D6F-W@A1
MEMS Flow Rate Sensor
1
A Compact Sensor That Uses OMRON’s
Unique Flow Path Structure for High-
performance Flow Rate Measurement.
■Anti-dust performance enhanced by OMRON's
unique three-dimensional flow path structure.
■High accuracy of ±5% FS.
RoHS Compliant
Ordering Information
Sensor
Cable (Order Separately)
Performance
Note: The flow rate is the value calculated from the mass flow rate in OMRON's spec-
ified 48-mm-dia. wind tunnel. It does not indicate the flow rate determined by the
Measurement Law of Japan.
Confirm operation in the application environment before using the D6F.
Flow rate Model number Minimum order
0 to 1 m/s D6F-W01A1 25
0 to 4 m/s D6F-W04A1
Contact Wires Housing Model number
SZH-002T-P0.5 AWG 26
(Length 200 mm)
ZHR-3 D6F-W CABLE
Item Model
number
D6F-W01A1 D6F-W04A1
Flow rate 0 to 1 m/s 0 to 4 m/s
This is the flow rate at 25°C and 1 atmosphere.
Case material Thermoplastic resin
Oper-
ating
condi-
tions
Applicable
fluid
Air
Operating
temperature
−10 to 60°C (with no condensation or icing)
Operating
humidity
85% max. (with no condensation or icing)
Storage
temperature
−40 to 80°C (with no condensation or icing)
Storage
humidity
85% max. (with no condensation or icing)
Power supply voltage 10.8 to 26.4 VDC
Output signal Analog output: 1 to 5 VDC, Load resistance: 10 kΩ (non-lin-
ear output)
Current consumption Without load: Vcc = 12 to 24 VDC, Vss = 0 V, 25 C, 15 mA
max.
Insulation resistance Between Sensor outer cover and lead terminals: 20 MΩ min.
(at 500 VDC)
Withstand voltage Between Sensor outer cover and lead terminals: 500 VAC,
50/60 Hz for 1 min (leakage current: 1 mA max.)
Absolute
Maximum Ratings
Connections
Pin No. 1: Vcc
2: Vout
3: GND
Connectors S3B-ZR-SM2-TF
(Made by J.S.T. Mfg. Co.,
Ltd.)
Use the following connectors from J.S.T.
Mfg. Co., Ltd. to connect the D6F.
Contacts and Wires
Contacts: SZH-002T-P 0.5
Wires: AWG28 to AWG26
or
Contacts: SZH-003T-P 0.5
Wires: AWG32 to AWG28
Housing: ZHR-3
Item Symbol Rating Unit
Power
supply
voltage
Vcc 26.4 VDC
Output
voltage
Vout 6 VDC
Enlarged view
2. Vout. 3. GND.
1. Vcc.
D6F-W@A1D6F-W@A1
Dimensions (Unit: mm)
Sensor
Cable (Order Separately)
4.2±0.2
3.2±0.2
Two, R: 1.6
30.5±0.2
19.5
2-dia. holes,
Depth: 2.5
3.2 ±0.2 dia.
4
5
IN
1.2 2.6
9
20
8R: 4
R: 4
8
2439
7
OUT
OUT
1.2
2.6
Two, M3 screws
30.5±0.05
5
D6F-W01A1
D6F-W04A1
5±1
15±330
±10 50±10
100±10
D6F-W CABLE
In the interest of product improvement, specifications are subject to change without notice.
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
Cat. No. A184-E1-01
Printed in Japan
0109
OMRON Corporation
Electronic Components Company
Semiconductor Division H.Q.
Micro Devices Division
686-1 Ichimiyake, Yasu,
Shiga, 520-2326 JAPAN
Tel: (81)77-587-7486/Fax: (81)77-587-7503
