D6F-CABLE2 - OMRON ELECTRONIC COMPONENTS

D6F-P

MEMS Flow Sensor

A Compact, High-accuracy Flow

Sensor with Superior Resistance

to Environments.

• Anti-dust performance is improved using the Cyclon method.

• A full lineup of models with different connector types: barb

joints, lead terminals for direct mounting on-board, and mani-

folds.

• High accuracy of ±5% FS.

Ordering Information

Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative.

Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.

Output Voltage Characteristics

D6F-P0001A1

Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient tem-

perature of 25±5°C, and ambient humidity of 35% to 75%.

D6F-P0010A1/-P0010A2/-P0010AM2

Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient tem-

perature of 25±5°C, and ambient humidity of 35% to 75%.

RoHS Compliant

Refer to the Safety Precautions on page 4.

Model Applicable fluid (See note 1.) Flow rate range Minimum order

D6F-P0001A1 (Lead terminals)

Air (See note 2.)

0 to 0.1 L/min. 25

D6F-P0010A1 (Lead terminals)

0 to 1 L/min.

D6F-P0010A2 (Connector) 25

D6F-P0010AM2

(Connector manifold mount) 25

D6F-CABLE2 (Optional)

(A2 and AM2) −−25

Flow rate

L/min (normal) 00.02 0.04 0.06 0.08 0.10

Output voltage

0.50

±0.10

0.90

±0.10

1.30

±0.10

1.70

±0.10

2.10

±0.10

2.50

±0.10

3.0

2.5

2.0

1.5

1.0

0.5

0.0

0.02 0.04 0.06 0.080.100

Output voltage (V)

Flow rate (L/min)

Flow rate

L/min (normal) 00.25 0.50 0.75 1.00

Output voltage

0.50

±0.10

1.60

±0.10

2.10

±0.10

2.31

±0.10

2.50

±0.10

3.0

2.5

2.0

1.5

1.0

0.5

0.0

0.25 0.5 0.75 10

Output voltage (V)

Flow rate (L/min)

D6F-P MEMS Flow Sensor

D6F-P

Characteristics/Performance

Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.

Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)

Note: 3. Reference (typical)

Model D6F-P0001A1 D6F-P0010A1 D6F-P0010A2 D6F-P0010AM2

Flow Range (See note 1.) 0 to 0.1 L/min 0 to 1 L/min

Calibration Gas (See note 2.) Air

Flow Port Type Barb joint

Maximum outside diameter: 4.9 mm Manifold

Electrical Connection Lead terminals Three-pin connector

Power Supply 4.75 to 5.25 VDC

Current Consumption 15 mA max. with no load and a Vcc of 5.0 V

Output Voltage 0.5 to 2.5 VDC (Load resistance: 10 kΩ)

Accuracy ±5% FS (25°C characteristic)

Repeatability (See note 3.) ±1.0% FS ±0.4% FS

Output Voltage (Max.) 3.1 VDC (Load resistance: 10 kΩ)

Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ)

Rated Power Supply Voltage 10 VDC

Rated Output Voltage 4 VDC

Case PBT

Degree of Protection IEC IP40

Withstand Pressure 50 kPa

Pressure Drop (See note 3.) 0.005 kPa 0.19 kPa 0.67 kPa

Operating Temperature −10 to +60°C (with no condensation or icing)

Operating Humidity 35% to 85% (with no condensation or icing)

Storage Temperature −40 to +80°C (with no condensation or icing)

Storage Humidity 35% to 85% (with no condensation or icing)

Temperature Characteristics ±5% FS for 25°C characteristic at an ambient temperature of -10 to +60°C

Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)

Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)

Weight 8.5 g 8.0 g

D6F-P MEMS Flow Sensor

D6F-P

Connections/Dimensions (Unit: mm)

■ Lead Terminals

■ Connectors

■ Cable (Optional)

D6F-CABLE2

9.8

2.6 dia.

23.3 11.7

Two, 4.9 dia.

1.2

7.3

13.5

4.76

2.8 dia.Two, R: 1.4

1.5

17.2

Two, 1.1 dia.

Label

Recommended Dimensions for

Connector Mounting Holes (Bottom view)

Label: Gives model and lot numbers.

27.2

1.7

616.2

14 7.6±0.2

13.2 7.2

D6F

MADE IN JAPAN

2.54

5.08

Detailed View of A

Connector

XG8V-0344

(manufactured

by OMRON)

2. Vout

1. Vcc

3. GND

5.04

2.54

Two, 3-dia.

through hole 13.5

Three, 1.3-dia. lands

Three, 0.8-dia.

through holes

4.76

7.2

D6F-P0001A1/D6F-P0010A1

2.6 dia.

23.3 11.7

Two, 4.9 dia.

1.2

7.3

13.5

2.8 dia.

Two, R: 1.4 1.5

17.2

8.5

Two, 1.1 dia.

Label

Detailed View of A

Label: Gives model and lot numbers.

8.5

27.2

1.7

16.2

7.6±0.2

D6F

MADE IN JAPAN

13.2

1.Vcc

2.Vout

3.GND

D6F-P0010A2

D6F-P0010AM2

0.3±0.1

Lot number label

Two, 0.3

(entire circumference)

Detailed View of A

Grooves to stop rotation

Detailed View of B

Connector Details

3.5 dia.

27.2

22.1

14±0.05

2.7±0.1

0.3±0.1

6.7±0.1 *1

6.4 9.6

Two, 4 dia.

−0.05

1+0.1

D6F

MADE IN JAPAN

3. GND

2.Vout

1.Vcc

14±0.05

6.7±0.1

M3 threaded

Two, 7 dia.

+0.5

*1. Recommended Installation Dimensions

Note: Use one of the following connectors from JST

Mfg. Co., Ltd. to connect to the D6F.

1) Pressure welding connector

Socket: 03SR-3S

Wire: AWG#30

2) Crimp type connector

Contact: SSH-003T-P0.2

Wire: AWG#32 to #28

Housing: SHR-03V-S

±3

(5) 180

±10

3: GND

2: Vout

White wire

Black wire

Red wire 1: Vcc

D6F-P MEMS Flow Sensor

D6F-P

Safety Precautions

The D6F is built for use with general-purpose devices. In cases

such as those described below, where safety is required, imple-

ment measures to ensure the safety of the system and all

devices, such as fail-safe designs, redundancy designs, and reg-

ular maintenance.

• Safety devices for ensuring safety for persons

• Transportation equipment control (such as applications to stop

operation)

• Aviation and space equipment

• Nuclear power equipment

Do not use the D6F for applications in which D6F operation

would directly affect human life.

Make sure that the power to all equipment is turned OFF before

you install the Sensor. Installing the Sensor while the power sup-

ply is ON may result in electrical shock or abnormal operation.

● Fluids,Tubes, and Sensor Installation

All Models

(1)

Use clean fluids. Dust and mist can affect the characteristics

of the Sensor or damage the Sensor. Install a filter and mist

separator on the upstream tube.

(Not required for the D6F-W@A1 or D6F-P.)

(2)

Do not use combustible gases (e.g., hydrogen), corrosive

gases (e.g., chlorine, sulfur, acidic, or alkali gas), or other

non-approved fluids. They may damage the Sensor.

(3)

The performance specifications that are given for the G6F

do not apply if any fluids other than the specified applicable

fluid are used.

(4)

Foreign matter in the tubes that are connected to the Sensor

may damage the Sensor. Prevent any foreign matter from

entering the tubes after the Sensor is removed from its

packaging.

(5)

Attach the tubes so that fluid flows only in the direction des-

ignated by the arrows on the Sensor. Correct measurements

cannot be obtained if the fluid flows in the wrong direction.

(6)

We recommend that you install the tubes horizontally. If the

tubes are not installed horizontally, an error of ±1% FS or

higher may result.

(This does not apply to the D6F-03A3.)

(7)

Install the Sensor on a flat surface. Incorrect installation may

damage the Sensor and make it impossible to obtain correct

measurements.

(8)

After the Sensor is installed, check to confirm that it oper-

ates correctly.

(9)

Do not drop the Sensor, remove the cover, or attempt to dis-

assemble the Sensor in any way.

D6F-P0001A1, D6F-P0010A1, and D6F-P0010A2

(1)

Depending on the ambient environment and installation

location, dust, dirt, and other foreign matter may come in

inside the Sensor and block a part or all of the flow path or

accumulate on internal components. This may result in the

Sensor not being able to perform to the specifications given

above. Always perform a pre-evaluation on your actual

equipment and be aware of the possible problems that may

occur before you use the Sensor with the actual equipment.

(2)

Attach all tubes so that the fluid flows only in the direction

from the positive side (+) to the negative side (−).

(3)

For PCB-mounting, perform terminal soldering only after the

Sensor is secured into place on the PCB.

(4)

Use M2.6 panhead screws or equivalent tapping screws to

mount the Sensor, and tighten the screws to a maximum

torque of 0.59 N·m.

D6F-P0010AM2

(1)

Depending on the ambient environment and installation

location, dust, dirt, and other foreign matter may come in

inside the Sensor and block a part or all of the flow path or

accumulate on internal components. This may result in the

Sensor not being able to perform to the specifications given

above. Always perform a pre-evaluation on your actual

equipment and be aware of the possible problems that may

occur before you use the Sensor with the actual equipment.

(2)

Attach all tubes so that the fluid flows only in the direction

from the positive side (+) to the negative side (−).

(3)

Use M3 panhead screws or equivalent tapping screws to

mount the Sensor, and tighten the screws to a maximum

torque of 0.59 N·m.

(4)

Install O-rings to seal the fluid inlet and outlet points. The

recommended O-ring is JIS B 2401, nominal number P4.

● Operating Environment

Do not use the Sensor in the following locations:

• Locations directly subject to heat radiated from heating equip-

ment

• Locations subject to water or oil

• Locations subject to direct sunlight

• Locations subject to intense temperature changes

• Locations subject to icing or condensation

• Locations subject to excessive vibration or shock

● Countermeasures against Noise

Noise may make it impossible to obtain correct measurements.

Consider the following countermeasures.

• Allow as much space as possible between the Sensor and

devices that generates high frequencies (such as high-frequency

welders and high-frequency sewing machines) or surges.

• Attach surge absorbers or noise filters to noise-generating

devices that are near the Sensor (in particular, equipment with

inductance, such as motors, transformers, solenoids, and

magnetic coils).

(It also helps to separate pipes and ducts, and to use shielded

cables.)

● Power Supply

• Do not directly solder power supply leads to the connector ter-

minals. Use only the appropriate connectors.

• Wire with the correct terminal names and polarities. Incorrect

wiring will cause failure of internal components.

• When using a commercially available switching regulator,

ground the FG (frame ground) and G (ground) terminals.

WARNING

Caution

Precautions for Correct Use

O-ring

M3 panhead screw or a tapping screw

with the same diameter

Installation Example

D6F-P MEMS Flow Sensor

D6F-P

The RoHS mark is displayed on the packing of products for

which the six substances banned by the RoHS Directive have

been abolished (both in processing and in the electronic compo-

nents mounted to the PCBs).

* RoHS marking may be terminated if it is later determined that parts that were

previously treated as RoHS compliant are not compliant due to circumstanc-

es at the supplier of the parts.

● RoHS Compliance Criteria

The following standards are used to determine RoHS compli-

ance for the six banned substances.

(Items to which the RoHS Directive is not applicable are not

given.)

• Lead: 1,000 ppm max.

• Hexavalent chromium: 1,000 ppm max.

• Mercury: 1,000 ppm max.

• PBB: 1,000 ppm max.

• Cadmium: 100 ppm max.

• PBDE: 1,000 ppm max.

RoHS Directive

D6F-P MEMS Flow Sensor

D6F-P

• Application examples provided in this document are for reference only. In actual applications, confirm equipment functions and safety before using the product.

• Consult your OMRON representative before using the product under conditions which are not described in the manual or applying the product to nuclear control systems, railroad

systems, aviation systems, vehicles, combustion systems, medical equipment, amusement machines, safety equipment, and other systems or equipment that may have a serious

influence on lives and property if used improperly. Make sure that the ratings and performance characteristics of the product provide a margin of safety for the system or

equipment, and be sure to provide the system or equipment with double safety mechanisms.

OMRON Corporation

ELECTRONIC AND MECHANICAL COMPONENTS COMPANY Contact: www.omron.com/ecb

Cat. No. A183-E1-05

0713(0109)