MEMS Airflow Sensor D6F-10A, -20A, -50A 23
MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring
MEMS technology for precision mass
airflow measurement
• Precision mass airflow up to 50 LPM
• Stable output across full scale
• Manifold mounting feature with NBR ‘O’ ring option
• Compact size 78 (L) x 30 (W) x 30 (H) mm
• Low power consumption
• RoHS Compliant
Ordering Information
Note: Cable Assembly is sold separately.
* Contact Omron for other gases or thread types.
**Mass flow converted to volumetric flow (standard liters per minute) at 0°C and 1 atm.
■Application Examples
•Industrial processes
•Medical Respirators and Ventilators
•MiG and TiG welding systems
•Anesthesia Delivery
•Mass flow controllers
•Scientific / test equipment
•Fuel cell controls
Rating
■Absolute maximum rating
■Electrical Performance
Description Case Applicable Gas Flow Range** Connection Type Model
Mass Flow Sensor Thermoplastic resin
/ Aluminum alloy
Air* 0 – 10 LPM Right-angle manifold
mount connection
D6F-10A5-000
0 – 20 LPM D6F-20A5-000
0 – 50 LPM D6F-50A5-000
0 – 10 LPM Straight RC1/4 (1/4” BSPT)
threaded pipe*
D6F-10A6-000
0 – 20 LPM D6F-20A6-000
0 – 50 LPM D6F-50A6-000
Cable Connector Assembly - - - - - - - - - - - - D6F-CABLE1
Item Symbol Ratings Unit
Power supply VCC 26.4 VDC
Output voltage VOUT 6VDC
Item Term Condition MIN MAX Unit
Power supply VCC — 10.8 26.4 VDC
Operating temperature TOPR No condensation or icing -10 60 °C
Output voltage (max.) VOH VCC = 12 to 24VDC IOH = 0.5mA 5 5.7 VDC
Output voltage (min.) VOL VCC = 12 to 24VDC IOL = -0.5mA 0 1 VDC
24 MEMS Airflow Sensor D6F-10A, -20A, -50A
Characteristics
* Contact Omron for other thread types (A6)
** Contact Omron for other gases.
Operating Characteristics
D6F-10A
D6F-20A
D6F-50A
Model D6F-10A@-000 D6F-20A@-000 D6F-50A@-000
Flow rate @ 0°C and 101.3 kPa 0-10 L/min 0-20 L/min 0-50 L/min
Joint type* Manifold mount with ‘O’ Ring (A5 type) or Rc 1/4 (1/4” BSPT threaded)(A6 type)**
Case material Thermoplastic resin
Applicable Gas** Air
Electrical Connection Connector (3 wire)
Withstand Pressure (max.) 500 kPa (about 72.5 psi)
Accuracy ±3% F.S. max, 25°C
Operating Temperature -10 to +60°C (with no icing or condensation)
Storage Temperature -30 to +80°C (with no icing or condensation)
Operating Humidity 85%RH max. (with no icing or condensation)
Output Signal 1 to 5 VDC, Analog Output (non-linear output)
Current Consumption 15 mA max. (No-Load with VCC = 12 to 24 VDC, VSS = 0V and 25°C)
Insulation Resistance 20MΩ min. at 500 VDC, between lead terminal and case
Dielectric Strength 500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and the base
Response Time (reference) 150 mS, typical
0.0 2.0 4.0 6.0 8.0 10.0
D6F-10A
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
D6F-20A
0.0 4.0 8.0 12.0 16.0 20.0
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0 10.0 20.0 30.0 40.0 50.0
D6F-50A
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
Flow Rate L/min (normal) 0246810
Output Voltage (VDC) 1.00 ±0.12 1.75 ±0.12 2.60 ±0.12 3.45 ±0.12 4.25 ±0.12 5.00 ±0.12
Flow Rate L/min (normal) 048121620
Output Voltage (VDC) 1.00 ±0.12 1.93 ±0.12 2.87 ±0.12 3.70 ±0.12 4.41 ±0.12 5.00 ±0.12
Flow Rate L/min (normal) 0 1020304050
Output Voltage (VDC) 1.00 ±0.12 2.45 ±0.12 3.51 ±0.12 4.20 ±0.12 4.66 ±0.12 5.00 ±0.12
MEMS Airflow Sensor D6F-10A, -20A, -50A 25
Test Results (typical performance)
D6F-20A@
(5 samples, repeated 10 times each)
Installation: D6F-@A5-000
Recommendation for right-angle, manifold mount connection;
Use M3 panhead screws for mounting, and tighten them to a maximum
torque of 0.59 N•m. Please seal INLET and OUTLET with ‘O’ rings.
Please install the product as shown below. Incorrect mounting may
cause product failure and make it impossible to obtain correct measure-
ments.
Recommended ‘O’ ring for sealing inlet and outlet orifice;
•Material: NBR70 (recommended for all applications including
medical and food processing.)
•Example part number: JASO part number: CO 0003
•Alternative manufacturers with similar DO and W dimensions may
be used
-1.0
-0.8
-0.6
-0.4
-0.2
0.0
0.2
0.4
0.6
0.8
1.0
0 2 4 6 8 101214161820
Flow Rate (lpm)
Repeatability (%F.S.)
Inlet
Outlet
O ring
5.8
1.9 ± 0.07
26 MEMS Airflow Sensor D6F-10A, -20A, -50A
Dimensions
Unit: mm
D6F-10A5-000, D6F-20A5-000, D6F-50A5-000
D6F-10A6-000, D6F-20A6-000, and D6F-50A6-000
Applicable Cable for D6F-@A@-000 (Optional - sold separately)
part number: D6F-CABLE1
Note:
Be sure to read the precautions and information common to all D6F sensors, contained in the Technical User’s Guide, “D6F Technical Information”
for correct use.
30.4
30±0.5
66±0.2 66±0.05
14±0.05
Four, M3
14±0.1 Four, 3.2-dia. holes
Two, 5-dia holes
30±0.5
78±0.5
5.7
3.4
6
Enlarged view
Mounting Hole
Dimensions
3: GND
2: Vout
1: Vcc
30.4
30±0.5
66±0.2
12±0.2
30±0.5
78±0.5
5.7
3.4
6
Tapered pipe thread
Two, Rc1/4
(1/4” BPST - British
Standard Pipe, Threaded)
Two, M3 screws
(Effective depth: 4.5)
66±0.05
12±0.05
Two, M3
Enlarged view
3: GND
2: Vout
1: Vcc
Mounting Hole
Dimensions
1. Vcc
2. Vout
Brown wire
Black wire
100±15
200±35
Blue wire 3. GND
Housing: Molex - 51021
Terminal: Molex - 50079
Wire: 26-28 AWG
MEMS Airflow Sensor D6F-10A, -20A, -50A
MEMO
MEMS Airflow Sensor D6F-10A, -20A, -50A
OMRON ON-LINE
Global - http://www.omron.com
USA - http://www.components.omron.com
Cat. No. X305-E-1 Printed in USA
OMRON ELECTRONIC
COMPONENTS LLC
55 E. Commerce Drive, Suite B
Schaumburg, IL 60173
847-882-2288
10/10 Specifications subject to change without notice
All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which
can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
