is recommended to use at least a

multiple order low-pass filter at the output of the ADXL1003 and

a digitization sample rate of at least 4× the desired bandwidth,

assuming there is sufficient filtering of the 200 kHz internal clock

signal. Use an ADC sample rate of 1 MSPS or greater along with

digital low-pass filtering to achieve similar performance.

Data Sheet ADXL1003

Rev. 0 | Page 13 of 14

OVERRANGE

The ADXL1003 has an output (OR pin) to signal when an

overrange event (when acceleration is greater than 2× the full-scale

range) occurs. Built in overrange detection circuitry provides an

alert to indicate a significant overrange event occurred that is

larger than approximately 2× the specified g range. When an

overrange is detected, the internal clock is disabled to the sensor

for 200 μs to maximize protection of the sensor element during an

overrange event. If a sustained overrange event is encountered, the

overrange detection circuitry triggers periodically,

approximately every 500 μs (see Figure 18).

MECHANICAL CONSIDERATIONS FOR MOUNTING

Mount the ADXL1003 on the PCB in a location close to a hard

mounting point of the PCB. Mounting the ADXL1003 at an

unsupported PCB location, as shown in Figure 24 may result

in large, apparent measurement errors due to undamped PCB

vibration. Placing the accelerometer near a hard mounting point

ensures that any PCB vibration at the accelerometer is above the

mechanical sensor resonant frequency of the accelerometer and

effectively invisible to the accelerometer. Multiple mounting

points, close to the sensor, and a thicker PCB help reduce the

effect of system resonance on the performance of the sensor.

MOUNTING POINTS

PCB

CCELEROMETERS

16596-024

Figure 24. Incorrectly Placed Accelerometers

LAYOUT AND DESIGN RECOMMENDATIONS

Figure 25 shows the recommended PCB land pattern.

32 31 30 29 26 25

9 10111213141516

28 27

0.146″/3.7mm 0.191″/4.855mm

0.146″/3.7mm

0.012″/0.305mm

0.02″/0.5mm

0.03″/0.755mm

0.191″/4.855mm

16596-025

Figure 25. PCB Land Pattern

ADXL1003 Data Sheet

Rev. 0 | Page 14 of 14

OUTLINE DIMENSIONS

02-02-2017-A

0.50

BSC

BOTTOM VIEWTOP VIEW

PIN 1

INDICATOR

EXPOSED

PAD

0.05 MAX

0.02 NOM

0.203 REF

COPLANARITY

0.08

0.30

0.25

0.20

5.10

5.00 SQ

4.90

*1.85

1.80

1.75

0.45

0.40

0.35

0.20 MIN

3.80

3.70 SQ

3.60

PKG-004829

3.50 REF

*COMPLIANT

JEDEC STANDARDS MO-220-VHHD-4

WITH EXCEPTION TO PACKAGE HEIGHT.

SEATING

PLANE

PIN 1

INDICATOR AREA OPTIONS

(SEE DETAIL A)

DETAIL A

(JEDEC 95)

FOR PROPER CONNECTION OF

THE EXPOSED PAD, REFER TO

THE PIN CONFIGURATION AND

FUNCTION DESCRIPTIONS

SECTION OF THIS DATA SHEET.

Figure 26. 32-Lead Lead Frame Chip Scale Package [LFCSP]

5 mm × 5 mm Body and 1.8 mm Package Height

(CP-32-26)

Dimensions shown in millimeters

ORDERING GUIDE

Model1 Temperature Range g Range Package Description Package Option

ADXL1003BCPZ −40°C to +125°C ±200 g 32-Lead Lead Frame Chip Scale Package [LFCSP] CP-32-26

ADXL1003BCPZ-RL −40°C to +125°C ±200 g 32-Lead Lead Frame Chip Scale Package [LFCSP] CP-32-26

ADXL1003BCPZ-RL7 −40°C to +125°C ±200 g 32-Lead Lead Frame Chip Scale Package [LFCSP] CP-32-26

EVAL-ADXL1003Z ADXL1003 Evaluation Board

1 Z = RoHS Compliant Part.

registered trademarks are the property of their respective owners.

D16596-0-8/18(0)