14
D6F-A5
MEMS Flow Sensor
High-accuracy Sensing with a Compact
Body for Flow Rates Up to 50 L/min.
•Accurately detects a mass flow rate of 10 to 50 L/min.
•A compact size of 30 × 78 × 30 mm (H × W × D).
Ordering Information
MEMS Flow Sensor
Accessory (Sold separately)
Note: Refer to Accessories for the D6F Series on page 39.
Connections
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Output Voltage Characteristics
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Flow Port Type Applicable fluid Flow rate range Model
Manifold Air
0 to 10 L/min D6F-10A5-000
0 to 20 L/min D6F-20A5-000
0 to 50 L/min D6F-50A5-000
Type Model
Cable D6F-CABLE1
Enlarged View
3: GND
2: Vout
1: Vcc
Pin No. 1: Vcc
2: Vout
3: GND
Connector 53398-03** (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing 51021-0300 (Made by Molex Japan)
Terminals 50079 (Made by Molex Japan)
Wires AWG28 to AWG26
Flow rate
L/min (normal) 02.0 4.0 6.0 8.0 10.0
Output voltage
V
1.00
±0.12
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
Flow rate
L/min (normal) 04.0 8.0 12.0 16.0 20.0
Output voltage
V
1.00
±0.12
1.93
±0.12
2.87
±0.12
3.70
±0.12
4.41
±0.12
5.00
±0.12
Flow rate
L/min (normal) 010 20 30 40 50
Output voltage
V
1.00
±0.12
2.45
±0.12
3.51
±0.12
4.20
±0.12
4.66
±0.12
5.00
±0.12
6.0
5.0
4.0
3.0
2.0
1.0
2.00.0 8.0 10.06.04.0
0.0
Output voltage (V)
Flow rate (L/min)
4.00.0 16.0 20.012.08.0
6.0
5.0
4.0
3.0
2.0
1.0
0.0
Output voltage (V)
Flow rate (L/min)
10.00.0 40.0 50.030.020.0
6.0
5.0
4.0
3.0
2.0
1.0
0.0
Output voltage (V)
Flow rate (L/min)
D6F-10A5-000 D6F-20A5-000
D6F-50A5-000
15
D6F-A5 MEMS Flow Sensor
Characteristics/Performance
Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
Note: 4. With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
Model D6F-10A5-000 D6F-20A5-000 D6F-50A5-000
Flow Range (See note 1.) 0 to 10 L/min 0 to 20 L/min 0 to 50 L/min
Calibration Gas (See note 2.) Air
Flow Port Type Manifold
Electrical Connection Three-pin connector
Power Supply 10.8 to 26.4 VDC
Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy ±3% FS (25°C characteristic)
Repeatability (See note 3.) ±0.3% FS
Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage 26.4 VDC
Rated Output Voltage 6 VDC
Case PPS/aluminum alloy
Degree of Protection IEC IP40 (Excluding tubing sections.)
Withstand Pressure 500 kPa
Pressure Drop (See note 3.) 0.8 kPa 2.9 kPa 17.2 kPa
Operating Temperature (See note 4.) −10 to 60°C
Operating Humidity (See note 4.) 35% to 85%
Storage Temperature (See note 4.) −30 to 80°C
Storage Humidity (See note 4.) 35% to 85%
Temperature Characteristics ±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight 103 g
(30.05)
30
±0.5
66
±0.1
66
±0.05
14
±0.05
Four, M3 holes
Two, 1.4
±0.1
Four, 3.2-dia. through holes Lot number label
Two, 5 dia.
30
±0.5
78
±0.5
(6)
(3.7)
6
Mounting Hole
Dimensions
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
