KXTH9 Series
Accelerometers and Inclinometers
Ultra-small Package - 3x3x0.9mm LGA
Low Power Consumption
Multiplexed Analog Output
Factory-programmable Internal Low Pass Filter
Ultra-low Noise Density
Lead-free Solderability
Excellent Temperature Performance
High Shock Survivability
Factory-programmable Offset and Sensitivity
Auxiliary Input to Multiplexer
Self-test Function
FEATURES
“Kionix” is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided
in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution.
No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product
specifications or discontinue this product at any time without prior notice.
© Kionix 2010 All Rights Reserved
November 3, 2010 Rev. 0
Page 1 of 2
The KXTH9 series is designed to provide a high signal-to-noise ratio
with excellent performance over temperature. These sensors can ac-
cept supply voltages between 1.8V and 3.6V. Sensitivity is factory
programmable allowing customization for applications requiring from
1.5g to 6.0g ranges. The auxiliary input to the multiplexer minimizes
the need for external A/D converters.
These high-performance silicon micromachined linear accelerometers
and inclinometers consist of a sensor element and an ASIC packaged in
a 3x3x0.9 mm Land Grid Array (LGA). The sensor element is fabricated
from single-crystal silicon with proprietary Deep Reactive Ion Etching
(DRIE) processes, and is protected from the environment by a
hermetically-sealed silicon cap at the wafer level.
The sensor element functions on the principle of differential
capacitance. Acceleration causes displacement of a silicon structure
resulting in a change in capacitance. An ASIC, fabricated using a stan-
dard CMOS manufacturing process, detects and transforms changes in
capacitance into an analog output voltage, which is proportional to
acceleration.
PROPRIETARY TECHNOLOGY
36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info@kionix.com
Place holder
for new photo.
APPLICATIONS
Free-fall Detection
Gesture Recognition and User Interface Function
Inclination and Tilt Sensing
Inertial Navigation and Dead Reckoning
Image Stabilization
Static or Dynamic Acceleration
MARKETS
Ultra-mobile PCs/Laptops/Hard Disk Drives
Cell Phones and Handheld PDAs
Game Controllers & Computer Peripherals
Personal Navigation Devices
Cameras and Video Equipment
Sports Diagnostic Equipment/Pedometers
KXTH9 Series
Accelerometers and Inclinometers
PERFORMANCE SPECIFICATIONS
The performance parameters below are programmed and tested at 2.5 volts. However, the device can be
factory programmed to accept supply voltages from 1.8 V to 3.6 V. Performance parameters will change with
supply voltage variations.
NOTES
1
Custom ranges from 1.5g to 6.0g available.
2
Factory-programmable internal low pass filter.
ORDERING GUIDE
© Kionix 2010 All Rights Reserved
November 3, 2010 Rev. 0
Page 2 of 2
PERFORMANCE SPECIFICATIONS
PARAMETERS UNITS KXTH9-2083 CONDITION
Range
1
g ±2.5 Factory programmable
Sensitivity
mV/g 400 typical (412 max)
0g Offset vs. Temp mg/°C ±0.6 typical -40°C to +85°C
Sensitivity vs. Temp %/°C ±0.01 (xy) typical ±0.04 (z) typical -40°C to +85°C
Noise mg / √Hz 150 typical
Bandwidth
2
Hz 50 typical -3dB
Non-Linearity % of FS 0.1 typical % of full scale output
Ratiometric Error % 0.3 typical Vdd=2.5V±5%
Cross-axis Sensitivity % 2.0 typical
Power Supply V 2.5 Standard
Current Consumption
µA 350 typical Operating
µA 5 typical Standby
ENVIRONMENTAL SPECIFICATIONS
PARAMETERS UNITS KXTH9-2083 CONDITION
Operating Temperature °C -40 to 85 Powered
Storage Temperature °C -55 to 150 Un-powered
g 5,000 for 0.5ms Powered or un-powered
10,000 for 0.2ms
ESD V 3,000 Human body model
Mechanical Shock halversine
Product Output Axis(es) of
Sensitivity
Range
(g)
Sensitivity
mV/g Offset (V) Operating Voltage
(V)
Temperature
(°C) Package
KXTH9-2083 Multiplexed
Analog XYZ 2.5 400 typical 1.25 2.5 -40 to +85 3x3x0.9 LGA
