Model 3022 Accelerometer
Model 3022 Rev C www.meas-spec.com 01/09/2013
32 Journey Ste. 150 Aliso Viejo, CA 92656 949-716-5377 t&m@meas-spec.com
Piezoresistive MEMS
DC Response
Circuit Board Mountable
Low Cost
Dimensions
The Model 3022 is a silicon MEMS
accelerometer in a Wheatstone bridge
configuration. The accelerometer is
packaged on a ceramic substrate with
an epoxy sealed ceramic cover and is
designed for adhesive mounting. The
accelerometer is offered in ranges from
±2g to ±200g range and provides a flat
frequency response to minimum
2000Hz. The silicon MEMS sensor is
gas damped and incorporates over-
range stops for high-g shock protection.
For a similar accelerometer designed
for bolt mounting, see the Model 3028.
FEATURES
Adhesive Mounted
±0.5% Non-linearity
Open Wheatstone Bridge
DC Response
Gas Damping
Built-in Overrange Stops
Low Power Consumption
APPLICATIONS
Vibration & Shock Monitoring
Motion Control
Impact & Shock Testing
Modal Analysis
Embedded Applications
Machinery
Model 3022 Accelerometer
Model 3022 Rev C www.meas-spec.com 01/09/2013
32 Journey Ste. 150 Aliso Viejo, CA 92656 949-716-5377 t&m@meas-spec.com
Performance Specifications
Ordering Info
The information in this sheet has been carefully reviewed and is believed to be accurate; however, no responsibility is assumed for inaccuracies. Furthermore, this
information does not convey to the purchaser of such devices any license under the patent rights to the manufacturer. Measurement Specialties, Inc. reserves the right
to make changes without further notice to any product herein. Measurement Specialties, Inc. makes no warranty, representation or guarantee regarding the suitability of
its product for any particular purpose, nor does Measurement Specialties, Inc. assume any liability arising out of the application or use of any product or circuit and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. Typical parameters can and do vary in different applications.
All operating parameters must be validated for each customer application by customer’s technical experts. Measurement Specialties, Inc. does not convey any license
under its patent rights nor the rights of others.
All values are typical at +24°C, 100Hz and 5Vdc excitation unless otherwise stated. Measurement Specialties reserves the right to update and change
these specifications without notice. Measurement Specialties’ family of DC Response Embedded Accelerometers are used for vibration/shock monitoring,
structural analysis, motion control, impact testing, and transportation study. These MEMS sensors feature internal gas damping and outstanding shock
survivability.
Parameters
DYNAMIC
Notes
Range (g)
±2
±5
±10
±20
±50
±100
±200
Sensitivity (mV/g)1
8.0-20.0
6.0-15.0
3.0-6.0
1.5-3.0
0.6-1.5
0.3-0.6
0.15-0.3
@5Vdc Excitation
Frequency Response (Hz)
0-150
0-250
0-400
0-600
0-1000
0-1500
0-2000
±5%
Natural Frequency (Hz)
700
800
1000
1500
4000
6000
8000
Non-Linearity (%FSO)
±0.5
±0.5
±0.5
±0.5
±0.5
±0.5
±0.5
Transverse Sensitivity (%)
3
3
3
3
3
3
3
Damping Ratio
0.7
0.7
0.7
0.7
0.7
0.7
0.6
Shock Limit (g)
5000
5000
5000
5000
5000
5000
5000
ELECTRICAL
Zero Acceleration Output (mV)
±25
±25
±25
±25
±25
±25
±25
Differential
Excitation Voltage (Vdc)
2 to 10
2 to 10
2 to 10
2 to 10
2 to 10
2 to 10
2 to 10
Input Resistance (Ω)
2500-
6500
2500-
6500
2500-
6500
2500-
6500
2500-
6500
2500-
6500
2500-
6500
Output Resistance (Ω)
2500-
6500
2500-
6500
2500-
6500
2500-
6500
2500-
6500
2500-
6500
2500-
6500
Insulation Resistance (MΩ)
>100
>100
>100
>100
>100
>100
>100
@50Vdc
Residual Noise (µV RMS)
10
10
10
10
10
10
10
Maximum
Ground Isolation
Isolated from Mounting Surface
ENVIRONMENTAL
Thermal Zero Shift (%FSO/°C)
-0.09
-0.09
-0.09
-0.09
-0.09
-0.09
-0.09
Typical
Thermal Sensitivity Shift (%/°C)
-0.15
-0.15
-0.15
-0.15
-0.15
-0.15
-0.15
Typical
Operating Temperature (°C)
-40 to +125
Compensated Temperature (°C)
Not Compensated
See Note 2
Storage Temperature (°C)
-40 to +125
PHYSICAL
Case Material
Ceramic
Weight (grams)
3.1
Mounting
Adhesive or solder
1 Output is ratiometric to excitation voltage
2 Order model 3022-XXX-10254 for temperature compensation resistor values included in the calibration certificate.
PART NUMBERING Model Number+Range+Electrical Connection
3022-GGG-P
l l
l l_____Electrical Connection (P=pins, N=solder pads)
l___________Range (010 is 10g)
Example: 3022-010-P
Model 3022, 10g, Pins
