1
D6F-P
MEMS Flow Sensor
A Compact, High-performance Flow
Sensor with Dust Segregation Structure.
■Built in Dust Segregation System (DSS).
■High resolution and repeatability, even at low flow
rates.
■Barbed ports with connector or PCB terminals or
manifold mount with connector versions.
■Built in voltage regulator, temperature compensa-
tion and amplified output.
Application Examples
• Building Automation: HVAC
• Medical: Ventilators, CPAP, Anesthesia
• Industrial: Fuel Cell, Process Control, Clogged filter detection
Ordering Information
Note: 1. Could be calibrated for different gas types. Consult your Omron representative.
2. Dry gas must not contain large particles, eg dust, oil, mist.
Output Voltage Characteristics
0 to 1L/min (normal) volumetric flow rate at 0 °C, 101.3kPa.
Measurement condition: Power supply voltage 5±0.1VDC, ambient temperature 25±5 °C and ambient humidity 35 to 75% RH.
RoHS Compliant
Model Case Calibration Gas (See note 1.) Flow Range
D6F-P0010A1 (Lead terminals) PBT Air (See note 2.) 0-1 LPM
D6F-P0010A2 (Connector) PBT Air (See note 2.) 0-1 LPM
D6F-P0010AM2
(Connector manifold mount)
PBT Air (See note 2.) 0-1 LPM
D6F-CABLE2 (Optional)
(A2 and AM2)
Flow Rate (LPM) 0.00 0.25 0.50 0.75 1.00
Output Voltage
(VDC)
0.50 ± 0.10 1.60 ± 0.10 2.10 ± 0.10 2.31 ± 0.10 2.50 ± 0.10
3.0
2.5
2.0
1.5
1.0
0.5
0.0
0.25
Flow Rate (L/min)
Output Voltage (V)
0.5 0.75 10
2
D6F-PD6F-P
Characteristics / Performance
Note: 1. 0 to 1 L/min. (normal) volumetric flow rate at 0 °C, 101.3kPa.
2. Dry gas. (must not contain large particles, eh dust, oil, mist)
3. Reference (typical)
Models D6F-P0010A1 D6F-P0010A2 D6F-P0010AM2
Flow Range (See note 1.) 0 to 1 L/min.
Calibration Gas (See note 2.) Air
Flow Port Type barbed fitting maximum outside dia. 4.9 mm manifold mount
Electrical Connection Lead terminal Connector (3 wire)
Power Supply 4.75 to 5.25 VDC
Current Consumption Max. 15 mA (no load, Vcc = 5 VDC)
Output Voltage 0.5 to 2.5 VDC
Accuracy ± 5% F.S. max. of detected characteristics at 25 °C (typical test results within +/-2% F.S.)
Repeatability (See note 3.) ± 0.4% F.S.
Output Voltage (Max.) 3.1 VDC (Lead resistance 10 kΩ)
Output Voltage (Min.) 0 VDC (Lead resistance 10 kΩ)
Rated Power Supply Voltage 10 VDC
Rated Output Voltage 4 VDC
Case PBT
Degree of Protection IP40
Withstand Pressure 50 kPa (7 psi)
Pressure Drop (See note 3.) 0.19 kPa 0.48 kPa
Operating Temperature -10 to 60 °C (with no icing or condensation)
Operating Humidity 35 to 85% RH (with no icing or condensation)
Storage Temperature -40 to 80 °C (with no icing or condensation)
Storage Humidity 35 to 85% RH (with no icing or condensation)
Temperature Characteristics ± 5% F.S. max. of detected characteristics at 25 °C (within -10 to 60 °C)
Insulation Resistance 20 MΩ (500 VDC between lead terminal and the case)
Dielectric Strength 500 VAC, 50/60 Hz for 1 minute. (Leakage current typ. Max. 1mA) between lead terminals and case.
Weight 8.5 g 8.0 g
3
D6F-PD6F-P
Connections / Dimensions (Unit: mm)
Note: All units are in millimeters unless otherwise indicated.
5.04
2.54
Two 3-dia.
through holes 13.5
Three lands,
Dia.: 1.3
Three through holes,
Dia.: 0.8
4.76
9.8
2.6 dia.
23.3 11.7
Two, 4.9 dia.
1.2
7.3
13.5
4.76
2.8 dia.Two, R1.4
1.5
6
10
17.2
Two, 1.1 dia.
Label
A
2.54
5.08
Detailed View of A Recommended Dimensions
for Connector Mounting Holes
XG8V-0344
Connector
Made by OMRON
2. Vout
1. Vcc
3. GND
Label: Gives model and lot numbers.
27.2
1.7
616.2
14 7.6
±0.2
13.2 7.2
7.2
D6F
MADE IN JAPAN
■PCB terminals
D6F-P0010A1
2.6 dia.
23.3 11.7 Two, 4.9 dia.
1.2
7.3
13.5
2.8 dia.
Two, R: 1.4 1.5
10
17.2
8.5
A
Two, 1.1 dia.
Label
Detailed View of A
1.Vcc
2.Vout
3.GND
Label: Gives model
and lot numbers.
8.5
27.2
1.7
6
14
16.2
7.6
±0.2
D6F
MADE IN JAPAN
13.2
0.3±0.1
3. GND
Label
2-C0.3
2. Vout
1. Vcc
Detailed View of A
Antirotain groove
Detailed View of B
Connector
3.5 dia.
27.2
22
14±0.05
2.7±0.1
0.3±0.1
6.7±0.1 *1
18
22
8
2
6.4 9.6
Two, 4 dia.
0
-0.05
1+0.1
0
A
B
D6F
MADE IN JAPAN
■Connector
D6F-P0010A2
D6F-P0010AM2
Note: The connector linked to this product
should use the following JST Mfg.
Co.,Ltd.
1) Pressure welding connector
Socket: 03SR-3S
Wire: AWG#30 or
2) Crimp type connector
Contact: SSH-003T-P0.2
Wire: AWG#32 to #28
Housing: SHR-03V-S
15±
3
(5) 180±
10
■CABLE (Optional)
D6F-CABLE2 GND - white
Vout - black
Vcc - red
4
D6F-PD6F-P
Packaging
No. Item Material
1 Sock liner CCNB
2 Tray (25pcs) Polyethylene
3 Box (100 pcs) CCNB
218
240
95
3
Display seal
1
2
TYPE D6F-P
5
D6F-PD6F-P
Safety Precautions
■Caution
The D6F is built for use with general-purpose devices. In particu-
lar, when using the D6F for applications with the safety require-
ments described below, take steps to ensure system and device
safety through measures such as fail-safe designs, redundant
designs, and regular inspections. The D6F-P is not suitable for: or
if that is too strong of a statement, something like:
"Particular attention should be paid to applications including, but
not limited to, the following:
• Safety devices for ensuring safety for persons.
• Transportation equipment control (such as applications to stop
operation)
• Aviation and space equipment
• Nuclear power equipment
Do not use the D6F for applications in which D6F operation would
directly affect human life.
■Precautions for Correct Use
Fluids, Piping, and Sensor Installation
1. Do not use combustible gas (such as hydrogen) or corro-
sive gas (such as chlorine, sulfur, acid, or alkali) other than
the specified applicable fluids. Doing so may cause product
failure.
2. The specified performance may not be obtained if the D6F
is used for fluids other than the specified applicable fluids.
3. After removing the Sensor from the package, do not allow
foreign particles to enter the piping. Foreign particles in the
piping may cause product failure.
4. It is recommended that the pipes be mounted horizontally.
If they are not mounted horizontally, an error of ±1% FS or
higher may result.
5. Install the Sensor on a flat surface. Incorrect installation
may cause malfunctions or may make it impossible to
obtain correct measurements.
6. Turn OFF the power supply to the system before installing
the Sensor. If the Sensor is installed while the power supply
is ON, electric shock or incorrect operation may occur.
7. Always check operation after installing the Sensor.
8. Do not drop the Sensor or disassemble the cover.
9. Depending on the environment and the mounting position,
foreign objects, such as dust or dirt, may enter into the Sen-
sor and partially or completely block the flow path. If this
occurs, the Sensor may not be able to sufficiently perform
as described above. Make sure that you understand how to
use the Sensor and test it in advance with the actual equip-
ment with which it is to be used.
10.Install the piping so that the fluid flows in the direction from
plus (+) to minus (-). Correct measurements cannot be
obtained if the fluid flows in the wrong direction.
<D6F-0010A1/-P0010A2>
1. When installing the Sensor on a PCB, solder the terminals
after first securing the Sensor to the PCB.
2. Install the Sensor using M2.6 panhead screws or tapping
screws of the same diameter, and tighten them to a torque
of 0.59 N•m maximum.
<D6F-0010AM2>
1. Install the Sensor using M3 panhead screws or tapping
screws of the same diameter, and tighten them to a torque
of 0.59 N•m maximum.
2. Use O-rings to seal the fluid inlet and outlet sections. (Rec-
ommended O-ring: JIS B 2401 bearing number P4 or ISO
3601-1 Dicignation: A0037G)
Installation Example
O-rings are not attached.
Operating Environment
Do not use the Sensor in the following locations:
• Locations subject to direct radiant heat from heating equipment
• Locations subject to water or oil
• Locations subject to direct sunlight
• Locations subject to sudden temperature changes
• Locations where there is a possibility of icing or condensation
• Locations subject to strong vibration or shock
Countermeasures Against Noise
Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
• Install the Sensor as far as possible from devices that gener-
ate surges or strong high frequencies (such as high-fre-
quency welders and machines).
• Attach surge absorbers or noise filters to noise-generating
devices that are near the Sensor (in particular, equipment
with inductance, such as motors, transformers, solenoids,
and magnetic coils). (It also helps to separate pipes and
ducts, and to use shielded cables.)
Power Supply
• Use the applicable connectors. Directly soldering the connec-
tion terminals will cause product failure.
• Check the terminal names and polarity and wire the power sup-
ply correctly. Incorrect wiring will cause failure of internal com-
ponents.
• When using a commercially available switching regulator,
ground the FG (frame ground) and G (ground) terminals.
■RoHS Directive
The RoHS mark is displayed on the packing of products for which
the six substances banned by the RoHS Directive have been
abolished (both in processing and in the electronic components
mounted to the PCBs).
Note: RoHS marking may be deleted if it is later determined that
parts that were previously treated as RoHS compliant are
not compliant due to circumstances at the supplier of the
parts.
RoHS Compliance Standards
The following standards are used to determine RoHS compliance
for the six banned substances.
• Lead: 1,000 ppm max.
• Hexavalent chromium: 1,000 ppm max.
• Mercury: 1,000 ppm max.
• PBB: 1,000 ppm max.
• Cadmium: 100 ppm max.
• PBDE: 1,000 ppm max.
O-ring
M3 panhead screw or tapping
screw of the same diameter
D6F-PD6F-P
In the interest of product improvement, specifications are subject to change without notice.
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
Cat. No. A183-E1-02
Printed in Japan
0210 (0109) (W)
OMRON Corporation
Micro Devices H.Q.
Micro Devices Division
686-1 Ichimiyake, Yasu,
Shiga, 520-2326 JAPAN
Tel: (81)77-588-9200/Fax: (81)77-588-9909
